[Scan]
initial_time=2016-01-18T20:20:20
final_time=2016-01-18T20:20:40
ip_count=19
run=1024
dataset=6
scan=462
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.36441E-8
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=1.9316E-9
ql3_vset=
ql3_vmon=-9.13222E0
ql3_imon=1.15967E-10
ql4_vset=
ql4_vmon=-9.14268E0
ql4_imon=-3.80397E-11
mult1=-1.00053E-8
mult2=-2.70464E-9
rf_tmon=-4.70469E-3
rf_agc=3.33816E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.1008E-3
ql5_imon=1.69151E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.40437E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=2.0029E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=2.84287E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.55806E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36956E0
lens1_imon=2.77207E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03462E1
cs_ea2_imon=1.4827E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84514E1
cs_ef1a_imon=2.9308E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.33507E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1173E1
os_restr1_imon=4.25634E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14849E1
os_ea1_imon=2.37132E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63401E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.2008E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.9863E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.35076E-8
tplens_vset=1.4E-1
tplens_vmon=1.66787E0
tplens_imon=-3.24581E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2647E1
iondef3_imon=1.51299E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.56345E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98122E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.02542E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2515E0
ionrepsh_imon=1.78408E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33459E1
lens5b_imon=2.14998E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52187E0
os_ea2_imon=-5.98557E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71516E1
cs_ef2a_imon=3.15857E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09437E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.42599E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.24929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.10094E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68319E1
iondef4_imon=1.10648E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.02349E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.82786E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.74734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.44372E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.85978E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92598E3
multa_neg_imon=7.41165E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.51041E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.23501E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33354E1
os_fil1_imon=9.44084E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07263E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65625E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30871E1
cs_fil1_imon=9.9657E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62756E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67491E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.71858E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96471E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.0374E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22611E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.22361E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16798E-1	-7.97939E-1	-9.13184E0	-9.14273E0	4.31538E-3	9.52482E-2	2.73387E1	-3.26832E1	-3.26307E1	2.68401E1	1.20055E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.02769E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16917E-1	-7.98059E-1	-9.13181E0	-9.14283E0	4.41074E-3	9.51767E-2	2.73192E1	-3.26438E1	-3.2656E1	2.68413E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16965E-1	-7.98249E-1	-9.13191E0	-9.14297E0	4.36306E-3	9.53197E-2	2.73296E1	-3.27023E1	-3.26215E1	2.68485E1	1.20316E-7	2.51952E-3	2.51952E-3	6.29035E-3	2.9917E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16727E-1	-7.98273E-1	-9.13191E0	-9.14278E0	4.41074E-3	9.53674E-2	2.73033E1	-3.26543E1	-3.26272E1	2.68388E1	1.20127E-7	2.51886E-3	2.51886E-3	6.29185E-3	3.0E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16655E-1	-7.97963E-1	-9.13184E0	-9.1429E0	4.55379E-3	9.52244E-2	2.73134E1	-3.26301E1	-3.26172E1	2.68394E1	1.19757E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16441E-1	-7.9782E-1	-9.13177E0	-9.14297E0	4.33922E-3	9.52959E-2	2.73033E1	-3.26711E1	-3.26368E1	2.68665E1	1.20106E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.02511E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-8.16441E-1	-7.97939E-1	-9.13184E0	-9.14276E0	4.55379E-3	9.52482E-2	2.72967E1	-3.26506E1	-3.26002E1	2.6834E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.16441E-1	-7.98059E-1	-9.13205E0	-9.14266E0	4.62532E-3	9.52244E-2	2.73222E1	-3.26487E1	-3.25954E1	2.68328E1	1.20122E-7	2.52318E-3	2.52318E-3	6.34588E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09317E0	-8.16607E-1	-7.98225E-1	-9.13174E0	-9.14273E0	4.3869E-3	9.4986E-2	2.72998E1	-3.26384E1	-3.26136E1	2.68599E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.1687E-1	-7.98368E-1	-9.13203E0	-9.14328E0	4.3869E-3	9.48668E-2	2.73321E1	-3.26464E1	-3.26212E1	2.68106E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.16989E-1	-7.98106E-1	-9.13208E0	-9.14321E0	4.31538E-3	9.50336E-2	2.73316E1	-3.26685E1	-3.26296E1	2.68725E1	1.20517E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.1706E-1	-7.98225E-1	-9.13179E0	-9.14283E0	4.26769E-3	9.48191E-2	2.72943E1	-3.26554E1	-3.26476E1	2.68418E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.17156E-1	-7.98035E-1	-9.13193E0	-9.14316E0	4.43459E-3	9.50336E-2	2.73243E1	-3.26921E1	-3.2629E1	2.68076E1	1.20122E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.16989E-1	-7.98225E-1	-9.13177E0	-9.14299E0	4.05312E-3	9.52244E-2	2.73092E1	-3.26484E1	-3.26467E1	2.68641E1	1.19749E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16989E-1	-7.97796E-1	-9.13215E0	-9.14271E0	4.36306E-3	9.47714E-2	2.73093E1	-3.26687E1	-3.26651E1	2.68358E1	1.2033E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16774E-1	-7.97796E-1	-9.132E0	-9.14273E0	4.26769E-3	9.48906E-2	2.73117E1	-3.26687E1	-3.26224E1	2.6834E1	1.19757E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00563E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.16679E-1	-7.9751E-1	-9.132E0	-9.14309E0	4.43459E-3	9.49144E-2	2.73267E1	-3.26332E1	-3.26146E1	2.68447E1	1.20158E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16655E-1	-7.97653E-1	-9.13217E0	-9.14302E0	4.17233E-3	9.50098E-2	2.73243E1	-3.26735E1	-3.2599E1	2.68286E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16321E-1	-7.97749E-1	-9.13219E0	-9.14283E0	4.31538E-3	9.49144E-2	2.73207E1	-3.26428E1	-3.26214E1	2.67944E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16464E-1	-7.97796E-1	-9.13222E0	-9.14268E0	4.1008E-3	9.51052E-2	2.73279E1	-3.26735E1	-3.2647E1	2.68319E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.01995E-1
