[Scan]
initial_time=2016-01-18T20:53:04
final_time=2016-01-18T20:53:24
ip_count=19
run=1024
dataset=7
scan=527
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.11597E-2
qbias_imon=-3.87545E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.01392E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.38067E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.2771E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.58935E-8
mult1=-1.92525E-8
mult2=-2.92221E-9
rf_tmon=-4.23604E-3
rf_agc=3.35499E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.75566E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67919E0
bslens_imon=2.65298E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=1.98262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54165E1
cs_ef1b_imon=2.80737E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02082E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0474E1
cs_ea1_imon=2.57087E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95809E0
lens1_imon=1.66548E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64649E1
os_ef1alow_imon=2.96445E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.49595E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=2.92726E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.30288E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11413E1
os_restr1_imon=4.26663E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.36523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63496E1
os_ef1bup_imon=3.06905E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22673E0
cs_ionrep_imon=1.1859E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01919E1
cs_anode1_imon=2.97626E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=4.00417E-8
tplens_vset=1.4E-1
tplens_vmon=1.67211E0
tplens_imon=-4.617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.51966E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26939E1
iondef2_imon=1.56638E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02989E2
lens6_imon=2.98126E-4
ql6_vset=1.0E-1
ql6_vmon=9.52959E-2
ql6_imon=8.85439E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27628E0
ionrepsh_imon=1.77592E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33835E1
lens5b_imon=2.18047E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74866E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51932E0
os_ea2_imon=-8.7935E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71165E1
cs_ef2a_imon=3.16706E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0702E0
os_ef2alow_imon=-2.52245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99548E-1
os_ef2bup_imon=-5.28528E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.41032E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.28052E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01676E1
cs_anode2_imon=2.2336E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73634E1
iondef1_imon=1.10131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68797E1
iondef4_imon=1.09546E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.03715E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.68337E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14173E0
cs_ionaccel_imon=-1.72315E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47282E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56469E1
einzel_imon=7.80252E-6
window_vset=0.0E0
window_vmon=2.18265E-1
window_imon=-9.30788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.86442E1
mask2_imon=-7.08371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.33208E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.70206E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.27545E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30221E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.43104E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6497E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30844E1
cs_fil1_imon=9.96321E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62847E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66144E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.7751E-2
os_fil2_imon=-2.57651E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.45703E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.67498E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08988E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22419E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.30449E-1
res40_imon=-2.58153E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=224
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.034E3	1.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80028E1	-7.39098E-4	-8.80008E1	2.6226E-4	4.26769E-3	9.53674E-2	2.73287E1	-3.26614E1	-3.26178E1	2.68136E1	1.20278E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.00563E-1
2.0E0	1.06211E5	1.06E2	3.16E2	1.6E2	-7.3401E-2	-8.80028E1	-8.34465E-4	-8.80009E1	6.4373E-4	4.31538E-3	9.52005E-2	2.73339E1	-3.26707E1	-3.26272E1	2.68599E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01738E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80032E1	-7.86781E-4	-8.80009E1	5.48363E-4	4.41074E-3	9.52721E-2	2.73346E1	-3.26845E1	-3.26167E1	2.68748E1	1.19705E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01609E-1
4.0E0	2.3397E4	1.8E1	6.55E2	3.98E2	-7.37103E-2	-8.80028E1	-5.72205E-4	-8.8001E1	5.96046E-4	4.52995E-3	9.52244E-2	2.73153E1	-3.26494E1	-3.26362E1	2.68328E1	1.20311E-7	2.52008E-3	2.52008E-3	6.32087E-3	2.99558E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80028E1	-6.67572E-4	-8.80008E1	5.00679E-4	4.57764E-3	9.52482E-2	2.73165E1	-3.26675E1	-3.26356E1	2.68605E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.8003E1	-5.00679E-4	-8.80007E1	5.48363E-4	4.55379E-3	9.50098E-2	2.72895E1	-3.26765E1	-3.26116E1	2.68418E1	1.20435E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80026E1	-6.19888E-4	-8.80007E1	3.09944E-4	4.48227E-3	9.53913E-2	2.72892E1	-3.2652E1	-3.25806E1	2.68833E1	1.20244E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.01209E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80025E1	-8.10623E-4	-8.80005E1	5.48363E-4	4.57764E-3	9.52721E-2	2.73063E1	-3.26615E1	-3.2604E1	2.68232E1	1.20055E-7	2.50882E-3	2.50882E-3	6.33977E-3	3.02253E-1
1.2E1	9.8E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80025E1	-5.96046E-4	-8.80009E1	7.15256E-4	4.24385E-3	9.50575E-2	2.73369E1	-3.26579E1	-3.2626E1	2.67716E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80024E1	-4.29153E-4	-8.80012E1	0.0E0	4.31538E-3	9.49144E-2	2.73287E1	-3.26384E1	-3.26419E1	2.68695E1	1.19757E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9978E-1
1.4E1	3.482E3	1.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80025E1	-7.86781E-4	-8.80009E1	2.14577E-4	4.60148E-3	9.52959E-2	2.73122E1	-3.26915E1	-3.26178E1	2.68389E1	1.20017E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00824E-1
1.5E1	1.08E2	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80025E1	-1.90735E-4	-8.80006E1	3.8147E-4	4.17233E-3	9.54628E-2	2.73381E1	-3.26561E1	-3.26338E1	2.6819E1	1.19953E-7	2.52276E-3	2.52276E-3	6.34518E-3	3.01738E-1
1.6E1	4.08E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80028E1	-4.76837E-4	-8.80007E1	4.29153E-4	4.64916E-3	9.51052E-2	2.73511E1	-3.26514E1	-3.26065E1	2.684E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01223E-1
1.7E1	9.2E2	1.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80026E1	-6.67572E-4	-8.80006E1	5.24521E-4	4.64916E-3	9.50098E-2	2.73057E1	-3.26356E1	-3.26158E1	2.68316E1	1.19902E-7	2.51525E-3	2.51525E-3	6.36144E-3	3.0071E-1
1.8E1	3.773E3	5.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80025E1	-8.34465E-4	-8.80009E1	5.00679E-4	4.24385E-3	9.5129E-2	2.72997E1	-3.26561E1	-3.2644E1	2.68487E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
1.9E1	2.119E3	2.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80028E1	-8.34465E-4	-8.80009E1	4.29153E-4	4.19617E-3	9.52005E-2	2.73234E1	-3.26697E1	-3.26425E1	2.6843E1	1.20122E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.01347E-1
2.0E1	2.5905E4	1.7E1	8.08E2	5.58E2	-7.13915E-2	-8.80026E1	-6.4373E-4	-8.8001E1	5.24521E-4	4.673E-3	9.52721E-2	2.73219E1	-3.26633E1	-3.26188E1	2.68148E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01609E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80025E1	-7.86781E-4	-8.80009E1	4.05312E-4	4.36306E-3	9.52244E-2	2.73275E1	-3.26585E1	-3.26496E1	2.68725E1	1.19902E-7	2.52384E-3	2.52384E-3	6.33436E-3	2.99686E-1
2.2E1	1.858E3	3.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80028E1	-7.39098E-4	-8.8001E1	2.86102E-4	4.3869E-3	9.48668E-2	2.73635E1	-3.26868E1	-3.2603E1	2.68274E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.11597E-2	-8.80027E1	-7.86781E-4	-8.80008E1	3.8147E-4	4.72069E-3	9.52959E-2	2.73634E1	-3.26939E1	-3.26176E1	2.68797E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
