[Scan]
initial_time=2016-01-18T20:46:18
final_time=2016-01-18T20:46:38
ip_count=19
run=1024
dataset=7
scan=512
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.78885E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.80332E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=1.37162E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.5375E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.5932E-8
mult1=-1.53152E-8
mult2=-2.56691E-9
rf_tmon=-5.82823E-3
rf_agc=3.20478E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.53477E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65833E0
bslens_imon=2.34669E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19755E1
lens5a_imon=2.02669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53935E1
cs_ef1b_imon=2.81548E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.01941E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=2.56059E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98428E0
lens1_imon=1.59686E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04135E1
cs_ea2_imon=1.49208E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=2.92071E-5
olens2_vset=9.7E-1
olens2_vmon=9.69601E-1
olens2_imon=1.31038E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.26103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14723E1
os_ea1_imon=2.36592E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2569E0
cs_ionrep_imon=1.18746E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91952E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02169E1
cs_anode1_imon=2.97441E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.99751E-8
tplens_vset=1.4E-1
tplens_vmon=1.65766E0
tplens_imon=-2.48877E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.49857E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.54291E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98173E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=9.21035E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=1.78119E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3388E1
lens5b_imon=2.17558E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48642E0
os_ea2_imon=-7.64385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06064E2
lens4b_imon=2.00738E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14843E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.40761E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.26287E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.25001E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.09986E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68484E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.01137E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81331E-1
olens1_imon=7.72966E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-1.7978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.52782E-1
window_imon=-8.42748E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82672E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92596E3
multa_neg_imon=8.21195E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.58611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.2278E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54292E0
defgridb_imon=6.22562E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.41093E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07065E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6501E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30851E1
cs_fil1_imon=9.94828E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62984E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66538E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.80886E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.22379E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22517E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32978E-3
inlet_lpb_pmon=2.99879E-1
chamber_ion_pmon=1.19766E-7
chamber_cvt_pmon=2.53145E-3
foreline_cvt_pmon=2.53145E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.07034E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.986E3	1.0E0	1.47E2	4.1E1	-7.14689E-2	-8.80022E1	-1.00136E-3	-8.80009E1	3.57628E-4	4.55379E-3	9.50813E-2	2.73045E1	-3.26266E1	-3.26408E1	2.68708E1	1.19925E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.02813E-1
2.0E0	1.07028E5	9.6E1	3.16E2	1.6E2	-7.20871E-2	-8.80023E1	-9.05991E-4	-8.80008E1	1.90735E-4	4.31538E-3	9.51052E-2	2.73241E1	-3.26762E1	-3.26095E1	2.68126E1	1.19697E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99175E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80024E1	-9.53674E-4	-8.80008E1	5.96046E-4	4.69685E-3	9.51767E-2	2.73039E1	-3.26399E1	-3.2622E1	2.68522E1	1.19809E-7	2.52647E-3	2.52647E-3	6.31837E-3	2.9926E-1
4.0E0	2.3475E4	1.0E1	6.55E2	3.98E2	-7.16233E-2	-8.80024E1	-4.76837E-4	-8.8001E1	5.00679E-4	4.24385E-3	9.49144E-2	2.73237E1	-3.26518E1	-3.26068E1	2.68605E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.09279E-2	-8.80021E1	-3.8147E-4	-8.8001E1	4.76837E-4	4.26769E-3	9.53913E-2	2.72895E1	-3.26573E1	-3.26092E1	2.6828E1	1.19861E-7	2.5188E-3	2.5188E-3	6.3514E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.8002E1	-5.24521E-4	-8.80005E1	5.00679E-4	4.33922E-3	9.50813E-2	2.73057E1	-3.26496E1	-3.26195E1	2.68482E1	1.19953E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10825E-2	-8.80024E1	-4.52995E-4	-8.80007E1	5.24521E-4	4.673E-3	9.52482E-2	2.73099E1	-3.26452E1	-3.26212E1	2.68292E1	1.19757E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80021E1	-3.09944E-4	-8.80008E1	5.00679E-4	4.41074E-3	9.54151E-2	2.73201E1	-3.26639E1	-3.26242E1	2.68472E1	1.19757E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.03185E-1
1.2E1	1.02E2	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80023E1	-6.19888E-4	-8.80008E1	4.76837E-4	4.41074E-3	9.52244E-2	2.72871E1	-3.26579E1	-3.26182E1	2.68532E1	1.19653E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01085E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80025E1	-4.29153E-4	-8.80008E1	5.24521E-4	4.93526E-3	9.51529E-2	2.73286E1	-3.26696E1	-3.26252E1	2.6833E1	1.20158E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.00197E-1
1.4E1	3.314E3	3.0E0	5.66E2	3.82E2	-7.14689E-2	-8.80026E1	-3.57628E-4	-8.80007E1	3.09944E-4	4.62532E-3	9.51052E-2	2.73425E1	-3.2631E1	-3.26222E1	2.68546E1	1.20038E-7	2.52069E-3	2.52069E-3	6.3153E-3	2.98886E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80024E1	-5.72205E-4	-8.80008E1	4.05312E-4	4.19617E-3	9.48429E-2	2.73508E1	-3.26869E1	-3.26161E1	2.68601E1	1.20099E-7	2.51223E-3	2.51223E-3	6.31744E-3	2.97678E-1
1.6E1	4.56E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80024E1	-2.86102E-4	-8.80008E1	6.19888E-4	4.17233E-3	9.51767E-2	2.73201E1	-3.26597E1	-3.26134E1	2.68538E1	1.19738E-7	2.52029E-3	2.52029E-3	6.33112E-3	2.99916E-1
1.7E1	8.58E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80024E1	-3.8147E-4	-8.80004E1	7.86781E-4	4.12464E-3	9.52005E-2	2.73322E1	-3.26531E1	-3.26207E1	2.67956E1	1.20031E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99613E-1
1.8E1	3.738E3	1.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80024E1	-5.48363E-4	-8.80006E1	6.4373E-4	4.26769E-3	9.50575E-2	2.73363E1	-3.26783E1	-3.2635E1	2.6834E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.98156E-1
1.9E1	2.064E3	2.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80027E1	-5.72205E-4	-8.80007E1	3.57628E-4	4.69685E-3	9.49621E-2	2.73237E1	-3.26765E1	-3.25912E1	2.68288E1	1.19851E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.03545E-1
2.0E1	2.6449E4	1.6E1	8.08E2	5.58E2	-7.30918E-2	-8.80026E1	-4.76837E-4	-8.80005E1	2.14577E-4	4.8399E-3	9.4986E-2	2.73393E1	-3.26498E1	-3.26138E1	2.68218E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
2.1E1	4.5E1	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80027E1	-3.8147E-4	-8.80004E1	4.29153E-4	4.88758E-3	9.51767E-2	2.73204E1	-3.26449E1	-3.26567E1	2.68209E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
2.2E1	1.872E3	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80027E1	-5.72205E-4	-8.80004E1	3.8147E-4	4.93526E-3	9.5129E-2	2.73249E1	-3.26735E1	-3.26362E1	2.68581E1	1.19991E-7	2.51287E-3	2.51287E-3	6.31269E-3	3.01104E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80028E1	-8.58307E-4	-8.80005E1	4.05312E-4	4.57764E-3	9.52244E-2	2.73261E1	-3.26663E1	-3.26302E1	2.68484E1	1.19766E-7	2.53145E-3	2.53145E-3	6.32978E-3	2.99879E-1
