[Scan]
initial_time=2016-01-18T20:19:27
final_time=2016-01-18T20:19:47
ip_count=19
run=1024
dataset=6
scan=460
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09364E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=1.36309E-8
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=2.01256E-9
ql3_vset=
ql3_vmon=-9.13215E0
ql3_imon=1.20342E-10
ql4_vset=
ql4_vmon=-9.14285E0
ql4_imon=-3.74317E-11
mult1=-1.00896E-8
mult2=-2.59485E-9
rf_tmon=-4.00773E-3
rf_agc=3.36821E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.67236E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68897E0
bslens_imon=2.63148E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1949E1
lens5a_imon=1.98487E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05205E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54133E1
cs_ef1b_imon=2.82881E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04561E1
cs_ea1_imon=2.53319E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37316E0
lens1_imon=2.6423E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.645E1
os_ef1alow_imon=2.96468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.4964E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.93873E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.34001E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.25886E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.36772E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.18962E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.9845E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.35469E-8
tplens_vset=1.4E-1
tplens_vmon=1.68349E0
tplens_imon=-4.39939E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26579E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26332E1
iondef2_imon=1.56742E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03018E2
lens6_imon=2.9831E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.04309E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=1.77471E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33724E1
lens5b_imon=2.15863E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54891E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.15821E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05576E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11358E1
os_restr2_imon=3.42743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23014E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.25146E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.08373E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.85115E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15597E0
cs_ionaccel_imon=-1.73653E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.29356E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.38281E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.54646E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.04755E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2151E0
defgridb_imon=5.91199E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.42973E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07359E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65621E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=9.96936E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62858E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6749E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.70568E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.94924E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.81826E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22706E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34007E-3
inlet_lpb_pmon=2.99088E-1
chamber_ion_pmon=1.20011E-7
chamber_cvt_pmon=2.51863E-3
foreline_cvt_pmon=2.51863E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0254E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-8.16417E-1	-7.97892E-1	-9.13205E0	-9.14273E0	4.12464E-3	9.51052E-2	2.7334E1	-3.26974E1	-3.25865E1	2.68496E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.96414E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.16202E-1	-7.98059E-1	-9.13212E0	-9.14259E0	4.17233E-3	9.5129E-2	2.73166E1	-3.26634E1	-3.26271E1	2.68477E1	1.19697E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.96887E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-8.16274E-1	-7.98059E-1	-9.13219E0	-9.14271E0	3.95775E-3	9.49144E-2	2.73235E1	-3.26572E1	-3.26279E1	2.6855E1	1.20051E-7	2.51423E-3	2.51423E-3	6.31744E-3	2.97678E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-8.16774E-1	-7.98154E-1	-9.13217E0	-9.14261E0	4.17233E-3	9.48429E-2	2.73216E1	-3.26703E1	-3.26537E1	2.68436E1	1.19937E-7	2.51498E-3	2.51498E-3	6.3131E-3	2.97286E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.16822E-1	-7.97963E-1	-9.13198E0	-9.14261E0	4.05312E-3	9.4986E-2	2.73141E1	-3.26615E1	-3.26591E1	2.68292E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09333E0	-8.16774E-1	-7.97868E-1	-9.13179E0	-9.14249E0	4.50611E-3	9.51529E-2	2.7347E1	-3.2662E1	-3.26349E1	2.68635E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09317E0	-8.16774E-1	-7.98082E-1	-9.13186E0	-9.1429E0	4.69685E-3	9.50098E-2	2.73098E1	-3.26608E1	-3.26349E1	2.68395E1	1.20004E-7	2.52492E-3	2.52492E-3	6.3074E-3	2.9892E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09286E0	-8.1656E-1	-7.97892E-1	-9.13191E0	-9.14283E0	4.3869E-3	9.50813E-2	2.73275E1	-3.26284E1	-3.26266E1	2.68154E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.16321E-1	-7.97939E-1	-9.132E0	-9.14278E0	4.26769E-3	9.49144E-2	2.73027E1	-3.26785E1	-3.26095E1	2.68262E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.16631E-1	-7.98082E-1	-9.13234E0	-9.14295E0	4.69685E-3	9.5129E-2	2.73309E1	-3.26579E1	-3.26374E1	2.68448E1	1.20363E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.9943E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0934E0	-8.16727E-1	-7.98178E-1	-9.13203E0	-9.14254E0	4.69685E-3	9.51052E-2	2.73045E1	-3.26603E1	-3.26074E1	2.68226E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09325E0	-8.1656E-1	-7.98154E-1	-9.13212E0	-9.14223E0	4.81606E-3	9.53197E-2	2.73008E1	-3.26419E1	-3.26615E1	2.68569E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09317E0	-8.16512E-1	-7.98106E-1	-9.13219E0	-9.14233E0	4.74453E-3	9.52482E-2	2.73175E1	-3.26655E1	-3.26231E1	2.6834E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09271E0	-8.16846E-1	-7.98273E-1	-9.13208E0	-9.14252E0	4.55379E-3	9.50336E-2	2.73279E1	-3.26729E1	-3.25918E1	2.68334E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.03449E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0934E0	-8.16584E-1	-7.98178E-1	-9.13243E0	-9.14278E0	4.64916E-3	9.53913E-2	2.73676E1	-3.26639E1	-3.26242E1	2.68202E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.17084E-1	-7.98178E-1	-9.13258E0	-9.14245E0	4.69685E-3	9.53436E-2	2.73163E1	-3.26413E1	-3.26449E1	2.68337E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99686E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.17037E-1	-7.98202E-1	-9.13212E0	-9.14245E0	4.98295E-3	9.52244E-2	2.73153E1	-3.26561E1	-3.26266E1	2.68375E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.98156E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16846E-1	-7.98082E-1	-9.132E0	-9.14245E0	4.76837E-3	9.51052E-2	2.72962E1	-3.26897E1	-3.26195E1	2.68343E1	1.20244E-7	2.5147E-3	2.5147E-3	6.35223E-3	3.00144E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.16894E-1	-7.98416E-1	-9.13222E0	-9.14276E0	4.48227E-3	9.51767E-2	2.7321E1	-3.26797E1	-3.26313E1	2.68388E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09364E0	-8.16822E-1	-7.98011E-1	-9.13215E0	-9.14285E0	4.31538E-3	9.50098E-2	2.73045E1	-3.26332E1	-3.26579E1	2.68154E1	1.20011E-7	2.51863E-3	2.51863E-3	6.34007E-3	2.99088E-1
