[Scan]
initial_time=2016-01-18T20:30:39
final_time=2016-01-18T20:31:07
ip_count=19
run=1024
dataset=7
scan=481
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.77745E-6
ql1_vset=
ql1_vmon=-8.79989E1
ql1_imon=-3.3765E-9
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.51262E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-9.484E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=1.65836E-8
mult1=-2.07094E-8
mult2=-2.73857E-9
rf_tmon=-5.16132E-3
rf_agc=3.4391E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=7.76505E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68251E0
bslens_imon=2.32609E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19753E1
lens5a_imon=2.00095E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04954E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=2.81154E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02069E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04582E1
cs_ea1_imon=2.54359E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98267E0
lens1_imon=1.48832E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.98113E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03968E1
cs_ea2_imon=1.48126E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84209E1
cs_ef1a_imon=2.93178E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.32442E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11494E1
os_restr1_imon=4.27914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15265E1
os_ea1_imon=2.37812E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63085E1
os_ef1bup_imon=3.06697E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.20873E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93643E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0167E1
cs_anode1_imon=2.96063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=4.02377E-8
tplens_vset=1.4E-1
tplens_vmon=1.65418E0
tplens_imon=-2.63683E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.4969E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.55322E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03036E2
lens6_imon=2.98189E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=1.01845E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31003E0
ionrepsh_imon=1.77674E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33883E1
lens5b_imon=2.17824E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74756E1
cs_ef2b_imon=3.11875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52382E0
os_ea2_imon=-6.94732E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00751E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.16567E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09916E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.45209E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10996E1
os_restr2_imon=3.40337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.29372E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01757E1
cs_anode2_imon=2.23013E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.10096E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68508E1
iondef4_imon=1.11596E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.14176E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.77401E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-1.7301E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47376E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56446E1
einzel_imon=7.68089E-6
window_vset=0.0E0
window_vmon=2.54755E-1
window_imon=-7.88302E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8267E2
mask1_imon=2.39063E-4
mask2_vset=0.0E0
mask2_vmon=-1.86275E1
mask2_imon=-7.46599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92725E3
multa_neg_imon=7.28316E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.21363E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43551E0
defgridb_imon=6.20553E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.42629E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07063E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65437E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.96953E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62088E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66739E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.80472E-2
os_fil2_imon=-2.66339E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8081E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.12634E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35395E-1
cs_fil2_imon=-3.05726E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.68592E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22632E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.69835E-1
res40_imon=-2.46337E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.937E3	1.0E0	1.47E2	4.1E1	-7.23964E-2	-8.79986E1	4.76837E-5	-8.80019E1	5.48363E-4	4.31538E-3	9.50336E-2	2.73311E1	-3.26508E1	-3.26219E1	2.68629E1	1.1979E-7	2.51393E-3	2.51393E-3	6.30212E-3	3.00097E-1
2.0E0	1.05352E5	1.03E2	3.16E2	1.6E2	-7.19325E-2	-8.79987E1	0.0E0	-8.8002E1	7.15256E-4	4.31538E-3	9.50575E-2	2.73247E1	-3.26548E1	-3.26321E1	2.68328E1	1.19851E-7	2.52061E-3	2.52061E-3	6.28592E-3	3.01995E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.79987E1	3.09944E-4	-8.8002E1	8.82149E-4	4.17233E-3	9.51529E-2	2.73246E1	-3.26561E1	-3.25947E1	2.68806E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
4.0E0	2.3286E4	1.4E1	6.55E2	3.98E2	-7.30146E-2	-8.79986E1	1.66893E-4	-8.80022E1	9.05991E-4	4.55379E-3	9.52482E-2	2.73315E1	-3.26434E1	-3.2632E1	2.68118E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.79986E1	3.33786E-4	-8.80021E1	7.86781E-4	4.41074E-3	9.53197E-2	2.73045E1	-3.26699E1	-3.26008E1	2.6816E1	1.19913E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.79987E1	-2.14577E-4	-8.80018E1	8.34465E-4	4.62532E-3	9.51529E-2	2.73275E1	-3.26602E1	-3.26113E1	2.68162E1	1.19913E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.79989E1	-9.53674E-5	-8.8002E1	4.52995E-4	4.55379E-3	9.50575E-2	2.72943E1	-3.26669E1	-3.26236E1	2.68265E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.79987E1	1.19209E-4	-8.80019E1	6.4373E-4	4.69685E-3	9.52482E-2	2.73234E1	-3.2652E1	-3.26296E1	2.6807E1	1.19913E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.00302E-1
1.2E1	1.08E2	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.79983E1	-2.38419E-4	-8.80019E1	4.52995E-4	4.31538E-3	9.52005E-2	2.73273E1	-3.26579E1	-3.26164E1	2.68372E1	1.20004E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.0148E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.79984E1	4.76837E-5	-8.80016E1	9.05991E-4	4.41074E-3	9.51767E-2	2.73165E1	-3.26272E1	-3.26008E1	2.68334E1	1.19809E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00041E-1
1.4E1	3.488E3	2.0E0	5.66E2	3.82E2	-7.12368E-2	-8.79988E1	7.15256E-5	-8.80018E1	9.05991E-4	4.33922E-3	9.47952E-2	2.73033E1	-3.26307E1	-3.26455E1	2.67938E1	1.19705E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00824E-1
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.11597E-2	-8.79986E1	-1.66893E-4	-8.80018E1	5.72205E-4	4.43459E-3	9.50813E-2	2.73406E1	-3.26731E1	-3.26272E1	2.68623E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
1.6E1	4.34E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.79988E1	-4.76837E-4	-8.80014E1	7.62939E-4	4.33922E-3	9.5129E-2	2.73322E1	-3.26661E1	-3.26089E1	2.68659E1	1.19809E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.02396E-1
1.7E1	8.51E2	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.79987E1	-3.33786E-4	-8.80015E1	6.91414E-4	4.36306E-3	9.50813E-2	2.73327E1	-3.26639E1	-3.26272E1	2.68016E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9874E-1
1.8E1	3.447E3	3.0E0	7.27E2	5.0E2	-7.13915E-2	-8.79989E1	-9.53674E-5	-8.80018E1	5.00679E-4	4.48227E-3	9.52005E-2	2.73104E1	-3.26478E1	-3.2662E1	2.68615E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.98481E-1
1.9E1	1.98E3	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.79987E1	-1.66893E-4	-8.80018E1	4.29153E-4	4.57764E-3	9.48906E-2	2.73342E1	-3.26769E1	-3.26344E1	2.68708E1	1.20055E-7	2.50989E-3	2.50989E-3	6.32896E-3	2.98156E-1
2.0E1	2.5742E4	2.0E1	8.08E2	5.58E2	-7.13915E-2	-8.79987E1	4.76837E-5	-8.80016E1	6.4373E-4	4.55379E-3	9.49383E-2	2.732E1	-3.26325E1	-3.2615E1	2.68338E1	1.19967E-7	2.51854E-3	2.51854E-3	6.29721E-3	2.99663E-1
2.1E1	6.1E1	0.0E0	8.49E2	5.88E2	-7.11597E-2	-8.79987E1	-4.76837E-5	-8.80015E1	6.4373E-4	4.55379E-3	9.51052E-2	2.73358E1	-3.26691E1	-3.26337E1	2.6795E1	1.20132E-7	2.51675E-3	2.51675E-3	6.32518E-3	3.01326E-1
2.2E1	1.87E3	2.0E0	8.89E2	6.17E2	-7.201E-2	-8.79987E1	4.76837E-5	-8.80014E1	6.19888E-4	4.57764E-3	9.51529E-2	2.73297E1	-3.26597E1	-3.26254E1	2.68545E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.03545E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.79989E1	-1.90735E-4	-8.80018E1	7.62939E-4	4.74453E-3	9.50575E-2	2.73105E1	-3.26723E1	-3.2623E1	2.68508E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
