[Scan]
initial_time=2016-01-18T20:39:45
final_time=2016-01-18T20:40:07
ip_count=19
run=1024
dataset=7
scan=498
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.7295E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-8.52668E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.38179E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.7298E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.59447E-8
mult1=-1.75499E-8
mult2=-2.70758E-9
rf_tmon=-4.52717E-3
rf_agc=3.34271E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=6.02901E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67815E0
bslens_imon=2.45844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=1.98055E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5355E1
cs_ef1b_imon=2.77763E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0479E1
cs_ea1_imon=2.56095E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01011E0
lens1_imon=1.49592E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6426E1
os_ef1alow_imon=2.96973E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.51226E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85025E1
cs_ef1a_imon=2.96576E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.32014E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.23868E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.36592E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63089E1
os_ef1bup_imon=3.05406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26231E0
cs_ionrep_imon=1.18566E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91935E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02103E1
cs_anode1_imon=2.99567E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=4.01098E-8
tplens_vset=1.4E-1
tplens_vmon=1.63542E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26354E1
iondef3_imon=1.50289E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27033E1
iondef2_imon=1.584E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02977E2
lens6_imon=2.98155E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=8.87728E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.77759E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.16692E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75042E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51886E0
os_ea2_imon=-8.43694E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00497E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70987E1
cs_ef2a_imon=3.12434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01431E0
os_ef2alow_imon=-2.35641E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-4.73143E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11352E1
os_restr2_imon=3.44581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02224E1
cs_anode2_imon=2.28569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73316E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.05854E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.05424E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.75709E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.69689E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02149E2
cs_ionfocb_imon=1.47684E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.46079E-6
window_vset=0.0E0
window_vmon=3.00834E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82693E2
mask1_imon=2.39639E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-8.3554E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.4513E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9368E3
defgrida_imon=6.26167E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.36118E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41359E0
defgridb_imon=6.21841E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.41916E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07359E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65345E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30915E1
cs_fil1_imon=9.96263E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62558E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66702E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67989E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.24699E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.58071E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22612E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=8.23872E-2
res40_imon=-2.06449E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.094E3	2.0E0	1.47E2	4.1E1	-7.12368E-2	-8.80019E1	-1.43051E-4	-8.80011E1	3.8147E-4	4.48227E-3	9.52244E-2	2.73293E1	-3.26661E1	-3.26549E1	2.6829E1	1.20191E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.02277E-1
2.0E0	1.07923E5	1.09E2	3.16E2	1.6E2	-7.17779E-2	-8.80019E1	-2.6226E-4	-8.80012E1	2.86102E-4	4.48227E-3	9.50336E-2	2.73191E1	-3.26693E1	-3.26057E1	2.68315E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00453E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80013E1	-2.38419E-5	-8.80009E1	1.90735E-4	4.48227E-3	9.49144E-2	2.73353E1	-3.26664E1	-3.26334E1	2.67684E1	1.19991E-7	2.51744E-3	2.51744E-3	6.31563E-3	3.0102E-1
4.0E0	2.359E4	1.0E1	6.55E2	3.98E2	-7.21643E-2	-8.80013E1	-2.14577E-4	-8.80008E1	1.90735E-4	4.86374E-3	9.5129E-2	2.73277E1	-3.26872E1	-3.26138E1	2.68629E1	1.20028E-7	2.51679E-3	2.51679E-3	6.3282E-3	3.01485E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80016E1	-4.05312E-4	-8.80008E1	4.05312E-4	4.55379E-3	9.50575E-2	2.73328E1	-3.27021E1	-3.2629E1	2.68166E1	1.19965E-7	2.5199E-3	2.5199E-3	6.35692E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80018E1	-6.19888E-4	-8.80008E1	6.19888E-4	4.52995E-3	9.51767E-2	2.73148E1	-3.26693E1	-3.26448E1	2.68227E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80017E1	-2.6226E-4	-8.8001E1	7.39098E-4	4.3869E-3	9.53436E-2	2.7314E1	-3.26546E1	-3.26298E1	2.68456E1	1.20375E-7	2.5199E-3	2.5199E-3	6.33341E-3	3.03476E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80015E1	-4.05312E-4	-8.80006E1	6.91414E-4	4.45843E-3	9.51052E-2	2.73108E1	-3.26454E1	-3.26163E1	2.68541E1	1.1995E-7	2.51296E-3	2.51296E-3	6.28423E-3	3.02581E-1
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80017E1	0.0E0	-8.80008E1	6.4373E-4	4.60148E-3	9.52244E-2	2.73132E1	-3.26928E1	-3.26254E1	2.684E1	1.19725E-7	2.51549E-3	2.51549E-3	6.31251E-3	3.03567E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80016E1	-4.76837E-4	-8.80011E1	6.4373E-4	4.43459E-3	9.51529E-2	2.7351E1	-3.26707E1	-3.26113E1	2.68082E1	1.2006E-7	2.51758E-3	2.51758E-3	6.31902E-3	3.02025E-1
1.4E1	3.477E3	3.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80019E1	-5.24521E-4	-8.8001E1	6.4373E-4	4.62532E-3	9.52721E-2	2.73261E1	-3.2644E1	-3.25719E1	2.6852E1	1.19861E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00563E-1
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.8002E1	-4.76837E-4	-8.80009E1	6.19888E-4	4.74453E-3	9.48668E-2	2.73086E1	-3.26874E1	-3.26378E1	2.6843E1	1.20226E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01085E-1
1.6E1	4.91E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.8002E1	-4.29153E-4	-8.80006E1	8.10623E-4	4.69685E-3	9.50813E-2	2.72889E1	-3.26621E1	-3.26597E1	2.68322E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01871E-1
1.7E1	8.78E2	0.0E0	6.87E2	4.7E2	-7.10051E-2	-8.8002E1	-1.66893E-4	-8.80008E1	5.72205E-4	4.50611E-3	9.52482E-2	2.73339E1	-3.26915E1	-3.2629E1	2.68328E1	1.20383E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
1.8E1	3.591E3	6.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80018E1	-7.15256E-5	-8.80011E1	4.05312E-4	4.55379E-3	9.51052E-2	2.73081E1	-3.26687E1	-3.2626E1	2.6819E1	1.20723E-7	2.51417E-3	2.51417E-3	6.35601E-3	3.0071E-1
1.9E1	2.075E3	1.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80017E1	1.19209E-4	-8.80009E1	3.8147E-4	4.12464E-3	9.47952E-2	2.73057E1	-3.26729E1	-3.26116E1	2.68088E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.98222E-1
2.0E1	2.6472E4	1.9E1	8.08E2	5.58E2	-7.21643E-2	-8.80017E1	-4.76837E-5	-8.80013E1	5.00679E-4	4.14848E-3	9.5129E-2	2.73381E1	-3.26657E1	-3.2644E1	2.68526E1	1.20403E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.99083E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.13143E-2	-8.80015E1	-3.09944E-4	-8.8001E1	3.09944E-4	4.22001E-3	9.47952E-2	2.73261E1	-3.26693E1	-3.26308E1	2.68442E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
2.2E1	1.892E3	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80022E1	-1.90735E-4	-8.80011E1	4.29153E-4	4.14848E-3	9.51052E-2	2.72231E1	-3.26042E1	-3.26938E1	2.68334E1	1.20122E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.01347E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80016E1	-3.09944E-4	-8.80011E1	4.52995E-4	4.57764E-3	9.49621E-2	2.73316E1	-3.27033E1	-3.26354E1	2.68442E1	1.20106E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.00453E-1
