[Scan]
initial_time=2016-01-18T20:52:37
final_time=2016-01-18T20:52:57
ip_count=19
run=1024
dataset=7
scan=526
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.77684E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-7.10821E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.39372E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.25868E-9
ql4_vset=
ql4_vmon=5.96046E-4
ql4_imon=1.59517E-8
mult1=-1.92645E-8
mult2=-2.80045E-9
rf_tmon=-5.42568E-3
rf_agc=3.17234E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.51116E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67769E0
bslens_imon=2.39247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19603E1
lens5a_imon=1.99676E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04894E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54129E1
cs_ef1b_imon=2.80175E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=2.5444E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00411E0
lens1_imon=1.37873E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64646E1
os_ef1alow_imon=2.98027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03421E1
cs_ea2_imon=1.48255E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=2.91366E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.30253E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1156E1
os_restr1_imon=4.26884E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1511E1
os_ea1_imon=2.37508E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6366E1
os_ef1bup_imon=3.0832E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24108E0
cs_ionrep_imon=1.18026E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.94921E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.99276E-8
tplens_vset=1.4E-1
tplens_vmon=1.66959E0
tplens_imon=-4.13684E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.48585E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.57694E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98081E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=9.1691E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29066E0
ionrepsh_imon=1.77602E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.15654E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74732E1
cs_ef2b_imon=3.12025E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48411E0
os_ea2_imon=-7.36906E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00487E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71145E1
cs_ef2a_imon=3.16329E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05643E0
os_ef2alow_imon=-2.64917E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01998E-1
os_ef2bup_imon=-5.3326E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11254E1
os_restr2_imon=3.41891E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.28202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.24373E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.07668E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68388E1
iondef4_imon=1.09813E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.08486E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81092E-1
olens1_imon=7.6825E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15634E0
cs_ionaccel_imon=-1.81831E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47391E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.72527E-6
window_vset=0.0E0
window_vmon=2.413E-1
window_imon=-9.2758E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.39144E-4
mask2_vset=0.0E0
mask2_vmon=-1.86076E1
mask2_imon=-7.1051E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=6.83676E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.47314E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.32159E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34226E0
defgridb_imon=6.003E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33331E1
os_fil1_imon=9.43374E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07342E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64852E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=9.96993E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62752E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66288E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.7782E-2
os_fil2_imon=-2.56894E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00948E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.42696E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32744E-1
cs_fil2_imon=-2.45042E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.18493E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22482E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30212E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.20042E-7
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.62503E-1
res40_imon=-2.60426E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.929E3	5.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80024E1	-3.33786E-4	-8.80009E1	5.72205E-4	4.31538E-3	9.52244E-2	2.72892E1	-3.26602E1	-3.26195E1	2.68605E1	1.20208E-7	2.51952E-3	2.51952E-3	6.3074E-3	2.9944E-1
2.0E0	1.05896E5	1.02E2	3.16E2	1.6E2	-7.25507E-2	-8.80025E1	-7.39098E-4	-8.8001E1	3.8147E-4	4.48227E-3	9.53197E-2	2.73309E1	-3.26446E1	-3.25864E1	2.68262E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80024E1	-4.29153E-4	-8.80007E1	5.48363E-4	4.24385E-3	9.50336E-2	2.7344E1	-3.26891E1	-3.26183E1	2.68499E1	1.20235E-7	2.52008E-3	2.52008E-3	6.31817E-3	3.01866E-1
4.0E0	2.3234E4	1.4E1	6.55E2	3.98E2	-7.18554E-2	-8.80026E1	-5.96046E-4	-8.80006E1	4.52995E-4	4.43459E-3	9.51529E-2	2.73153E1	-3.26753E1	-3.26122E1	2.68292E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80024E1	-7.15256E-4	-8.80009E1	5.48363E-4	4.43459E-3	9.53197E-2	2.7324E1	-3.26638E1	-3.26236E1	2.68683E1	1.19861E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80023E1	-5.24521E-4	-8.80011E1	5.24521E-4	4.72069E-3	9.54151E-2	2.73255E1	-3.26609E1	-3.26308E1	2.68388E1	1.20226E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80025E1	-5.24521E-4	-8.8001E1	4.76837E-4	4.60148E-3	9.53436E-2	2.73216E1	-3.26779E1	-3.26178E1	2.68082E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80023E1	-8.82149E-4	-8.80005E1	7.62939E-4	4.52995E-3	9.54151E-2	2.73096E1	-3.26573E1	-3.26176E1	2.68445E1	1.20122E-7	2.52318E-3	2.52318E-3	6.36244E-3	2.9874E-1
1.2E1	1.06E2	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80022E1	-8.82149E-4	-8.80007E1	3.8147E-4	4.57764E-3	9.53674E-2	2.73298E1	-3.26422E1	-3.26176E1	2.68348E1	1.20016E-7	2.5216E-3	2.5216E-3	6.31761E-3	3.00878E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80023E1	-1.04904E-3	-8.80008E1	7.15256E-4	4.36306E-3	9.50336E-2	2.73003E1	-3.26146E1	-3.26765E1	2.68581E1	1.20132E-7	2.51675E-3	2.51675E-3	6.31925E-3	3.01043E-1
1.4E1	3.457E3	2.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80023E1	-7.86781E-4	-8.80008E1	4.76837E-4	4.41074E-3	9.4986E-2	2.73393E1	-3.26378E1	-3.26396E1	2.67776E1	1.20158E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.0148E-1
1.5E1	7.6E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80022E1	-7.86781E-4	-8.80004E1	6.4373E-4	4.22001E-3	9.52482E-2	2.73387E1	-3.26726E1	-3.25806E1	2.68736E1	1.20017E-7	2.52428E-3	2.52428E-3	6.29098E-3	3.01085E-1
1.6E1	4.61E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80024E1	-6.91414E-4	-8.80006E1	7.62939E-4	4.31538E-3	9.52244E-2	2.73451E1	-3.26978E1	-3.26254E1	2.68372E1	1.20004E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.99941E-1
1.7E1	9.04E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80024E1	-2.6226E-4	-8.80006E1	6.67572E-4	4.31538E-3	9.51529E-2	2.73238E1	-3.26653E1	-3.26023E1	2.68138E1	1.20177E-7	2.51886E-3	2.51886E-3	6.30221E-3	3.00247E-1
1.8E1	3.781E3	3.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80026E1	-4.05312E-4	-8.80006E1	6.19888E-4	4.31538E-3	9.50575E-2	2.73051E1	-3.2659E1	-3.26537E1	2.68328E1	1.19775E-7	2.51725E-3	2.51725E-3	6.3245E-3	2.9917E-1
1.9E1	2.103E3	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80026E1	-3.57628E-4	-8.80005E1	6.67572E-4	4.22001E-3	9.52721E-2	2.73135E1	-3.26681E1	-3.2623E1	2.68545E1	1.2026E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00197E-1
2.0E1	2.6352E4	1.9E1	8.08E2	5.58E2	-7.201E-2	-8.80026E1	-5.72205E-4	-8.80003E1	5.72205E-4	4.48227E-3	9.52721E-2	2.73141E1	-3.26446E1	-3.26146E1	2.68358E1	1.1966E-7	2.52473E-3	2.52473E-3	6.31299E-3	3.01209E-1
2.1E1	6.4E1	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80024E1	-4.76837E-4	-8.80006E1	3.57628E-4	4.60148E-3	9.53197E-2	2.73092E1	-3.26638E1	-3.26378E1	2.68597E1	1.20106E-7	2.52384E-3	2.52384E-3	6.29665E-3	2.99941E-1
2.2E1	1.848E3	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80023E1	-3.57628E-4	-8.80004E1	5.96046E-4	4.22001E-3	9.50098E-2	2.7324E1	-3.26402E1	-3.26036E1	2.68124E1	1.20122E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00563E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80025E1	-4.76837E-4	-8.80004E1	5.96046E-4	4.55379E-3	9.51529E-2	2.73189E1	-3.26597E1	-3.2626E1	2.68388E1	1.20042E-7	2.51498E-3	2.51498E-3	6.30212E-3	3.006E-1
