[Scan]
initial_time=2016-01-18T20:44:28
final_time=2016-01-18T20:44:48
ip_count=19
run=1024
dataset=7
scan=508
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.77792E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.17854E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.34188E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.46472E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.59554E-8
mult1=-2.3274E-8
mult2=-2.79646E-9
rf_tmon=-4.94502E-3
rf_agc=3.23843E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.61762E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66785E0
bslens_imon=2.17046E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19594E1
lens5a_imon=1.999E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.04928E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54173E1
cs_ef1b_imon=2.82234E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.01863E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04732E1
cs_ea1_imon=2.55867E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95544E0
lens1_imon=1.66133E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64533E1
os_ef1alow_imon=2.96942E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.46367E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84644E1
cs_ef1a_imon=2.92638E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.31072E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11435E1
os_restr1_imon=4.26772E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15231E1
os_ea1_imon=2.37598E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.07159E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22215E0
cs_ionrep_imon=1.196E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91952E2
cs_nozzle_imon=1.9345E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01616E1
cs_anode1_imon=2.95932E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=4.00865E-8
tplens_vset=1.4E-1
tplens_vmon=1.69572E0
tplens_imon=-4.3883E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26002E1
iondef3_imon=1.49399E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.54865E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98192E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=9.18973E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26645E0
ionrepsh_imon=1.77177E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33883E1
lens5b_imon=2.1626E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.11201E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49169E0
os_ea2_imon=-9.77909E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00668E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71488E1
cs_ef2a_imon=3.16067E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.56683E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.12602E-1
os_ef2bup_imon=-5.43365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11479E1
os_restr2_imon=3.42901E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.28206E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.23513E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.10466E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6843E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.04316E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.73566E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14574E0
cs_ionaccel_imon=-1.81083E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02042E2
cs_ionfocb_imon=1.47372E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56143E1
einzel_imon=7.77766E-6
window_vset=0.0E0
window_vmon=2.28201E-1
window_imon=-9.87461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82678E2
mask1_imon=2.39245E-4
mask2_vset=0.0E0
mask2_vmon=-1.86282E1
mask2_imon=-7.06768E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.20561E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.57669E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.15695E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35252E0
defgridb_imon=6.12371E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33346E1
os_fil1_imon=9.41435E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06556E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65013E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.94143E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66421E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58564E-2
os_fil2_imon=-2.68122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77245E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.22969E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35702E-1
cs_fil2_imon=-2.18844E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37948E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22312E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.27461E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2987E-1
res40_imon=-2.46578E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.001E3	0.0E0	1.47E2	4.1E1	-7.15461E-2	-8.80023E1	-1.90735E-4	-8.8001E1	4.05312E-4	4.24385E-3	9.52482E-2	2.73364E1	-3.2662E1	-3.26437E1	2.68441E1	1.201E-7	2.52407E-3	2.52407E-3	6.31879E-3	3.02154E-1
2.0E0	1.06423E5	9.8E1	3.16E2	1.6E2	-7.20871E-2	-8.80022E1	-3.09944E-4	-8.80009E1	3.57628E-4	4.52995E-3	9.51052E-2	2.73247E1	-3.26842E1	-3.26021E1	2.68369E1	1.19749E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0071E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.10825E-2	-8.80023E1	-4.52995E-4	-8.8001E1	4.76837E-4	4.69685E-3	9.4986E-2	2.73269E1	-3.26402E1	-3.26296E1	2.68233E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.9978E-1
4.0E0	2.3447E4	8.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80023E1	-5.00679E-4	-8.80007E1	4.05312E-4	4.95911E-3	9.50575E-2	2.737E1	-3.26729E1	-3.26224E1	2.68286E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80023E1	-4.29153E-4	-8.80007E1	2.14577E-4	4.48227E-3	9.51052E-2	2.73057E1	-3.26874E1	-3.26166E1	2.68418E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.80021E1	-3.09944E-4	-8.80007E1	6.19888E-4	4.26769E-3	9.51052E-2	2.73122E1	-3.26744E1	-3.26124E1	2.68499E1	1.19902E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80018E1	-2.38419E-4	-8.80007E1	4.29153E-4	4.43459E-3	9.53913E-2	2.7288E1	-3.26787E1	-3.26027E1	2.68344E1	1.20209E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80021E1	-3.8147E-4	-8.80007E1	6.91414E-4	4.79221E-3	9.54151E-2	2.73267E1	-3.26476E1	-3.26218E1	2.68448E1	1.20191E-7	2.51248E-3	2.51248E-3	6.31299E-3	3.00676E-1
1.2E1	9.8E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80023E1	-3.09944E-4	-8.80007E1	3.09944E-4	4.48227E-3	9.4986E-2	2.73051E1	-3.26476E1	-3.26314E1	2.68046E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02659E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80023E1	-5.72205E-4	-8.80008E1	3.09944E-4	4.88758E-3	9.4986E-2	2.73448E1	-3.26536E1	-3.26314E1	2.68346E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01871E-1
1.4E1	3.448E3	2.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80021E1	-5.72205E-4	-8.80005E1	5.72205E-4	4.86374E-3	9.49621E-2	2.73312E1	-3.26306E1	-3.2626E1	2.68574E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99941E-1
1.5E1	8.0E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80024E1	-5.24521E-4	-8.80007E1	3.8147E-4	5.10216E-3	9.49383E-2	2.73351E1	-3.26723E1	-3.26434E1	2.68545E1	1.19851E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.98665E-1
1.6E1	4.78E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80022E1	-8.58307E-4	-8.80009E1	0.0E0	4.74453E-3	9.48668E-2	2.73285E1	-3.26591E1	-3.26146E1	2.68346E1	1.20158E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.9841E-1
1.7E1	8.91E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80022E1	-9.29832E-4	-8.80007E1	4.05312E-4	4.45843E-3	9.5129E-2	2.7334E1	-3.26832E1	-3.26166E1	2.68314E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01609E-1
1.8E1	3.757E3	2.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80023E1	-8.34465E-4	-8.80007E1	3.8147E-4	4.57764E-3	9.52482E-2	2.73315E1	-3.26488E1	-3.26152E1	2.68118E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01347E-1
1.9E1	2.031E3	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80024E1	-5.96046E-4	-8.80009E1	4.52995E-4	4.52995E-3	9.51052E-2	2.73429E1	-3.26446E1	-3.26476E1	2.68532E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.02922E-1
2.0E1	2.6347E4	1.5E1	8.08E2	5.58E2	-7.14689E-2	-8.80022E1	-5.96046E-4	-8.80006E1	6.19888E-4	4.57764E-3	9.52244E-2	2.73309E1	-3.26621E1	-3.26206E1	2.68454E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01609E-1
2.1E1	6.4E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80022E1	-6.67572E-4	-8.80007E1	5.24521E-4	4.69685E-3	9.5582E-2	2.73145E1	-3.26148E1	-3.26207E1	2.6834E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3514E-3	2.98481E-1
2.2E1	1.91E3	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.8002E1	-5.00679E-4	-8.80009E1	2.6226E-4	4.91142E-3	9.55582E-2	2.73267E1	-3.26615E1	-3.26771E1	2.68046E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80022E1	-4.05312E-4	-8.80011E1	5.72205E-4	4.72069E-3	9.52482E-2	2.73405E1	-3.26476E1	-3.26002E1	2.6843E1	1.20069E-7	2.51225E-3	2.51225E-3	6.27461E-3	2.9952E-1
