[Scan]
initial_time=2016-01-18T20:54:51
final_time=2016-01-18T20:55:11
ip_count=19
run=1024
dataset=7
scan=531
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.79814E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.05385E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.38177E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.25604E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.59314E-8
mult1=-1.74825E-8
mult2=-2.86632E-9
rf_tmon=-2.57176E-3
rf_agc=3.62536E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.4661E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65504E0
bslens_imon=2.52837E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19658E1
lens5a_imon=1.9997E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=2.81151E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04553E1
cs_ea1_imon=2.55542E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99615E0
lens1_imon=1.62849E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03586E1
cs_ea2_imon=1.48108E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84514E1
cs_ef1a_imon=2.93188E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.30039E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.28013E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15061E1
os_ea1_imon=2.38169E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.06559E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25822E0
cs_ionrep_imon=1.18357E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=2.95747E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.98665E-8
tplens_vset=1.4E-1
tplens_vmon=1.65857E0
tplens_imon=-2.77784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26615E1
iondef3_imon=1.49687E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.54719E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98147E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=8.73482E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30474E0
ionrepsh_imon=1.75875E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33578E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46146E0
os_ea2_imon=-6.70792E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26856E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.41698E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.2901E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.2374E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.09248E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68526E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.01826E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.65562E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.52782E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.53095E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.19032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.32159E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42194E0
defgridb_imon=6.07278E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.43417E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06951E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64717E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.95146E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6251E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66263E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.89647E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.45848E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22448E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19705E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.44275E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.037E3	1.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80023E1	-4.29153E-4	-8.80007E1	5.48363E-4	4.43459E-3	9.49383E-2	2.73423E1	-3.26614E1	-3.26095E1	2.68256E1	1.20031E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.03081E-1
2.0E0	1.06212E5	1.07E2	3.16E2	1.6E2	-7.20871E-2	-8.80028E1	-7.86781E-4	-8.80007E1	8.58307E-4	4.60148E-3	9.46283E-2	2.73247E1	-3.26517E1	-3.26107E1	2.68502E1	1.20466E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0071E-1
3.0E0	2.7E1	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80028E1	-6.91414E-4	-8.80009E1	7.86781E-4	4.91142E-3	9.49383E-2	2.73163E1	-3.26638E1	-3.26048E1	2.68298E1	1.20244E-7	2.5225E-3	2.5225E-3	6.32418E-3	2.99613E-1
4.0E0	2.3016E4	1.4E1	6.55E2	3.98E2	-7.23189E-2	-8.80024E1	-4.52995E-4	-8.80006E1	7.86781E-4	4.81606E-3	9.4986E-2	2.73045E1	-3.26585E1	-3.26278E1	2.68256E1	1.19902E-7	2.52599E-3	2.52599E-3	6.33436E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80026E1	-3.57628E-4	-8.80006E1	5.24521E-4	4.81606E-3	9.51529E-2	2.72979E1	-3.2629E1	-3.26404E1	2.68563E1	1.2026E-7	2.52169E-3	2.52169E-3	6.28056E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80026E1	-4.76837E-4	-8.80006E1	5.24521E-4	4.673E-3	9.51767E-2	2.73249E1	-3.26296E1	-3.26194E1	2.68298E1	1.20122E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80026E1	-6.4373E-4	-8.80006E1	4.52995E-4	4.57764E-3	9.50336E-2	2.73104E1	-3.26626E1	-3.26042E1	2.68412E1	1.20487E-7	2.52867E-3	2.52867E-3	6.32936E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80028E1	-1.00136E-3	-8.80007E1	4.52995E-4	4.74453E-3	9.49383E-2	2.73321E1	-3.26669E1	-3.26374E1	2.68833E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
1.2E1	1.02E2	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80031E1	-6.4373E-4	-8.80007E1	5.24521E-4	4.55379E-3	9.51767E-2	2.73442E1	-3.26693E1	-3.26422E1	2.68418E1	1.20158E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80031E1	-7.86781E-4	-8.80007E1	3.8147E-4	4.62532E-3	9.5129E-2	2.73556E1	-3.26885E1	-3.26603E1	2.68292E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00563E-1
1.4E1	3.309E3	4.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80034E1	-6.91414E-4	-8.80007E1	2.86102E-4	4.81606E-3	9.52482E-2	2.73175E1	-3.26236E1	-3.26077E1	2.6836E1	1.19965E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00824E-1
1.5E1	9.4E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.8003E1	-9.53674E-4	-8.80005E1	4.52995E-4	4.60148E-3	9.53674E-2	2.73363E1	-3.26719E1	-3.26303E1	2.68424E1	1.19965E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.00302E-1
1.6E1	4.69E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.8003E1	-1.0252E-3	-8.80004E1	3.33786E-4	4.31538E-3	9.53436E-2	2.73213E1	-3.26506E1	-3.26224E1	2.68575E1	1.19809E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.02133E-1
1.7E1	8.78E2	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80028E1	-9.77516E-4	-8.80005E1	5.48363E-4	4.33922E-3	9.53197E-2	2.7329E1	-3.2663E1	-3.26556E1	2.68476E1	1.19809E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.02659E-1
1.8E1	3.8E3	3.0E0	7.27E2	5.0E2	-7.201E-2	-8.80026E1	-1.04904E-3	-8.80009E1	4.52995E-4	4.45843E-3	9.53674E-2	2.73146E1	-3.26909E1	-3.26362E1	2.6855E1	1.20226E-7	2.51679E-3	2.51679E-3	6.323E-3	3.00494E-1
1.9E1	2.051E3	0.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80028E1	-1.23978E-3	-8.80005E1	5.48363E-4	4.74453E-3	9.53436E-2	2.73189E1	-3.26879E1	-3.26482E1	2.68454E1	1.1984E-7	2.5199E-3	2.5199E-3	6.33648E-3	3.01193E-1
2.0E1	2.625E4	1.0E1	8.08E2	5.58E2	-7.17779E-2	-8.80027E1	-1.19209E-3	-8.80005E1	2.86102E-4	4.50611E-3	9.50336E-2	2.73458E1	-3.26797E1	-3.26136E1	2.67998E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9926E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80028E1	-4.29153E-4	-8.80008E1	5.96046E-4	4.76837E-3	9.52482E-2	2.73312E1	-3.26967E1	-3.26243E1	2.68354E1	1.20209E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00453E-1
2.2E1	1.811E3	1.0E0	8.89E2	6.17E2	-7.09279E-2	-8.80033E1	-7.62939E-4	-8.80003E1	6.91414E-4	4.52995E-3	9.5129E-2	2.73448E1	-3.26579E1	-3.26146E1	2.68142E1	1.19841E-7	2.51919E-3	2.51919E-3	6.29684E-3	3.006E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80028E1	-9.29832E-4	-8.80007E1	1.43051E-4	4.88758E-3	9.50336E-2	2.73057E1	-3.26795E1	-3.26615E1	2.68526E1	1.19705E-7	2.51116E-3	2.51116E-3	6.29098E-3	3.01609E-1
