[Scan]
initial_time=2016-01-18T20:55:18
final_time=2016-01-18T20:55:38
ip_count=19
run=1024
dataset=7
scan=532
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.74954E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.45928E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.41394E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.19915E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.59597E-8
mult1=-1.61821E-8
mult2=-2.75654E-9
rf_tmon=-9.01862E-3
rf_agc=2.73313E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=5.53381E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67506E0
bslens_imon=2.30258E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19382E1
lens5a_imon=1.972E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53847E1
cs_ef1b_imon=2.79729E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04528E1
cs_ea1_imon=2.5468E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96871E0
lens1_imon=1.75043E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64875E1
os_ef1alow_imon=2.97279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.5048E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.91997E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.29765E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.27566E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.154E1
os_ea1_imon=2.37372E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6356E1
os_ef1bup_imon=3.07079E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21375E0
cs_ionrep_imon=1.18661E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91958E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.95437E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=4.00006E-8
tplens_vset=1.4E-1
tplens_vmon=1.68921E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25569E1
iondef3_imon=1.49029E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.55293E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98233E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=9.08411E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31168E0
ionrepsh_imon=1.7699E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33787E1
lens5b_imon=2.17552E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12292E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48216E0
os_ea2_imon=-6.3867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.0064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71518E1
cs_ef2a_imon=3.15594E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03139E0
os_ef2alow_imon=-2.48423E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95493E-1
os_ef2bup_imon=-5.2401E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11355E1
os_restr2_imon=3.41762E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.27521E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.25237E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73658E1
iondef1_imon=1.10343E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68773E1
iondef4_imon=1.08677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.01971E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.65145E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16142E0
cs_ionaccel_imon=-1.80308E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47445E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5666E1
einzel_imon=7.66351E-6
window_vset=0.0E0
window_vmon=2.72711E-1
window_imon=-9.20362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.8628E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.37101E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.69852E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53548E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.42026E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07277E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64703E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30912E1
cs_fil1_imon=9.95667E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62221E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66125E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.81309E-2
os_fil2_imon=-2.7329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86023E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.62028E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.57651E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.94483E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2243E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.02647E-1
res40_imon=-2.53288E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.03E3	0.0E0	1.47E2	4.1E1	-7.10825E-2	-8.80024E1	-5.48363E-4	-8.80007E1	3.09944E-4	4.52995E-3	9.53436E-2	2.73117E1	-3.26885E1	-3.26434E1	2.68418E1	1.19953E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.00453E-1
2.0E0	1.05949E5	1.07E2	3.16E2	1.6E2	-7.12368E-2	-8.80025E1	-3.57628E-4	-8.80007E1	3.09944E-4	4.8399E-3	9.4986E-2	2.73124E1	-3.26603E1	-3.26327E1	2.68094E1	1.19861E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80022E1	-2.86102E-4	-8.80007E1	1.66893E-4	4.64916E-3	9.52482E-2	2.7337E1	-3.26695E1	-3.26133E1	2.68668E1	1.20297E-7	2.5225E-3	2.5225E-3	6.32418E-3	2.99879E-1
4.0E0	2.3595E4	1.8E1	6.55E2	3.98E2	-7.25507E-2	-8.80025E1	-5.00679E-4	-8.80006E1	5.00679E-4	4.55379E-3	9.50575E-2	2.73225E1	-3.26332E1	-3.26386E1	2.68514E1	1.1974E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80025E1	-5.00679E-4	-8.80006E1	5.72205E-4	4.52995E-3	9.51052E-2	2.73411E1	-3.2629E1	-3.26194E1	2.67944E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80026E1	-1.66893E-4	-8.80004E1	7.39098E-4	4.81606E-3	9.5129E-2	2.73246E1	-3.2659E1	-3.2636E1	2.68593E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80026E1	-4.52995E-4	-8.80007E1	6.4373E-4	4.43459E-3	9.4986E-2	2.73263E1	-3.26767E1	-3.2639E1	2.6865E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00069E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80025E1	-3.33786E-4	-8.80005E1	6.19888E-4	4.45843E-3	9.49383E-2	2.72925E1	-3.26549E1	-3.25996E1	2.68304E1					
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80022E1	-1.43051E-4	-8.80007E1	4.29153E-4	4.26769E-3	9.52005E-2	2.73449E1	-3.2697E1	-3.25715E1	2.685E1	1.20278E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.97963E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.80024E1	-8.58307E-4	-8.80006E1	6.91414E-4	4.3869E-3	9.52244E-2	2.73472E1	-3.26573E1	-3.26236E1	2.68238E1	1.20191E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.00676E-1
1.4E1	3.401E3	6.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80021E1	-1.04904E-3	-8.80007E1	2.14577E-4	4.8399E-3	9.50336E-2	2.73145E1	-3.26402E1	-3.26154E1	2.6834E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
1.5E1	1.07E2	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80026E1	-6.67572E-4	-8.80005E1	5.24521E-4	4.43459E-3	9.51052E-2	2.73234E1	-3.26667E1	-3.26484E1	2.68551E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.02511E-1
1.6E1	4.88E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80023E1	-4.29153E-4	-8.80003E1	3.8147E-4	4.43459E-3	9.5439E-2	2.73399E1	-3.26813E1	-3.25984E1	2.67932E1	1.20158E-7	2.52599E-3	2.52599E-3	6.31278E-3	2.99686E-1
1.7E1	8.87E2	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80024E1	-6.67572E-4	-8.80005E1	3.09944E-4	4.57764E-3	9.52721E-2	2.73257E1	-3.26697E1	-3.26266E1	2.68202E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9943E-1
1.8E1	3.851E3	1.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80027E1	-1.07288E-3	-8.80003E1	5.48363E-4	4.673E-3	9.52244E-2	2.73435E1	-3.26843E1	-3.26332E1	2.68268E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.9926E-1
1.9E1	2.123E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80026E1	-5.96046E-4	-8.80003E1	4.76837E-4	4.98295E-3	9.52959E-2	2.73309E1	-3.26362E1	-3.26374E1	2.68123E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
2.0E1	2.6417E4	1.8E1	8.08E2	5.58E2	-7.32464E-2	-8.80028E1	-7.86781E-4	-8.80004E1	4.52995E-4	4.98295E-3	9.51529E-2	2.7321E1	-3.26579E1	-3.2639E1	2.68665E1	1.19653E-7	2.5199E-3	2.5199E-3	6.28552E-3	2.9926E-1
2.1E1	6.4E1	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80027E1	-6.91414E-4	-8.80007E1	4.05312E-4	4.86374E-3	9.50575E-2	2.73257E1	-3.26514E1	-3.26301E1	2.68736E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
2.2E1	1.883E3	1.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80024E1	-4.52995E-4	-8.80006E1	5.96046E-4	5.05447E-3	9.54628E-2	2.72756E1	-3.26472E1	-3.26248E1	2.6846E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9943E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80026E1	-4.29153E-4	-8.80006E1	5.48363E-4	5.22137E-3	9.50098E-2	2.73658E1	-3.26735E1	-3.25569E1	2.68773E1	1.19902E-7	2.51203E-3	2.51203E-3	6.34518E-3	2.98665E-1
