[Scan]
initial_time=2016-01-18T20:49:56
final_time=2016-01-18T20:50:15
ip_count=19
run=1024
dataset=7
scan=520
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.75558E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.16448E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.39253E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.36877E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=1.59214E-8
mult1=-2.09141E-8
mult2=-3.77854E-9
rf_tmon=-1.6585E-3
rf_agc=3.58631E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=5.68259E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68356E0
bslens_imon=2.48728E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19604E1
lens5a_imon=2.00001E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54004E1
cs_ef1b_imon=2.8141E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04718E1
cs_ea1_imon=2.54292E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0029E0
lens1_imon=1.47069E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64714E1
os_ef1alow_imon=2.97728E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.49857E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.91964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.30859E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11479E1
os_restr1_imon=4.27932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14735E1
os_ea1_imon=2.39187E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.07721E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=1.18782E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93272E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01865E1
cs_anode1_imon=2.96456E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=4.00392E-8
tplens_vset=1.4E-1
tplens_vmon=1.66426E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26434E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26957E1
iondef2_imon=1.56309E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.9827E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=9.10175E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30197E0
ionrepsh_imon=1.76822E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33904E1
lens5b_imon=2.17053E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74738E1
cs_ef2b_imon=3.12736E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47861E0
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71295E1
cs_ef2a_imon=3.15468E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07015E0
os_ef2alow_imon=-2.52192E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15097E-1
os_ef2bup_imon=-5.22406E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11242E1
os_restr2_imon=3.41891E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.28162E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.24149E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.12041E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68337E1
iondef4_imon=1.09252E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.03001E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.68072E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15135E0
cs_ionaccel_imon=-1.7996E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.4744E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56574E1
einzel_imon=7.71404E-6
window_vset=0.0E0
window_vmon=2.55023E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-6.58114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.28908E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.49599E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.02592E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34743E0
defgridb_imon=6.00211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33307E1
os_fil1_imon=9.42264E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07192E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64861E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.96051E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62472E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66441E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.79597E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85354E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.50737E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35433E-1
cs_fil2_imon=-2.53775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.05819E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22564E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.20513E-1
res40_imon=-2.48824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.966E3	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80024E1	-1.43051E-4	-8.80009E1	5.24521E-4	4.62532E-3	9.49383E-2	2.73598E1	-3.26482E1	-3.26134E1	2.6818E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
2.0E0	1.05853E5	7.6E1	3.16E2	1.6E2	-7.286E-2	-8.80025E1	-2.6226E-4	-8.80008E1	8.58307E-4	4.81606E-3	9.49383E-2	2.73045E1	-3.26609E1	-3.26482E1	2.68581E1	1.19653E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9978E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80026E1	-4.29153E-4	-8.80009E1	2.38419E-4	4.45843E-3	9.50336E-2	2.73193E1	-3.26673E1	-3.26236E1	2.68534E1	1.19861E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01085E-1
4.0E0	2.3548E4	1.2E1	6.55E2	3.98E2	-7.31692E-2	-8.8003E1	-9.05991E-4	-8.80008E1	2.86102E-4	4.673E-3	9.52005E-2	2.73328E1	-3.26537E1	-3.26413E1	2.6825E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80022E1	-5.48363E-4	-8.80008E1	4.29153E-4	4.17233E-3	9.52959E-2	2.73201E1	-3.26428E1	-3.26464E1	2.68563E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80026E1	-1.19209E-4	-8.80009E1	4.29153E-4	4.12464E-3	9.50813E-2	2.73039E1	-3.26446E1	-3.26026E1	2.68334E1	1.2033E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80027E1	-1.43051E-4	-8.80006E1	5.00679E-4	4.673E-3	9.5129E-2	2.73435E1	-3.26543E1	-3.26585E1	2.68484E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80023E1	2.38419E-5	-8.80009E1	4.29153E-4	4.3869E-3	9.52959E-2	2.73231E1	-3.26561E1	-3.26308E1	2.68343E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
1.2E1	9.2E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80023E1	-2.14577E-4	-8.80007E1	6.19888E-4	4.33922E-3	9.51052E-2	2.73582E1	-3.26856E1	-3.25841E1	2.68298E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.97394E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80024E1	-2.14577E-4	-8.80004E1	6.91414E-4	4.55379E-3	9.51529E-2	2.73502E1	-3.26879E1	-3.259E1	2.68286E1	1.19861E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00041E-1
1.4E1	3.4E3	1.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80024E1	-2.6226E-4	-8.80007E1	4.29153E-4	4.29153E-3	9.52005E-2	2.73339E1	-3.26627E1	-3.26578E1	2.68671E1	1.19809E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
1.5E1	8.1E1	1.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80023E1	-5.72205E-4	-8.80007E1	3.8147E-4	4.673E-3	9.50575E-2	2.73141E1	-3.26885E1	-3.2644E1	2.685E1	1.19978E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.01209E-1
1.6E1	4.18E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80023E1	-4.05312E-4	-8.80008E1	1.19209E-4	4.62532E-3	9.53436E-2	2.72774E1	-3.26189E1	-3.26927E1	2.68244E1	1.19861E-7	2.51225E-3	2.51225E-3	6.29098E-3	2.9978E-1
1.7E1	8.71E2	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80027E1	-7.86781E-4	-8.80007E1	3.57628E-4	4.45843E-3	9.52005E-2	2.73387E1	-3.26543E1	-3.26356E1	2.68484E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99175E-1
1.8E1	3.855E3	1.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80023E1	-8.34465E-4	-8.80005E1	6.67572E-4	4.33922E-3	9.51052E-2	2.73315E1	-3.26843E1	-3.26158E1	2.68671E1	1.20043E-7	2.51826E-3	2.51826E-3	6.33211E-3	3.01085E-1
1.9E1	2.1E3	1.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80023E1	-5.00679E-4	-8.80006E1	5.96046E-4	4.48227E-3	9.51529E-2	2.73434E1	-3.26313E1	-3.26272E1	2.6825E1					
2.0E1	2.6027E4	8.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80025E1	-5.24521E-4	-8.80009E1	3.57628E-4	4.12464E-3	9.51767E-2	2.73021E1	-3.26832E1	-3.26242E1	2.6869E1	1.19749E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.9943E-1
2.1E1	4.3E1	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80028E1	-4.29153E-4	-8.80007E1	3.57628E-4	4.48227E-3	9.49383E-2	2.73228E1	-3.26396E1	-3.26455E1	2.68226E1	1.19902E-7	2.52492E-3	2.52492E-3	6.29665E-3	3.0071E-1
2.2E1	1.769E3	3.0E0	8.89E2	6.17E2	-7.286E-2	-8.80025E1	-7.39098E-4	-8.80009E1	3.57628E-4	4.673E-3	9.50336E-2	2.73411E1	-3.27047E1	-3.26404E1	2.68496E1	1.19749E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00197E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80024E1	-6.19888E-4	-8.80009E1	7.15256E-4	4.45843E-3	9.50575E-2	2.73225E1	-3.26957E1	-3.26434E1	2.68337E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
