[Scan]
initial_time=2016-01-18T20:45:50
final_time=2016-01-18T20:46:10
ip_count=19
run=1024
dataset=7
scan=511
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.74266E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.40874E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=1.39414E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.41433E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.5913E-8
mult1=-1.92163E-8
mult2=-2.68867E-9
rf_tmon=-4.77679E-3
rf_agc=3.33216E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=5.53834E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69925E0
bslens_imon=2.21763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19565E1
lens5a_imon=1.98262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04881E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53957E1
cs_ef1b_imon=2.80042E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02025E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04634E1
cs_ea1_imon=2.5376E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98169E0
lens1_imon=1.72565E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64776E1
os_ef1alow_imon=2.97731E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.48604E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=2.9297E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.31729E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.26802E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15241E1
os_ea1_imon=2.36877E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63456E1
os_ef1bup_imon=3.07739E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.19298E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93303E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02006E1
cs_anode1_imon=2.96758E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=4.00245E-8
tplens_vset=1.4E-1
tplens_vmon=1.66208E0
tplens_imon=-1.99784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2593E1
iondef3_imon=1.51648E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.54586E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98413E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=8.65126E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2751E0
ionrepsh_imon=1.76282E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.16419E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.13369E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49868E0
os_ea2_imon=-7.09459E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.16532E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04819E0
os_ef2alow_imon=-2.5155E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0534E-1
os_ef2bup_imon=-5.24705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11233E1
os_restr2_imon=3.41449E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.28123E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.25133E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.09989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6837E1
iondef4_imon=1.09268E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.04085E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.73416E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1481E0
cs_ionaccel_imon=-1.79265E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56457E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=2.63443E-1
window_imon=-7.88302E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39227E-4
mask2_vset=0.0E0
mask2_vmon=-1.8628E1
mask2_imon=-7.46599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.09494E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93636E3
defgrida_imon=6.96752E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.61169E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33469E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.42374E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07549E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6512E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30837E1
cs_fil1_imon=9.95435E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63078E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66609E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82575E-2
os_fil2_imon=-2.68077E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.33047E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3552E-1
cs_fil2_imon=-2.66919E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.81364E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22541E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01284E-1
chamber_ion_pmon=1.19856E-7
chamber_cvt_pmon=2.52243E-3
foreline_cvt_pmon=2.52243E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.94335E-1
res40_imon=-2.56763E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.963E3	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.8002E1	-4.76837E-5	-8.8001E1	4.52995E-4	4.81606E-3	9.51529E-2	2.73594E1	-3.26685E1	-3.26301E1	2.68412E1	1.19595E-7	2.51096E-3	2.51096E-3	6.30202E-3	3.02253E-1
2.0E0	1.06635E5	9.9E1	3.16E2	1.6E2	-7.30918E-2	-8.80024E1	4.76837E-5	-8.80008E1	6.67572E-4	4.43459E-3	9.5129E-2	2.73254E1	-3.26476E1	-3.259E1	2.68505E1	1.19749E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0148E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80023E1	-5.00679E-4	-8.80009E1	6.67572E-4	4.81606E-3	9.47714E-2	2.73446E1	-3.26296E1	-3.26189E1	2.68389E1	1.2003E-7	2.52154E-3	2.52154E-3	6.31974E-3	3.00824E-1
4.0E0	2.3545E4	1.6E1	6.55E2	3.98E2	-7.201E-2	-8.80024E1	-1.90735E-4	-8.80009E1	6.67572E-4	4.45843E-3	9.47475E-2	2.7301E1	-3.26649E1	-3.26449E1	2.68117E1	1.1974E-7	2.52236E-3	2.52236E-3	6.32858E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80027E1	-2.38419E-4	-8.80011E1	3.09944E-4	4.74453E-3	9.4986E-2	2.73057E1	-3.26753E1	-3.26398E1	2.68263E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.99175E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80023E1	-2.38419E-4	-8.80007E1	4.05312E-4	4.88758E-3	9.47475E-2	2.7355E1	-3.26897E1	-3.26206E1	2.68382E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.98819E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80027E1	-2.38419E-4	-8.80007E1	4.29153E-4	4.76837E-3	9.49144E-2	2.73207E1	-3.26741E1	-3.25828E1	2.67974E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80028E1	-2.14577E-4	-8.80007E1	3.8147E-4	4.60148E-3	9.50098E-2	2.73189E1	-3.26615E1	-3.26561E1	2.68389E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1
1.2E1	8.3E1	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80025E1	-5.48363E-4	-8.80007E1	3.8147E-4	4.673E-3	9.52244E-2	2.73417E1	-3.26537E1	-3.25989E1	2.68619E1	1.2026E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.02511E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80022E1	-6.4373E-4	-8.80011E1	1.66893E-4	4.74453E-3	9.54628E-2	2.73405E1	-3.26807E1	-3.26392E1	2.68484E1	1.20069E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.00563E-1
1.4E1	3.39E3	3.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80022E1	-1.66893E-4	-8.80007E1	3.33786E-4	4.36306E-3	9.51529E-2	2.73502E1	-3.26344E1	-3.26158E1	2.68226E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00824E-1
1.5E1	1.16E2	1.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80022E1	-4.52995E-4	-8.80009E1	9.53674E-5	4.62532E-3	9.52721E-2	2.73231E1	-3.26452E1	-3.26242E1	2.68496E1	1.19653E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.00563E-1
1.6E1	4.36E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80022E1	-6.91414E-4	-8.80008E1	4.76837E-4	4.62532E-3	9.51052E-2	2.73198E1	-3.2649E1	-3.26154E1	2.68082E1	1.20174E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01085E-1
1.7E1	8.24E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80022E1	-5.48363E-4	-8.80005E1	5.24521E-4	4.48227E-3	9.51529E-2	2.73081E1	-3.26753E1	-3.26206E1	2.6828E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1
1.8E1	3.736E3	4.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80022E1	-4.76837E-4	-8.80007E1	7.39098E-4	4.29153E-3	9.55105E-2	2.73147E1	-3.26687E1	-3.26086E1	2.68556E1	1.20122E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.02922E-1
1.9E1	2.058E3	0.0E0	7.68E2	5.29E2	-7.13915E-2	-8.80022E1	-4.29153E-4	-8.80007E1	3.8147E-4	4.50611E-3	9.4986E-2	2.73153E1	-3.26579E1	-3.26038E1	2.68226E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
2.0E1	2.6451E4	1.9E1	8.08E2	5.58E2	-7.07733E-2	-8.80021E1	-4.29153E-4	-8.80006E1	3.57628E-4	4.43459E-3	9.51529E-2	2.72853E1	-3.26543E1	-3.26242E1	2.68689E1	1.19705E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00041E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.11597E-2	-8.80023E1	-1.90735E-4	-8.80007E1	0.0E0	4.29153E-3	9.52482E-2	2.73234E1	-3.2652E1	-3.26313E1	2.68435E1	1.19965E-7	2.51334E-3	2.51334E-3	6.26916E-3	3.00302E-1
2.2E1	1.829E3	1.0E0	8.89E2	6.17E2	-7.13143E-2	-8.80023E1	-3.09944E-4	-8.80006E1	1.19209E-4	4.31538E-3	9.52959E-2	2.73246E1	-3.26815E1	-3.26242E1	2.68208E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.01995E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80024E1	-2.38419E-4	-8.80006E1	3.33786E-4	4.26769E-3	9.50813E-2	2.73279E1	-3.26543E1	-3.2593E1	2.6837E1	1.19856E-7	2.52243E-3	2.52243E-3	6.3074E-3	3.01284E-1
