[Scan]
initial_time=2016-01-18T20:48:08
final_time=2016-01-18T20:48:27
ip_count=19
run=1024
dataset=7
scan=516
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.791E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.65073E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.36416E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.45053E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.59115E-8
mult1=-2.51749E-8
mult2=-2.82909E-9
rf_tmon=-4.3856E-3
rf_agc=3.35038E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=5.37229E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65826E0
bslens_imon=2.23366E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19758E1
lens5a_imon=2.00706E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.04856E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54041E1
cs_ef1b_imon=2.82119E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02281E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04708E1
cs_ea1_imon=2.54869E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99138E0
lens1_imon=1.5695E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64985E1
os_ef1alow_imon=2.98038E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03576E1
cs_ea2_imon=1.47916E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84264E1
cs_ef1a_imon=2.92511E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.30887E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11143E1
os_restr1_imon=4.27067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15134E1
os_ea1_imon=2.3796E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63525E1
os_ef1bup_imon=3.07769E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24764E0
cs_ionrep_imon=1.1906E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=2.96131E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.99829E-8
tplens_vset=1.4E-1
tplens_vmon=1.66879E0
tplens_imon=-3.54269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.50779E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26868E1
iondef2_imon=1.57115E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02977E2
lens6_imon=2.98113E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=9.06837E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.268E0
ionrepsh_imon=1.76735E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.17042E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74521E1
cs_ef2b_imon=3.12673E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49893E0
os_ea2_imon=-6.74897E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71173E1
cs_ef2a_imon=3.15787E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07272E0
os_ef2alow_imon=-2.40874E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79692E-1
os_ef2bup_imon=-5.22286E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.41281E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29623E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.23968E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.09975E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6837E1
iondef4_imon=1.1078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.03376E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.70685E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15933E0
cs_ionaccel_imon=-1.87939E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02035E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56476E1
einzel_imon=7.77347E-6
window_vset=0.0E0
window_vmon=2.19817E-1
window_imon=-8.12907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82677E2
mask1_imon=2.39201E-4
mask2_vset=0.0E0
mask2_vmon=-1.86201E1
mask2_imon=-8.24584E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.00111E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=7.18814E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.21486E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=5.92089E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.42381E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07245E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64849E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30913E1
cs_fil1_imon=9.94739E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62281E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66565E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72693E-2
os_fil2_imon=-2.6912E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97306E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.44504E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33287E-1
cs_fil2_imon=-2.6912E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.02679E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22506E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.78199E-1
res40_imon=-2.58E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.022E3	1.0E0	1.47E2	4.1E1	-7.15461E-2	-8.80022E1	-1.90735E-4	-8.80006E1	5.24521E-4	4.07696E-3	9.48191E-2	2.73535E1	-3.2672E1	-3.26142E1	2.68244E1	1.19895E-7	2.5199E-3	2.5199E-3	6.33065E-3	3.00087E-1
2.0E0	1.06549E5	9.2E1	3.16E2	1.6E2	-7.13915E-2	-8.80022E1	-2.38419E-4	-8.80011E1	4.29153E-4	4.62532E-3	9.5129E-2	2.73144E1	-3.26677E1	-3.26202E1	2.68238E1	1.19851E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00966E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80023E1	-6.91414E-4	-8.80008E1	4.29153E-4	4.31538E-3	9.50813E-2	2.73333E1	-3.26738E1	-3.25832E1	2.67976E1	1.20106E-7	2.50989E-3	2.50989E-3	6.31817E-3	3.01223E-1
4.0E0	2.3319E4	2.2E1	6.55E2	3.98E2	-7.18554E-2	-8.80023E1	-5.96046E-4	-8.80005E1	1.90735E-4	4.3869E-3	9.54628E-2	2.73346E1	-3.2672E1	-3.26154E1	2.68522E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.09279E-2	-8.80025E1	-4.29153E-4	-8.80009E1	2.38419E-4	4.33922E-3	9.50098E-2	2.7346E1	-3.26645E1	-3.26368E1	2.6837E1	1.19809E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.13143E-2	-8.80027E1	-5.24521E-4	-8.80009E1	1.66893E-4	4.36306E-3	9.4676E-2	2.73435E1	-3.26536E1	-3.2617E1	2.6828E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.11597E-2	-8.80026E1	-8.34465E-4	-8.80009E1	3.33786E-4	4.33922E-3	9.49383E-2	2.73261E1	-3.26633E1	-3.26146E1	2.68635E1	1.20122E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.07733E-2	-8.80026E1	-5.96046E-4	-8.80006E1	3.33786E-4	4.17233E-3	9.52005E-2	2.73328E1	-3.26773E1	-3.25847E1	2.68364E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00563E-1
1.2E1	7.9E1	0.0E0	4.85E2	3.23E2	-7.06187E-2	-8.80023E1	-5.72205E-4	-8.80009E1	5.48363E-4	4.12464E-3	9.51052E-2	2.72943E1	-3.2647E1	-3.26104E1	2.68695E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0071E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.08504E-2	-8.80027E1	-8.82149E-4	-8.80007E1	3.57628E-4	4.22001E-3	9.51052E-2	2.73057E1	-3.26687E1	-3.265E1	2.68308E1	1.19913E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00302E-1
1.4E1	3.413E3	5.0E0	5.66E2	3.82E2	-7.10051E-2	-8.80024E1	-7.15256E-4	-8.80007E1	4.05312E-4	3.8147E-3	9.50575E-2	2.73358E1	-3.26909E1	-3.26236E1	2.68076E1	1.19913E-7	2.51552E-3	2.51552E-3	6.28006E-3	2.9926E-1
1.5E1	9.2E1	0.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80023E1	-8.82149E-4	-8.80009E1	4.05312E-4	3.95775E-3	9.50098E-2	2.73572E1	-3.26892E1	-3.26127E1	2.68238E1	1.20069E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00041E-1
1.6E1	4.68E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80024E1	-8.34465E-4	-8.8001E1	6.19888E-4	4.1008E-3	9.46522E-2	2.73263E1	-3.26672E1	-3.26479E1	2.68425E1	1.1988E-7	2.51369E-3	2.51369E-3	6.30221E-3	3.00494E-1
1.7E1	9.24E2	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80023E1	-8.10623E-4	-8.80007E1	5.96046E-4	3.86238E-3	9.48906E-2	2.73201E1	-3.26567E1	-3.2614E1	2.68466E1	1.19613E-7	2.51384E-3	2.51384E-3	6.30171E-3	2.99981E-1
1.8E1	3.677E3	1.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80023E1	-6.67572E-4	-8.80007E1	4.05312E-4	3.91006E-3	9.50336E-2	2.72991E1	-3.26681E1	-3.26368E1	2.68394E1	1.19601E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
1.9E1	2.093E3	4.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80024E1	-9.53674E-4	-8.80007E1	3.57628E-4	4.14848E-3	9.48906E-2	2.73724E1	-3.26609E1	-3.26176E1	2.68316E1	1.20226E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1
2.0E1	2.6301E4	1.4E1	8.08E2	5.58E2	-7.16233E-2	-8.80023E1	-7.62939E-4	-8.80008E1	1.19209E-4	4.29153E-3	9.5129E-2	2.73151E1	-3.26903E1	-3.26231E1	2.68448E1	1.19757E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.10825E-2	-8.80023E1	-4.05312E-4	-8.80003E1	1.90735E-4	3.79086E-3	9.52244E-2	2.73279E1	-3.26621E1	-3.2626E1	2.68347E1	1.19861E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.02396E-1
2.2E1	1.81E3	1.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80023E1	-2.6226E-4	-8.80007E1	1.19209E-4	4.17233E-3	9.47237E-2	2.73417E1	-3.26526E1	-3.26396E1	2.684E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.02511E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80026E1	-3.57628E-4	-8.80009E1	1.19209E-4	4.33922E-3	9.48906E-2	2.73387E1	-3.26868E1	-3.26266E1	2.6837E1	1.19851E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00197E-1
