[Scan]
initial_time=2016-01-18T20:44:00
final_time=2016-01-18T20:44:20
ip_count=19
run=1024
dataset=7
scan=507
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.09279E-2
qbias_imon=-3.73E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-7.24936E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.39412E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.46842E-9
ql4_vset=
ql4_vmon=5.96046E-4
ql4_imon=1.59733E-8
mult1=-1.68643E-8
mult2=-2.75461E-9
rf_tmon=-5.31764E-3
rf_agc=3.23299E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.68759E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68777E0
bslens_imon=2.30343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53935E1
cs_ef1b_imon=2.80106E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=2.53968E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97106E0
lens1_imon=1.37335E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03913E1
cs_ea2_imon=1.48955E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=2.93693E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.31141E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.26175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14819E1
os_ea1_imon=2.37313E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.06127E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.19539E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=2.97189E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.99845E-8
tplens_vset=1.4E-1
tplens_vmon=1.68289E0
tplens_imon=-1.51543E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26644E1
iondef3_imon=1.49424E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26419E1
iondef2_imon=1.5548E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98126E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=9.11081E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.76389E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.15503E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74351E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48762E0
os_ea2_imon=-9.12188E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.15749E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04675E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.42058E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.28126E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02025E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73257E1
iondef1_imon=1.11392E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.0493E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81092E-1
olens1_imon=7.74107E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.68968E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56669E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.6059E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.25664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.87091E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.30711E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.42961E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6536E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=9.96317E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63297E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66404E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74438E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.19157E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.45787E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.03545E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42183E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.098E3	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80023E1	-8.82149E-4	-8.80007E1	6.67572E-4	4.52995E-3	9.52721E-2	2.72909E1	-3.26809E1	-3.26207E1	2.68331E1					
2.0E0	1.07196E5	1.01E2	3.16E2	1.6E2	-7.22418E-2	-8.80023E1	-8.10623E-4	-8.80006E1	1.90735E-4	4.88758E-3	9.53436E-2	2.73375E1	-3.26742E1	-3.26485E1	2.68129E1	1.19953E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.01995E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80019E1	-4.76837E-4	-8.80011E1	4.52995E-4	4.43459E-3	9.52005E-2	2.73277E1	-3.26511E1	-3.26548E1	2.68456E1	1.19923E-7	2.51926E-3	2.51926E-3	6.3074E-3	3.00697E-1
4.0E0	2.3253E4	1.3E1	6.55E2	3.98E2	-7.13915E-2	-8.8002E1	-6.91414E-4	-8.80011E1	3.57628E-4	4.72069E-3	9.51767E-2	2.73057E1	-3.26561E1	-3.26176E1	2.6852E1	1.19965E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.99E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.8002E1	-6.67572E-4	-8.8001E1	5.24521E-4	4.69685E-3	9.51052E-2	2.73252E1	-3.26508E1	-3.26183E1	2.68267E1	1.20069E-7	2.51334E-3	2.51334E-3	6.28552E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80023E1	-5.72205E-4	-8.80009E1	2.86102E-4	4.55379E-3	9.51052E-2	2.73275E1	-3.26838E1	-3.26024E1	2.68496E1	1.19913E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.04241E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.8002E1	-6.19888E-4	-8.80008E1	3.8147E-4	4.76837E-3	9.4986E-2	2.73045E1	-3.26897E1	-3.26395E1	2.68112E1	1.20158E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02253E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.8002E1	-3.33786E-4	-8.8001E1	5.72205E-4	4.64916E-3	9.52005E-2	2.72998E1	-3.26378E1	-3.26272E1	2.6846E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32112E-3	3.00171E-1
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80021E1	-4.76837E-4	-8.80008E1	6.19888E-4	4.48227E-3	9.51529E-2	2.72793E1	-3.26536E1	-3.2635E1	2.68382E1					
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80022E1	-4.05312E-4	-8.80008E1	6.67572E-4	4.88758E-3	9.51529E-2	2.73171E1	-3.26416E1	-3.25942E1	2.6846E1	1.20017E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.99E-1
1.4E1	3.43E3	1.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80023E1	-5.00679E-4	-8.8001E1	6.91414E-4	4.36306E-3	9.4986E-2	2.73387E1	-3.26591E1	-3.25978E1	2.68617E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.99E-1
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80022E1	-3.57628E-4	-8.80009E1	6.91414E-4	4.673E-3	9.4986E-2	2.73478E1	-3.26639E1	-3.26296E1	2.68442E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
1.6E1	4.26E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80023E1	-4.29153E-4	-8.80009E1	5.96046E-4	4.36306E-3	9.49383E-2	2.73157E1	-3.26608E1	-3.26349E1	2.68204E1	1.20122E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00824E-1
1.7E1	8.83E2	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80021E1	-7.62939E-4	-8.80008E1	5.96046E-4	4.48227E-3	9.50813E-2	2.73293E1	-3.26815E1	-3.26337E1	2.68514E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01738E-1
1.8E1	3.682E3	4.0E0	7.27E2	5.0E2	-7.201E-2	-8.80023E1	-5.00679E-4	-8.80007E1	5.48363E-4	4.72069E-3	9.5129E-2	2.72831E1	-3.26376E1	-3.26591E1	2.68587E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.97901E-1
1.9E1	2.044E3	0.0E0	7.68E2	5.29E2	-7.06187E-2	-8.80026E1	-9.05991E-4	-8.80008E1	7.39098E-4	4.57764E-3	9.52721E-2	2.73207E1	-3.26693E1	-3.26627E1	2.68232E1	1.1966E-7	2.51693E-3	2.51693E-3	6.29624E-3	2.98554E-1
2.0E1	2.6393E4	7.0E0	8.08E2	5.58E2	-7.10825E-2	-8.80023E1	-8.10623E-4	-8.80012E1	7.39098E-4	4.62532E-3	9.50336E-2	2.73273E1	-3.26476E1	-3.26356E1	2.6825E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
2.1E1	6.5E1	0.0E0	8.49E2	5.88E2	-7.06958E-2	-8.80024E1	-7.15256E-4	-8.80014E1	3.57628E-4	4.55379E-3	9.51052E-2	2.73181E1	-3.26992E1	-3.26266E1	2.68508E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
2.2E1	1.863E3	0.0E0	8.89E2	6.17E2	-7.03094E-2	-8.80024E1	-7.39098E-4	-8.80014E1	3.33786E-4	4.50611E-3	9.50336E-2	2.73411E1	-3.26809E1	-3.2636E1	2.68146E1	1.20209E-7	2.50775E-3	2.50775E-3	6.31817E-3	3.0148E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.09279E-2	-8.8002E1	-8.10623E-4	-8.80012E1	5.96046E-4	4.62532E-3	9.47952E-2	2.73257E1	-3.26419E1	-3.26644E1	2.68262E1	1.198E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.03545E-1
