[Scan]
initial_time=2016-01-18T20:37:45
final_time=2016-01-18T20:38:07
ip_count=19
run=1024
dataset=7
scan=494
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.72625E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-8.9817E-10
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=1.4236E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.93484E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.595E-8
mult1=-1.47836E-8
mult2=-2.77813E-9
rf_tmon=-4.75723E-3
rf_agc=3.36218E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.47266E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64498E0
bslens_imon=2.47955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19647E1
lens5a_imon=1.9851E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=2.8198E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=2.5245E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99054E0
lens1_imon=1.49559E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65035E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03496E1
cs_ea2_imon=1.48002E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=2.93585E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.32315E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.26247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14857E1
os_ea1_imon=2.36629E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22909E0
cs_ionrep_imon=1.17705E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91961E2
cs_nozzle_imon=1.93558E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.97297E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=4.01796E-8
tplens_vset=1.4E-1
tplens_vmon=1.6898E0
tplens_imon=-1.14838E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26478E1
iondef3_imon=1.52002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2659E1
iondef2_imon=1.57134E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98056E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=9.27234E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27333E0
ionrepsh_imon=1.76247E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34065E1
lens5b_imon=2.16738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55E0
os_ea2_imon=-7.94404E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00541E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.15533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16645E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.42202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.28088E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.2511E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73488E1
iondef1_imon=1.09635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68436E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.07489E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.77979E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15657E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=2.43772E-1
window_imon=-7.16609E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82671E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-7.995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.64709E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.61004E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.15511E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=6.18177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.42018E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06927E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65438E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.9523E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63099E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66957E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72444E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.1166E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.76207E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22533E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.97134E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.97E3	1.0E0	1.47E2	4.1E1	-7.19325E-2	-8.8002E1	-3.8147E-4	-8.80013E1	8.58307E-4	4.43459E-3	9.48429E-2	2.73195E1	-3.26639E1	-3.26062E1	2.68088E1	1.19749E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99941E-1
2.0E0	1.07384E5	1.19E2	3.16E2	1.6E2	-7.18554E-2	-8.8002E1	-3.57628E-4	-8.80013E1	7.86781E-4	4.48227E-3	9.49621E-2	2.73321E1	-3.26326E1	-3.26362E1	2.6843E1	1.2033E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.99E-1
3.0E0	2.5E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80019E1	-3.57628E-4	-8.80008E1	8.34465E-4	4.3869E-3	9.53436E-2	2.73399E1	-3.26863E1	-3.26376E1	2.68731E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
4.0E0	2.3629E4	1.7E1	6.55E2	3.98E2	-7.21643E-2	-8.8002E1	-1.90735E-4	-8.80009E1	5.48363E-4	4.24385E-3	9.50813E-2	2.73201E1	-3.26567E1	-3.26188E1	2.6828E1	1.1979E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80015E1	-9.53674E-5	-8.80009E1	6.91414E-4	4.52995E-3	9.51529E-2	2.73364E1	-3.27003E1	-3.26531E1	2.68286E1	1.19861E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.03185E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80014E1	-2.6226E-4	-8.80011E1	5.48363E-4	4.72069E-3	9.52244E-2	2.73198E1	-3.26548E1	-3.26444E1	2.68779E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80014E1	-2.6226E-4	-8.80013E1	3.8147E-4	4.36306E-3	9.5129E-2	2.73045E1	-3.2652E1	-3.26549E1	2.68514E1	1.19819E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80015E1	-2.6226E-4	-8.80014E1	4.52995E-4	4.07696E-3	9.52721E-2	2.73228E1	-3.2664E1	-3.26107E1	2.68641E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0071E-1
1.2E1	1.1E2	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80014E1	-3.09944E-4	-8.80013E1	3.8147E-4	4.17233E-3	9.56059E-2	2.72903E1	-3.26455E1	-3.26248E1	2.68401E1	1.2033E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01871E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80016E1	3.09944E-4	-8.80012E1	5.96046E-4	4.22001E-3	9.5439E-2	2.73339E1	-3.26705E1	-3.26386E1	2.68226E1	1.20278E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9952E-1
1.4E1	3.489E3	1.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80016E1	2.86102E-4	-8.80012E1	4.05312E-4	4.29153E-3	9.53197E-2	2.7337E1	-3.26875E1	-3.2634E1	2.6858E1	1.19913E-7	2.52757E-3	2.52757E-3	6.32386E-3	3.00302E-1
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80017E1	1.43051E-4	-8.80011E1	4.05312E-4	4.36306E-3	9.54151E-2	2.73305E1	-3.26629E1	-3.26527E1	2.68625E1	1.1993E-7	2.52093E-3	2.52093E-3	6.31779E-3	3.00741E-1
1.6E1	4.63E2	2.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80016E1	4.76837E-5	-8.80014E1	4.05312E-4	4.17233E-3	9.52244E-2	2.73175E1	-3.26732E1	-3.26036E1	2.68617E1	1.1995E-7	2.51642E-3	2.51642E-3	6.32483E-3	2.97613E-1
1.7E1	9.35E2	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80015E1	9.53674E-5	-8.80015E1	5.72205E-4	4.55379E-3	9.53913E-2	2.73081E1	-3.26855E1	-3.25912E1	2.68388E1	1.19851E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.97901E-1
1.8E1	3.691E3	3.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80015E1	2.14577E-4	-8.80013E1	5.72205E-4	4.43459E-3	9.54151E-2	2.73222E1	-3.2695E1	-3.26301E1	2.68202E1	1.20226E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.97704E-1
1.9E1	2.002E3	5.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80018E1	-2.14577E-4	-8.80012E1	5.00679E-4	4.69685E-3	9.52482E-2	2.73093E1	-3.26879E1	-3.26603E1	2.68647E1	1.20055E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.98156E-1
2.0E1	2.6366E4	1.0E1	8.08E2	5.58E2	-7.15461E-2	-8.80016E1	-7.15256E-5	-8.80012E1	3.33786E-4	4.17233E-3	9.53197E-2	2.73045E1	-3.26229E1	-3.26021E1	2.68436E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.98481E-1
2.1E1	6.4E1	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80017E1	-2.86102E-4	-8.8001E1	3.57628E-4	4.26769E-3	9.54628E-2	2.73287E1	-3.26537E1	-3.25942E1	2.68713E1	1.20137E-7	2.51136E-3	2.51136E-3	6.30182E-3	3.0201E-1
2.2E1	1.888E3	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80018E1	2.38419E-5	-8.80011E1	3.8147E-4	4.26769E-3	9.52482E-2	2.73213E1	-3.2638E1	-3.26188E1	2.68376E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80016E1	4.76837E-5	-8.80013E1	4.76837E-4	4.36306E-3	9.52721E-2	2.73488E1	-3.2659E1	-3.26478E1	2.68436E1	1.20158E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00966E-1
