[Scan]
initial_time=2016-01-18T20:41:41
final_time=2016-01-18T20:42:02
ip_count=19
run=1024
dataset=7
scan=502
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.83074E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.77006E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.41109E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.61619E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.5933E-8
mult1=-2.13565E-8
mult2=-2.74677E-9
rf_tmon=-5.46512E-3
rf_agc=3.27428E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=5.74207E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66974E0
bslens_imon=2.27099E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19646E1
lens5a_imon=2.0029E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05032E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=2.80611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.5303E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97046E0
lens1_imon=1.47429E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.96E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03552E1
cs_ea2_imon=1.49748E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.94306E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.31464E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.26427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1521E1
os_ea1_imon=2.38611E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63431E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21244E0
cs_ionrep_imon=1.19647E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.9791E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=4.00708E-8
tplens_vset=1.4E-1
tplens_vmon=1.68109E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26172E1
iondef3_imon=1.48054E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26644E1
iondef2_imon=1.54291E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98065E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=9.36198E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30197E0
ionrepsh_imon=1.75776E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33778E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51766E0
os_ea2_imon=-8.68929E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00461E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70999E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02272E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10038E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.42455E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.28703E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.24425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7334E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68267E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.04047E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.73881E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16558E0
cs_ionaccel_imon=-1.76536E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.67798E-1
window_imon=-8.60768E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.20617E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.27969E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.13407E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.42432E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08464E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65282E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30918E1
cs_fil1_imon=9.95891E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62666E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6668E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.26117E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.45787E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22389E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09147E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.998E3	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80021E1	-7.15256E-5	-8.80007E1	4.52995E-4	4.24385E-3	9.4986E-2	2.73275E1	-3.26443E1	-3.26231E1	2.68382E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
2.0E0	1.08065E5	1.15E2	3.16E2	1.6E2	-7.3401E-2	-8.8002E1	-2.86102E-4	-8.80006E1	2.6226E-4	4.33922E-3	9.51529E-2	2.73664E1	-3.26488E1	-3.262E1	2.68593E1	1.19959E-7	2.51972E-3	2.51972E-3	6.31283E-3	2.98574E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80018E1	-4.29153E-4	-8.80008E1	3.8147E-4	4.57764E-3	9.51052E-2	2.73242E1	-3.26666E1	-3.26098E1	2.68603E1					
4.0E0	2.335E4	8.0E0	6.55E2	3.98E2	-7.286E-2	-8.80017E1	-3.57628E-4	-8.80009E1	0.0E0	4.33922E-3	9.52482E-2	2.73297E1	-3.26621E1	-3.26248E1	2.68587E1	1.19749E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80022E1	-2.6226E-4	-8.80006E1	2.86102E-4	4.48227E-3	9.52721E-2	2.73339E1	-3.26651E1	-3.26374E1	2.68166E1	1.20174E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80019E1	-2.6226E-4	-8.80009E1	5.24521E-4	4.55379E-3	9.51767E-2	2.73195E1	-3.26579E1	-3.26344E1	2.68605E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80017E1	-7.15256E-4	-8.80009E1	5.00679E-4	4.8399E-3	9.50336E-2	2.73045E1	-3.26762E1	-3.25954E1	2.68466E1	1.19809E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80016E1	-1.12057E-3	-8.80008E1	5.72205E-4	4.45843E-3	9.51052E-2	2.73322E1	-3.26378E1	-3.26278E1	2.68244E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
1.2E1	1.01E2	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80018E1	-4.29153E-4	-8.80006E1	2.86102E-4	4.48227E-3	9.49144E-2	2.73027E1	-3.26819E1	-3.26044E1	2.6831E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99175E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80018E1	-3.09944E-4	-8.80006E1	3.33786E-4	4.31538E-3	9.50098E-2	2.73322E1	-3.26803E1	-3.26095E1	2.68545E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98481E-1
1.4E1	3.464E3	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80019E1	-5.24521E-4	-8.80005E1	7.62939E-4	4.22001E-3	9.50813E-2	2.73186E1	-3.26474E1	-3.26774E1	2.6852E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98222E-1
1.5E1	9.3E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80018E1	-6.91414E-4	-8.80008E1	9.77516E-4	4.41074E-3	9.52721E-2	2.73493E1	-3.26779E1	-3.26413E1	2.68204E1	1.19965E-7	2.51225E-3	2.51225E-3	6.29645E-3	2.9978E-1
1.6E1	4.47E2	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80019E1	-7.39098E-4	-8.80007E1	9.53674E-4	4.62532E-3	9.50813E-2	2.7329E1	-3.2656E1	-3.26156E1	2.68088E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01609E-1
1.7E1	8.98E2	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80019E1	-5.96046E-4	-8.80005E1	1.09673E-3	4.48227E-3	9.51767E-2	2.73187E1	-3.26909E1	-3.26325E1	2.68887E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02133E-1
1.8E1	3.653E3	2.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80018E1	-7.62939E-4	-8.80007E1	6.4373E-4	4.33922E-3	9.51767E-2	2.73201E1	-3.26663E1	-3.26314E1	2.67872E1	1.20209E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.02253E-1
1.9E1	1.993E3	2.0E0	7.68E2	5.29E2	-7.30918E-2	-8.8002E1	-6.67572E-4	-8.80007E1	6.67572E-4	4.48227E-3	9.50336E-2	2.73281E1	-3.26561E1	-3.26396E1	2.68725E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
2.0E1	2.6308E4	8.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80021E1	-5.24521E-4	-8.80007E1	6.91414E-4	4.19617E-3	9.51767E-2	2.73352E1	-3.26549E1	-3.26384E1	2.67988E1	1.20055E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00453E-1
2.1E1	4.1E1	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80022E1	-3.8147E-4	-8.80008E1	5.48363E-4	4.36306E-3	9.50813E-2	2.73183E1	-3.26422E1	-3.26134E1	2.68395E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
2.2E1	1.903E3	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80022E1	-5.48363E-4	-8.80007E1	5.24521E-4	4.26769E-3	9.55105E-2	2.7311E1	-3.27133E1	-3.2698E1	2.684E1	1.19953E-7	2.52492E-3	2.52492E-3	6.29128E-3	3.02253E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80021E1	-4.76837E-4	-8.80008E1	7.86781E-4	4.26769E-3	9.50575E-2	2.7334E1	-3.26644E1	-3.26172E1	2.68267E1	1.20106E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00966E-1
