[Scan]
initial_time=2016-01-18T20:33:42
final_time=2016-01-18T20:34:04
ip_count=19
run=1024
dataset=7
scan=486
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.11597E-2
qbias_imon=-3.76539E-6
ql1_vset=
ql1_vmon=-8.80003E1
ql1_imon=-1.20306E-9
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=1.38826E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-3.79303E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.60081E-8
mult1=-1.83494E-8
mult2=-2.73059E-9
rf_tmon=-5.5158E-3
rf_agc=3.27027E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=5.777E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66905E0
bslens_imon=2.36947E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19681E1
lens5a_imon=1.99752E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53898E1
cs_ef1b_imon=2.80562E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02144E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04748E1
cs_ea1_imon=2.55738E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97685E0
lens1_imon=1.44675E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64388E1
os_ef1alow_imon=2.95158E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03742E1
cs_ea2_imon=1.48632E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84491E1
cs_ef1a_imon=2.95586E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.3217E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11675E1
os_restr1_imon=4.26795E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15533E1
os_ea1_imon=2.38063E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63136E1
os_ef1bup_imon=3.05978E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24236E0
cs_ionrep_imon=1.18381E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91944E2
cs_nozzle_imon=1.93494E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01932E1
cs_anode1_imon=2.96364E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=4.01023E-8
tplens_vset=1.4E-1
tplens_vmon=1.67323E0
tplens_imon=-4.29845E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26104E1
iondef3_imon=1.49138E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.56769E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98062E-4
ql6_vset=1.0E-1
ql6_vmon=9.55343E-2
ql6_imon=9.20391E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25924E0
ionrepsh_imon=1.77794E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33775E1
lens5b_imon=2.17584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74865E1
cs_ef2b_imon=3.13374E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49803E0
os_ea2_imon=-9.55447E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71128E1
cs_ef2a_imon=3.14113E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-3.99812E0
os_ef2alow_imon=-2.64617E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.44564E-1
os_ef2bup_imon=-5.14113E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11552E1
os_restr2_imon=3.44395E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.28293E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01938E1
cs_anode2_imon=2.24863E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72919E1
iondef1_imon=1.09582E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68394E1
iondef4_imon=1.07627E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.07145E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.76052E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09641E0
cs_ionaccel_imon=-1.78598E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47639E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56814E1
einzel_imon=7.66838E-6
window_vset=0.0E0
window_vmon=2.75607E-1
window_imon=-1.05812E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39337E-4
mask2_vset=0.0E0
mask2_vmon=-1.86805E1
mask2_imon=-6.72785E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.49701E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.15051E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40999E0
defgridb_imon=6.16549E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.42459E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07297E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65249E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.95427E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.60782E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6676E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69279E-2
os_fil2_imon=-2.64579E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.70708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.24998E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33847E-1
cs_fil2_imon=-2.28251E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83218E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22577E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40077E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=1.68114E-1
res40_imon=-2.42042E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.043E3	1.0E0	1.47E2	4.1E1	-7.12368E-2	-8.80007E1	1.66893E-4	-8.80012E1	7.86781E-4	4.41074E-3	9.52482E-2	2.73561E1	-3.26637E1	-3.26527E1	2.68545E1	1.20092E-7	2.5207E-3	2.5207E-3	6.3074E-3	2.96598E-1
2.0E0	1.06391E5	9.7E1	3.16E2	1.6E2	-7.22418E-2	-8.80008E1	2.14577E-4	-8.80013E1	8.34465E-4	4.3869E-3	9.49383E-2	2.73163E1	-3.26298E1	-3.26166E1	2.68313E1	1.20042E-7	2.51077E-3	2.51077E-3	6.29684E-3	2.96598E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80005E1	-1.90735E-4	-8.80013E1	9.77516E-4	4.86374E-3	9.5129E-2	2.72962E1	-3.26762E1	-3.25853E1	2.6834E1	1.201E-7	2.51611E-3	2.51611E-3	6.3131E-3	2.98092E-1
4.0E0	2.363E4	1.1E1	6.55E2	3.98E2	-7.27828E-2	-8.80006E1	-1.43051E-4	-8.80013E1	6.67572E-4	4.43459E-3	9.4986E-2	2.73092E1	-3.26527E1	-3.25866E1	2.6827E1	1.19851E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80006E1	-1.43051E-4	-8.80016E1	6.19888E-4	4.31538E-3	9.51529E-2	2.73259E1	-3.26572E1	-3.2637E1	2.68517E1	1.19991E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.00852E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80005E1	2.38419E-5	-8.80014E1	6.4373E-4	4.45843E-3	9.51767E-2	2.73255E1	-3.26717E1	-3.26344E1	2.68268E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80005E1	2.14577E-4	-8.8002E1	4.29153E-4	4.45843E-3	9.52721E-2	2.73075E1	-3.26735E1	-3.26272E1	2.68322E1	1.19766E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80004E1	-2.38419E-5	-8.80012E1	7.62939E-4	4.52995E-3	9.50813E-2	2.73021E1	-3.26813E1	-3.26062E1	2.68599E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
1.2E1	9.0E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80005E1	1.90735E-4	-8.80013E1	8.10623E-4	4.3869E-3	9.50098E-2	2.73039E1	-3.26467E1	-3.2652E1	2.68593E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80006E1	2.38419E-4	-8.80013E1	6.19888E-4	4.52995E-3	9.50575E-2	2.7302E1	-3.2645E1	-3.26083E1	2.68605E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
1.4E1	3.447E3	1.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80005E1	2.14577E-4	-8.80014E1	5.72205E-4	4.26769E-3	9.52244E-2	2.72892E1	-3.26425E1	-3.26349E1	2.68268E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
1.5E1	1.19E2	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80008E1	2.38419E-5	-8.80013E1	9.29832E-4	4.29153E-3	9.50575E-2	2.73351E1	-3.26422E1	-3.26266E1	2.68047E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
1.6E1	4.6E2	1.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80005E1	0.0E0	-8.80015E1	3.09944E-4	4.43459E-3	9.52721E-2	2.7337E1	-3.26567E1	-3.26319E1	2.68352E1	1.20004E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.0071E-1
1.7E1	8.2E2	2.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80007E1	1.66893E-4	-8.80013E1	4.05312E-4	4.81606E-3	9.54866E-2	2.73516E1	-3.26585E1	-3.26327E1	2.68232E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9978E-1
1.8E1	3.445E3	1.0E0	7.27E2	5.0E2	-7.286E-2	-8.80006E1	1.90735E-4	-8.80011E1	2.14577E-4	4.673E-3	9.54151E-2	2.73617E1	-3.26803E1	-3.26119E1	2.68346E1	1.19978E-7	2.52362E-3	2.52362E-3	6.32418E-3	2.99879E-1
1.9E1	2.008E3	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80003E1	0.0E0	-8.80009E1	3.33786E-4	4.3869E-3	9.50336E-2	2.72962E1	-3.26685E1	-3.26113E1	2.68466E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.03545E-1
2.0E1	2.6625E4	1.0E1	8.08E2	5.58E2	-7.17779E-2	-8.80005E1	2.38419E-5	-8.8001E1	3.09944E-4	4.17233E-3	9.52244E-2	2.73118E1	-3.26529E1	-3.26003E1	2.68382E1	1.19443E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00966E-1
2.1E1	4.2E1	0.0E0	8.49E2	5.88E2	-7.13143E-2	-8.80006E1	7.15256E-5	-8.80012E1	5.72205E-4	4.52995E-3	9.52482E-2	2.73364E1	-3.26649E1	-3.26284E1	2.68302E1	1.20174E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01085E-1
2.2E1	1.891E3	3.0E0	8.89E2	6.17E2	-7.09279E-2	-8.80006E1	-1.43051E-4	-8.8001E1	5.24521E-4	4.3869E-3	9.53436E-2	2.73104E1	-3.26744E1	-3.26242E1	2.68448E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01871E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.11597E-2	-8.80003E1	-2.38419E-4	-8.80012E1	7.86781E-4	4.05312E-3	9.55343E-2	2.72919E1	-3.26645E1	-3.26104E1	2.68394E1	1.20311E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99686E-1
