[Scan]
initial_time=2016-01-18T20:27:07
final_time=2016-01-18T20:27:36
ip_count=19
run=1024
dataset=6
scan=476
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.17537E-1
ql1_imon=1.3643E-8
ql2_vset=
ql2_vmon=-7.97725E-1
ql2_imon=1.9508E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=1.15502E-10
ql4_vset=
ql4_vmon=-9.14288E0
ql4_imon=-6.2108E-11
mult1=-9.92494E-9
mult2=-2.75461E-9
rf_tmon=-5.23505E-3
rf_agc=3.25599E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.69086E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66339E0
bslens_imon=2.40952E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.99018E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.04961E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54078E1
cs_ef1b_imon=2.82057E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04536E1
cs_ea1_imon=2.53073E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37719E0
lens1_imon=2.84752E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64805E1
os_ef1alow_imon=2.97661E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03951E1
cs_ea2_imon=1.47605E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84105E1
cs_ef1a_imon=2.93769E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.32972E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1154E1
os_restr1_imon=4.2701E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15213E1
os_ea1_imon=2.37082E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63062E1
os_ef1bup_imon=3.06454E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2463E0
cs_ionrep_imon=1.1764E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93403E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0174E1
cs_anode1_imon=2.97279E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.34645E-8
tplens_vset=1.4E-1
tplens_vmon=1.6733E0
tplens_imon=-3.26254E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.4976E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26832E1
iondef2_imon=1.55913E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.97984E-4
ql6_vset=1.0E-1
ql6_vmon=9.53436E-2
ql6_imon=4.09484E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28338E0
ionrepsh_imon=1.80107E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33872E1
lens5b_imon=2.15738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74779E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53193E0
os_ea2_imon=-8.05971E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00494E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71356E1
cs_ef2a_imon=3.15211E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.4599E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15766E-1
os_ef2bup_imon=-5.12194E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11384E1
os_restr2_imon=3.42596E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.28746E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01954E1
cs_anode2_imon=2.24994E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.09227E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.09685E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.00551E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.79276E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12782E0
cs_ionaccel_imon=-1.84478E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47379E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56509E1
einzel_imon=7.65309E-6
window_vset=0.0E0
window_vmon=2.5881E-1
window_imon=-9.02986E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82668E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-6.77094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.6273E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.62616E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.03982E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3862E0
defgridb_imon=6.08387E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33315E1
os_fil1_imon=9.42461E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07161E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65538E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.96449E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62824E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67122E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77985E-2
os_fil2_imon=-2.61706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99345E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.08159E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-2.38537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03775E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22624E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.03449E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92221E-1
res40_imon=-2.51203E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=193
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.1687E-1	-7.98082E-1	-9.13239E0	-9.14288E0	4.74453E-3	9.55343E-2	2.73243E1	-3.26416E1	-3.262E1	2.68484E1	1.20226E-7	2.51472E-3	2.51472E-3	6.3282E-3	2.98522E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16751E-1	-7.98082E-1	-9.13236E0	-9.14273E0	4.62532E-3	9.52244E-2	2.73259E1	-3.26327E1	-3.26376E1	2.68506E1	1.19861E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16798E-1	-7.98011E-1	-9.1321E0	-9.14266E0	4.673E-3	9.52244E-2	2.73393E1	-3.26753E1	-3.26457E1	2.68306E1	1.19667E-7	2.51725E-3	2.51725E-3	6.30171E-3	3.01337E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16917E-1	-7.98059E-1	-9.13212E0	-9.14273E0	4.22001E-3	9.54628E-2	2.73303E1	-3.26476E1	-3.26861E1	2.68508E1	1.20028E-7	2.52093E-3	2.52093E-3	6.34385E-3	3.02728E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.16774E-1	-7.97939E-1	-9.13198E0	-9.14242E0	4.64916E-3	9.5129E-2	2.73305E1	-3.2649E1	-3.2639E1	2.68106E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.17013E-1	-7.98106E-1	-9.13179E0	-9.1424E0	4.36306E-3	9.47475E-2	2.73405E1	-3.26026E1	-3.25954E1	2.68448E1	1.19953E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.98156E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16846E-1	-7.98154E-1	-9.13179E0	-9.14264E0	4.33922E-3	9.50336E-2	2.73327E1	-3.26819E1	-3.26314E1	2.68334E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16989E-1	-7.98082E-1	-9.13217E0	-9.14228E0	4.29153E-3	9.52482E-2	2.72967E1	-3.26398E1	-3.26356E1	2.68316E1	1.19913E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16751E-1	-7.98011E-1	-9.13212E0	-9.14268E0	4.69685E-3	9.53197E-2	2.72951E1	-3.2639E1	-3.26531E1	2.68496E1	1.20122E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01609E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.17037E-1	-7.97915E-1	-9.13217E0	-9.14261E0	4.673E-3	9.52244E-2	2.73327E1	-3.26741E1	-3.26056E1	2.68316E1	1.20174E-7	2.52318E-3	2.52318E-3	6.34588E-3	3.01609E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.17013E-1	-7.98082E-1	-9.13208E0	-9.14276E0	4.55379E-3	9.52244E-2	2.73207E1	-3.27203E1	-3.26014E1	2.68346E1	1.20106E-7	2.52599E-3	2.52599E-3	6.31817E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.1718E-1	-7.97725E-1	-9.13188E0	-9.14235E0	4.50611E-3	9.50813E-2	2.73478E1	-3.26536E1	-3.2629E1	2.68482E1	1.20226E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.17156E-1	-7.97772E-1	-9.13177E0	-9.14268E0	4.45843E-3	9.51767E-2	2.73316E1	-3.2649E1	-3.26284E1	2.68106E1	1.20592E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09317E0	-8.16727E-1	-7.98011E-1	-9.13191E0	-9.14264E0	4.36306E-3	9.52482E-2	2.73429E1	-3.26567E1	-3.26098E1	2.6852E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.99E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09333E0	-8.16989E-1	-7.9813E-1	-9.13181E0	-9.14245E0	4.79221E-3	9.52005E-2	2.73488E1	-3.26744E1	-3.26555E1	2.68382E1	1.20106E-7	2.52599E-3	2.52599E-3	6.33436E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.17108E-1	-7.98178E-1	-9.13181E0	-9.14249E0	4.69685E-3	9.53197E-2	2.73193E1	-3.26649E1	-3.26313E1	2.68221E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02396E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.17132E-1	-7.98249E-1	-9.13172E0	-9.14214E0	4.36306E-3	9.51529E-2	2.73141E1	-3.26579E1	-3.26404E1	2.68641E1	1.19841E-7	2.51709E-3	2.51709E-3	6.33919E-3	3.01356E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.17299E-1	-7.98106E-1	-9.132E0	-9.14223E0	4.69685E-3	9.50813E-2	2.73153E1	-3.26272E1	-3.26368E1	2.68262E1	1.19766E-7	2.5147E-3	2.5147E-3	6.27954E-3	2.99083E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17251E-1	-7.98106E-1	-9.13212E0	-9.14257E0	4.62532E-3	9.52482E-2	2.73351E1	-3.26699E1	-3.26212E1	2.68334E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.17537E-1	-7.97725E-1	-9.132E0	-9.14288E0	4.673E-3	9.53436E-2	2.73387E1	-3.26832E1	-3.2616E1	2.68412E1	1.20174E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.03449E-1
