[Scan]
initial_time=2016-01-18T20:36:15
final_time=2016-01-18T20:36:37
ip_count=19
run=1024
dataset=7
scan=491
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.79057E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-9.96816E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.39589E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-3.05054E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.59251E-8
mult1=-1.89033E-8
mult2=-2.70065E-9
rf_tmon=-4.34419E-3
rf_agc=3.36941E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.43618E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68332E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19594E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.0516E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54325E1
cs_ef1b_imon=2.85043E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=2.5468E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98228E0
lens1_imon=1.4248E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.48639E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83914E1
cs_ef1a_imon=2.91855E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.32222E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.27616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15506E1
os_ea1_imon=2.36452E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6423E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.18377E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93601E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=2.93441E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=4.01576E-8
tplens_vset=1.4E-1
tplens_vmon=1.6261E0
tplens_imon=-3.05966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26506E1
iondef3_imon=1.50869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.57134E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98066E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=8.99518E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30224E0
ionrepsh_imon=1.783E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74267E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53525E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71822E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0912E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86612E-1
os_ef2bup_imon=-5.57836E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=3.40977E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28689E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01503E1
cs_anode2_imon=2.21866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73369E1
iondef1_imon=1.08184E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.12269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.07179E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.75781E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16318E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0203E2
cs_ionfocb_imon=1.47151E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-8.96807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.38846E-4
mask2_vset=0.0E0
mask2_vmon=-1.86128E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=6.91443E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.41891E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.10202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45576E0
defgridb_imon=6.11098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.42985E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06584E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65492E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.95975E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63765E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67002E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.90173E-2
os_fil2_imon=-2.88221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.08243E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.63806E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22586E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31012E-3
inlet_lpb_pmon=3.02194E-1
chamber_ion_pmon=1.19933E-7
chamber_cvt_pmon=2.51809E-3
foreline_cvt_pmon=2.51809E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=7.01669E-1
res40_imon=-2.87899E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.991E3	1.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80016E1	-1.43051E-4	-8.80011E1	5.24521E-4	4.45843E-3	9.51767E-2	2.73558E1	-3.26537E1	-3.26384E1	2.68238E1	1.20174E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.98222E-1
2.0E0	1.06693E5	1.02E2	3.16E2	1.6E2	-7.27053E-2	-8.80013E1	-2.14577E-4	-8.80008E1	4.29153E-4	4.48227E-3	9.53197E-2	2.73265E1	-3.26768E1	-3.26181E1	2.68394E1	1.19841E-7	2.51182E-3	2.51182E-3	6.34982E-3	2.99343E-1
3.0E0	2.6E1	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80009E1	-2.14577E-4	-8.80008E1	5.96046E-4	4.31538E-3	9.50098E-2	2.73457E1	-3.26851E1	-3.26005E1	2.68406E1	1.20137E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.0041E-1
4.0E0	2.3619E4	1.6E1	6.55E2	3.98E2	-7.27053E-2	-8.80012E1	-4.05312E-4	-8.8001E1	6.4373E-4	4.48227E-3	9.55105E-2	2.73243E1	-3.26747E1	-3.26068E1	2.68412E1	1.2026E-7	2.51203E-3	2.51203E-3	6.33436E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80013E1	-2.6226E-4	-8.80008E1	4.52995E-4	4.14848E-3	9.55343E-2	2.73315E1	-3.26633E1	-3.26585E1	2.68376E1	1.19902E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80015E1	-4.05312E-4	-8.8001E1	3.8147E-4	4.24385E-3	9.5439E-2	2.726E1	-3.26693E1	-3.26344E1	2.6822E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80017E1	-1.19209E-4	-8.80011E1	8.10623E-4	4.17233E-3	9.4986E-2	2.72862E1	-3.26614E1	-3.26343E1	2.68574E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80016E1	-3.09944E-4	-8.8001E1	5.24521E-4	4.14848E-3	9.50575E-2	2.73171E1	-3.26651E1	-3.26296E1	2.68537E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80015E1	-2.86102E-4	-8.80013E1	5.00679E-4	4.26769E-3	9.52482E-2	2.73183E1	-3.26753E1	-3.26092E1	2.68314E1	1.19925E-7	2.5147E-3	2.5147E-3	6.33538E-3	2.99613E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80014E1	-3.8147E-4	-8.80013E1	7.86781E-4	4.48227E-3	9.50336E-2	2.73315E1	-3.26543E1	-3.26308E1	2.682E1	1.19749E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.9892E-1
1.4E1	3.399E3	1.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80012E1	-5.24521E-4	-8.80012E1	4.52995E-4	4.76837E-3	9.49621E-2	2.73051E1	-3.26314E1	-3.26795E1	2.68487E1	1.19925E-7	2.5225E-3	2.5225E-3	6.32978E-3	2.99613E-1
1.5E1	1.0E2	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80013E1	-3.09944E-4	-8.8001E1	5.72205E-4	4.31538E-3	9.51529E-2	2.73003E1	-3.26735E1	-3.2641E1	2.68448E1	1.198E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.0148E-1
1.6E1	4.87E2	0.0E0	6.47E2	4.41E2	-7.12368E-2	-8.80017E1	-2.6226E-4	-8.80012E1	5.96046E-4	4.33922E-3	9.52244E-2	2.73299E1	-3.26691E1	-3.25906E1	2.6831E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02659E-1
1.7E1	8.22E2	0.0E0	6.87E2	4.7E2	-7.12368E-2	-8.80013E1	-9.53674E-5	-8.80011E1	5.00679E-4	4.57764E-3	9.51052E-2	2.73014E1	-3.26425E1	-3.26144E1	2.6837E1	1.19913E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.01085E-1
1.8E1	3.488E3	2.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80013E1	-3.8147E-4	-8.80012E1	6.19888E-4	4.31538E-3	9.53197E-2	2.73358E1	-3.26608E1	-3.26148E1	2.6837E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9874E-1
1.9E1	2.052E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80012E1	-2.86102E-4	-8.80013E1	6.4373E-4	4.41074E-3	9.53197E-2	2.72973E1	-3.26621E1	-3.26416E1	2.68226E1	1.20055E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.9892E-1
2.0E1	2.6324E4	1.4E1	8.08E2	5.58E2	-7.17779E-2	-8.80011E1	-2.86102E-4	-8.80012E1	2.14577E-4	4.05312E-3	9.5129E-2	2.73375E1	-3.26524E1	-3.26434E1	2.68238E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.97704E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80013E1	2.38419E-5	-8.80007E1	7.15256E-4	4.45843E-3	9.51052E-2	2.73145E1	-3.2662E1	-3.2636E1	2.68298E1	1.20244E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.99083E-1
2.2E1	1.815E3	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80014E1	-1.66893E-4	-8.80007E1	2.86102E-4	4.43459E-3	9.5129E-2	2.73574E1	-3.26825E1	-3.26146E1	2.68557E1	1.19851E-7	2.52707E-3	2.52707E-3	6.31278E-3	2.9943E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80014E1	-3.57628E-4	-8.80008E1	2.6226E-4	4.72069E-3	9.52721E-2	2.73369E1	-3.26651E1	-3.26506E1	2.67992E1	1.19933E-7	2.51809E-3	2.51809E-3	6.31012E-3	3.02194E-1
