[Scan]
initial_time=2016-01-18T20:36:45
final_time=2016-01-18T20:37:07
ip_count=19
run=1024
dataset=7
scan=492
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.79722E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-8.85785E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.43324E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-3.00356E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.59963E-8
mult1=-2.35509E-8
mult2=-2.76851E-9
rf_tmon=-4.88494E-3
rf_agc=3.32975E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.72157E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.28134E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19193E1
lens5a_imon=2.01801E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.04626E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53974E1
cs_ef1b_imon=2.82822E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02408E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04428E1
cs_ea1_imon=2.53264E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99467E0
lens1_imon=1.308E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64991E1
os_ef1alow_imon=2.97592E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.47861E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84255E1
cs_ef1a_imon=2.91371E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.32403E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=4.25829E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1435E1
os_ea1_imon=2.38859E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63971E1
os_ef1bup_imon=3.08782E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25741E0
cs_ionrep_imon=1.19015E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.9347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02076E1
cs_anode1_imon=2.96445E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=4.00381E-8
tplens_vset=1.4E-1
tplens_vmon=1.61725E0
tplens_imon=-2.13941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.46339E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=9.29773E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25623E0
ionrepsh_imon=1.75999E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34035E1
lens5b_imon=2.16348E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74403E1
cs_ef2b_imon=3.12049E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42612E0
os_ea2_imon=-7.09459E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71379E1
cs_ef2a_imon=3.16706E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06498E0
os_ef2alow_imon=-2.51203E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75221E-1
os_ef2bup_imon=-5.46252E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11002E1
os_restr2_imon=3.40824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.28442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01688E1
cs_anode2_imon=2.23638E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73321E1
iondef1_imon=1.119E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68477E1
iondef4_imon=1.10206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.08368E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.78428E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17184E0
cs_ionaccel_imon=-1.73357E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56388E1
einzel_imon=7.78862E-6
window_vset=0.0E0
window_vmon=2.22319E-1
window_imon=-7.25748E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.38924E-4
mask2_vset=0.0E0
mask2_vmon=-1.85886E1
mask2_imon=-6.35391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92585E3
multa_neg_imon=6.99583E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9366E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.05246E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.77467E0
defgridb_imon=6.06851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.42895E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06524E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6529E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30912E1
cs_fil1_imon=9.97248E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63252E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66935E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.71178E-2
os_fil2_imon=-2.77344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0282E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.2229E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.51859E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50869E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22632E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19775E-7
chamber_cvt_pmon=2.51045E-3
foreline_cvt_pmon=2.51045E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.86256E-1
res40_imon=-2.66494E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.041E3	1.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80013E1	-2.14577E-4	-8.80008E1	5.72205E-4	4.48227E-3	9.50575E-2	2.72939E1	-3.2629E1	-3.27346E1	2.68352E1	1.20209E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.96381E-1
2.0E0	1.07119E5	1.05E2	3.16E2	1.6E2	-7.26282E-2	-8.80017E1	-2.6226E-4	-8.80012E1	5.24521E-4	4.48227E-3	9.49383E-2	2.73822E1	-3.27001E1	-3.26156E1	2.68226E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9841E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80015E1	-1.43051E-4	-8.80012E1	5.72205E-4	4.57764E-3	9.47237E-2	2.73149E1	-3.26654E1	-3.26301E1	2.68343E1	1.19819E-7	2.52585E-3	2.52585E-3	6.32418E-3	2.99348E-1
4.0E0	2.3691E4	1.3E1	6.55E2	3.98E2	-7.17007E-2	-8.80015E1	-4.52995E-4	-8.80011E1	4.05312E-4	4.79221E-3	9.48429E-2	2.7324E1	-3.2698E1	-3.2626E1	2.6837E1	1.19902E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.11597E-2	-8.80013E1	-6.4373E-4	-8.80012E1	6.67572E-4	4.57764E-3	9.51052E-2	2.73339E1	-3.26567E1	-3.26122E1	2.6837E1	1.198E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80015E1	-3.09944E-4	-8.80013E1	5.72205E-4	4.62532E-3	9.47952E-2	2.73057E1	-3.26278E1	-3.26326E1	2.68334E1	1.198E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80013E1	-4.05312E-4	-8.80014E1	6.4373E-4	5.03063E-3	9.45091E-2	2.72892E1	-3.2664E1	-3.26499E1	2.68226E1	1.20069E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80014E1	-2.38419E-5	-8.80014E1	7.86781E-4	4.64916E-3	9.48191E-2	2.73204E1	-3.26673E1	-3.26307E1	2.68322E1	1.19872E-7	2.5225E-3	2.5225E-3	6.32418E-3	3.01209E-1
1.2E1	1.1E2	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80011E1	0.0E0	-8.80013E1	5.00679E-4	4.74453E-3	9.49144E-2	2.73285E1	-3.26308E1	-3.26236E1	2.68472E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.08504E-2	-8.80014E1	-1.43051E-4	-8.8001E1	5.00679E-4	4.55379E-3	9.48906E-2	2.73207E1	-3.26657E1	-3.26266E1	2.6831E1	1.20174E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.01085E-1
1.4E1	3.461E3	2.0E0	5.66E2	3.82E2	-7.14689E-2	-8.80014E1	-4.29153E-4	-8.8001E1	1.43051E-4	4.00543E-3	9.51052E-2	2.72951E1	-3.26408E1	-3.2672E1	2.68256E1	1.19809E-7	2.50898E-3	2.50898E-3	6.3074E-3	2.99E-1
1.5E1	8.4E1	0.0E0	6.06E2	4.11E2	-7.10051E-2	-8.80014E1	-5.24521E-4	-8.80013E1	7.39098E-4	4.3869E-3	9.49383E-2	2.73351E1	-3.26554E1	-3.26026E1	2.67966E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.9892E-1
1.6E1	4.66E2	1.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80016E1	-4.76837E-5	-8.80012E1	3.33786E-4	4.62532E-3	9.5129E-2	2.73387E1	-3.26723E1	-3.26404E1	2.68455E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
1.7E1	8.34E2	0.0E0	6.87E2	4.7E2	-7.14689E-2	-8.80014E1	-5.24521E-4	-8.8001E1	2.86102E-4	4.3869E-3	9.52482E-2	2.73454E1	-3.26561E1	-3.26446E1	2.68563E1	1.19978E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.0041E-1
1.8E1	3.585E3	1.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80013E1	-2.86102E-4	-8.80012E1	5.72205E-4	4.52995E-3	9.49621E-2	2.73202E1	-3.26805E1	-3.26081E1	2.68337E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.00966E-1
1.9E1	2.099E3	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80014E1	-3.8147E-4	-8.80008E1	5.24521E-4	4.17233E-3	9.48429E-2	2.72614E1	-3.26422E1	-3.26191E1	2.68238E1	1.20042E-7	2.51393E-3	2.51393E-3	6.31269E-3	2.99343E-1
2.0E1	2.6584E4	1.6E1	8.08E2	5.58E2	-7.13143E-2	-8.80012E1	-9.53674E-5	-8.8001E1	3.8147E-4	4.22001E-3	9.51052E-2	2.72945E1	-3.2652E1	-3.26042E1	2.68695E1	1.19451E-7	2.51611E-3	2.51611E-3	6.29603E-3	3.00794E-1
2.1E1	3.2E1	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80018E1	-2.6226E-4	-8.8001E1	3.57628E-4	4.48227E-3	9.51529E-2	2.7296E1	-3.26437E1	-3.26203E1	2.68518E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0071E-1
2.2E1	1.877E3	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80014E1	1.19209E-4	-8.80012E1	4.29153E-4	4.76837E-3	9.51529E-2	2.73276E1	-3.26566E1	-3.26223E1	2.68292E1	1.20078E-7	2.51783E-3	2.51783E-3	6.28667E-3	3.0E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80014E1	-1.43051E-4	-8.8001E1	5.48363E-4	4.81606E-3	9.5129E-2	2.73321E1	-3.26633E1	-3.26254E1	2.68477E1	1.19775E-7	2.51045E-3	2.51045E-3	6.3074E-3	3.01609E-1
