[Scan]
initial_time=2016-01-18T20:19:54
final_time=2016-01-18T20:20:13
ip_count=19
run=1024
dataset=6
scan=461
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=1.36226E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.93466E-9
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=1.08933E-10
ql4_vset=
ql4_vmon=-9.14328E0
ql4_imon=-3.65615E-11
mult1=-1.01145E-8
mult2=-2.72196E-9
rf_tmon=-4.23433E-3
rf_agc=3.30885E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.67145E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69483E0
bslens_imon=2.30064E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19829E1
lens5a_imon=1.9986E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.0517E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53942E1
cs_ef1b_imon=2.82421E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02257E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04645E1
cs_ea1_imon=2.53926E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36093E0
lens1_imon=2.57979E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64721E1
os_ef1alow_imon=2.96456E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03617E1
cs_ea2_imon=1.47887E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84351E1
cs_ef1a_imon=2.932E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.33934E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11323E1
os_restr1_imon=4.26772E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15232E1
os_ea1_imon=2.36737E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63585E1
os_ef1bup_imon=3.07646E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23006E0
cs_ionrep_imon=1.20303E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93732E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01934E1
cs_anode1_imon=2.96942E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.34754E-8
tplens_vset=1.4E-1
tplens_vmon=1.6647E0
tplens_imon=-2.44728E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26191E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26718E1
iondef2_imon=1.55895E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02986E2
lens6_imon=2.98203E-4
ql6_vset=1.0E-1
ql6_vmon=9.48668E-2
ql6_imon=4.03335E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26434E0
ionrepsh_imon=1.78447E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33927E1
lens5b_imon=2.15984E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74676E1
cs_ef2b_imon=3.12062E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54287E0
os_ea2_imon=-7.36906E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71314E1
cs_ef2a_imon=3.15767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05144E0
os_ef2alow_imon=-2.49946E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15097E-1
os_ef2bup_imon=-5.24277E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11273E1
os_restr2_imon=3.42115E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.30736E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.24186E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73086E1
iondef1_imon=1.09946E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68215E1
iondef4_imon=1.09401E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.01306E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.83575E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15821E0
cs_ionaccel_imon=-1.81457E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.4744E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.6579E-6
window_vset=0.0E0
window_vmon=2.47537E-1
window_imon=-8.52728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39107E-4
mask2_vset=0.0E0
mask2_vmon=-1.86425E1
mask2_imon=-7.66649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=8.17005E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.68984E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.16366E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32388E0
defgridb_imon=5.92219E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33371E1
os_fil1_imon=9.42258E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06637E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65785E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30894E1
cs_fil1_imon=9.96057E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62927E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67414E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.75192E-2
os_fil2_imon=-2.71864E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9463E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35164E-1
cs_fil2_imon=-2.64379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.92948E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22649E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09285E-1
res40_imon=-2.50695E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.16846E-1	-7.97987E-1	-9.13234E0	-9.14285E0	4.41074E-3	9.51529E-2	2.73196E1	-3.26637E1	-3.25988E1	2.68123E1	1.19819E-7	2.52585E-3	2.52585E-3	6.31858E-3	3.0041E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09317E0	-8.17013E-1	-7.98273E-1	-9.13217E0	-9.14295E0	4.48227E-3	9.49383E-2	2.73192E1	-3.26462E1	-3.26089E1	2.68328E1	1.198E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16917E-1	-7.98154E-1	-9.1321E0	-9.1429E0	4.48227E-3	9.5129E-2	2.73265E1	-3.26585E1	-3.26254E1	2.68545E1	1.19965E-7	2.52647E-3	2.52647E-3	6.34037E-3	3.00824E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.1687E-1	-7.9813E-1	-9.13203E0	-9.1428E0	4.673E-3	9.49144E-2	2.73219E1	-3.26603E1	-3.26176E1	2.68324E1	1.19953E-7	2.5131E-3	2.5131E-3	6.34518E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16703E-1	-7.98273E-1	-9.13196E0	-9.14295E0	4.36306E-3	9.50575E-2	2.73063E1	-3.26537E1	-3.26626E1	2.68395E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16655E-1	-7.97987E-1	-9.13217E0	-9.14271E0	4.22001E-3	9.48429E-2	2.73033E1	-3.26597E1	-3.26122E1	2.68274E1	1.20122E-7	2.51116E-3	2.51116E-3	6.29645E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16894E-1	-7.98154E-1	-9.13215E0	-9.14288E0	4.36306E-3	9.46283E-2	2.72925E1	-3.26579E1	-3.26446E1	2.68088E1	1.19861E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16965E-1	-7.98178E-1	-9.13236E0	-9.14285E0	4.33922E-3	9.47714E-2	2.73063E1	-3.26633E1	-3.26242E1	2.68364E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16774E-1	-7.98154E-1	-9.13215E0	-9.14288E0	4.69685E-3	9.46999E-2	2.73093E1	-3.26326E1	-3.26098E1	2.68424E1	1.19809E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16751E-1	-7.97915E-1	-9.13229E0	-9.14261E0	4.673E-3	9.49144E-2	2.73321E1	-3.26657E1	-3.26206E1	2.68767E1	1.19861E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.01871E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16512E-1	-7.98059E-1	-9.13193E0	-9.1428E0	4.81606E-3	9.5129E-2	2.73219E1	-3.26609E1	-3.26609E1	2.68436E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16703E-1	-7.97987E-1	-9.13212E0	-9.14259E0	4.673E-3	9.52005E-2	2.72839E1	-3.26667E1	-3.26166E1	2.68436E1	1.19925E-7	2.51915E-3	2.51915E-3	6.28511E-3	2.98554E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16703E-1	-7.97987E-1	-9.13215E0	-9.14237E0	4.62532E-3	9.52721E-2	2.73363E1	-3.26717E1	-3.26218E1	2.68545E1	1.19851E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.9943E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.1687E-1	-7.97701E-1	-9.13219E0	-9.14276E0	4.76837E-3	9.50813E-2	2.73541E1	-3.26848E1	-3.26566E1	2.6822E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9926E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16751E-1	-7.97677E-1	-9.13224E0	-9.14304E0	4.31538E-3	9.51052E-2	2.73464E1	-3.2662E1	-3.25888E1	2.68496E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9978E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16607E-1	-7.97915E-1	-9.13208E0	-9.1429E0	4.29153E-3	9.51052E-2	2.73284E1	-3.26476E1	-3.26027E1	2.68367E1	1.20069E-7	2.51007E-3	2.51007E-3	6.32936E-3	3.00041E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.16727E-1	-7.97653E-1	-9.13205E0	-9.14268E0	4.48227E-3	9.50336E-2	2.73127E1	-3.2654E1	-3.25859E1	2.6853E1	1.20161E-7	2.5165E-3	2.5165E-3	6.31251E-3	3.00878E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16679E-1	-7.97677E-1	-9.13184E0	-9.14266E0	4.55379E-3	9.4986E-2	2.72774E1	-3.26254E1	-3.26107E1	2.68296E1	1.19963E-7	2.5085E-3	2.5085E-3	6.3074E-3	2.99916E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.17204E-1	-7.98011E-1	-9.13193E0	-9.14309E0	4.41074E-3	9.51529E-2	2.73309E1	-3.26434E1	-3.26362E1	2.68268E1	1.198E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.1687E-1	-7.98035E-1	-9.13179E0	-9.14328E0	4.64916E-3	9.48668E-2	2.73086E1	-3.26718E1	-3.26191E1	2.68215E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
