[Scan]
initial_time=2016-01-18T20:56:12
final_time=2016-01-18T20:56:31
ip_count=19
run=1024
dataset=7
scan=534
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.82557E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.00033E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.39565E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.30759E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.5924E-8
mult1=-1.65554E-8
mult2=-3.25955E-9
rf_tmon=-6.97581E-3
rf_agc=2.97106E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.26845E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66728E0
bslens_imon=2.34104E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1907E1
lens5a_imon=1.98978E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54048E1
cs_ef1b_imon=2.80213E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.0218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05055E1
cs_ea1_imon=2.55763E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97656E0
lens1_imon=1.50361E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64633E1
os_ef1alow_imon=2.97578E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03923E1
cs_ea2_imon=1.52846E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84519E1
cs_ef1a_imon=2.93012E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.29869E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.28045E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15006E1
os_ea1_imon=2.37434E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63436E1
os_ef1bup_imon=3.08058E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.227E0
cs_ionrep_imon=1.19752E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9196E2
cs_nozzle_imon=1.93258E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02021E1
cs_anode1_imon=2.94734E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.9925E-8
tplens_vset=1.4E-1
tplens_vmon=1.62613E0
tplens_imon=-1.08828E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25401E1
iondef3_imon=1.50569E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27281E1
iondef2_imon=1.54572E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02989E2
lens6_imon=2.98177E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=8.92305E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26495E0
ionrepsh_imon=1.74186E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33119E1
lens5b_imon=2.18555E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74788E1
cs_ef2b_imon=3.12137E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49574E0
os_ea2_imon=-8.14038E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00729E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71345E1
cs_ef2a_imon=3.15318E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07764E0
os_ef2alow_imon=-2.49198E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04493E-1
os_ef2bup_imon=-5.34382E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11142E1
os_restr2_imon=3.41067E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.27394E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.23625E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74367E1
iondef1_imon=1.11452E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.08241E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.01964E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.65064E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13201E0
cs_ionaccel_imon=-1.81083E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47395E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56312E1
einzel_imon=7.76269E-6
window_vset=0.0E0
window_vmon=2.69369E-1
window_imon=-7.2548E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39144E-4
mask2_vset=0.0E0
mask2_vmon=-1.86107E1
mask2_imon=-7.03025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.84315E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=5.83771E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.47219E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31469E0
defgridb_imon=6.30418E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33352E1
os_fil1_imon=9.42264E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07229E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64547E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.95378E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62652E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66035E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.89647E-2
os_fil2_imon=-2.66874E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90345E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.68568E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35433E-1
cs_fil2_imon=-2.92448E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22335E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32626E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52115E-3
foreline_cvt_pmon=2.52115E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.05543E-1
res40_imon=-2.48824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.044E3	4.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80025E1	-6.19888E-4	-8.80008E1	4.05312E-4	4.62532E-3	9.54866E-2	2.7344E1	-3.26785E1	-3.26225E1	2.68343E1	1.20031E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.03349E-1
2.0E0	1.06223E5	8.0E1	3.16E2	1.6E2	-7.27828E-2	-8.80025E1	-4.76837E-4	-8.80007E1	4.76837E-4	4.673E-3	9.53197E-2	2.73357E1	-3.26978E1	-3.26166E1	2.68756E1	1.198E-7	2.52815E-3	2.52815E-3	6.33436E-3	3.01995E-1
3.0E0	1.0E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80026E1	-7.39098E-4	-8.80005E1	4.76837E-4	4.74453E-3	9.50575E-2	2.7348E1	-3.26926E1	-3.25808E1	2.68209E1	1.19829E-7	2.51498E-3	2.51498E-3	6.34164E-3	3.00522E-1
4.0E0	2.316E4	1.7E1	6.55E2	3.98E2	-7.21643E-2	-8.80027E1	-5.48363E-4	-8.80008E1	4.05312E-4	4.93526E-3	9.52244E-2	2.73219E1	-3.26482E1	-3.26242E1	2.68328E1	1.20092E-7	2.52025E-3	2.52025E-3	6.2863E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80028E1	-9.05991E-4	-8.80006E1	5.00679E-4	4.57764E-3	9.50098E-2	2.72793E1	-3.26512E1	-3.26092E1	2.68478E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80028E1	-5.48363E-4	-8.8001E1	5.24521E-4	4.69685E-3	9.49383E-2	2.73093E1	-3.26579E1	-3.2626E1	2.68538E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80029E1	-5.00679E-4	-8.80007E1	6.4373E-4	4.50611E-3	9.50098E-2	2.73086E1	-3.26655E1	-3.26408E1	2.68922E1	1.2026E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80031E1	-7.86781E-4	-8.8001E1	7.62939E-4	4.64916E-3	9.49383E-2	2.73351E1	-3.26741E1	-3.26332E1	2.68124E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00302E-1
1.2E1	9.4E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80026E1	-5.24521E-4	-8.80008E1	8.34465E-4	4.74453E-3	9.50575E-2	2.73015E1	-3.26482E1	-3.2647E1	2.68749E1	1.19697E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01995E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80029E1	-2.6226E-4	-8.80007E1	3.57628E-4	4.74453E-3	9.52005E-2	2.73309E1	-3.26302E1	-3.26452E1	2.68454E1	1.19978E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.0041E-1
1.4E1	3.409E3	2.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80026E1	-3.57628E-4	-8.80006E1	5.00679E-4	4.74453E-3	9.53674E-2	2.73305E1	-3.26378E1	-3.26614E1	2.68815E1	1.198E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.98665E-1
1.5E1	1.07E2	1.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80025E1	-6.91414E-4	-8.80007E1	5.72205E-4	4.48227E-3	9.52005E-2	2.73425E1	-3.26669E1	-3.2621E1	2.68446E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9952E-1
1.6E1	4.5E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80026E1	-8.58307E-4	-8.8001E1	8.58307E-4	4.33922E-3	9.53197E-2	2.73193E1	-3.2649E1	-3.26537E1	2.68153E1	1.19937E-7	2.51657E-3	2.51657E-3	6.31196E-3	2.99116E-1
1.7E1	8.93E2	0.0E0	6.87E2	4.7E2	-7.13915E-2	-8.80027E1	-6.67572E-4	-8.80008E1	5.00679E-4	4.62532E-3	9.5129E-2	2.73117E1	-3.262E1	-3.2632E1	2.68016E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00966E-1
1.8E1	3.809E3	6.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80025E1	-1.14441E-3	-8.80009E1	4.29153E-4	4.76837E-3	9.4986E-2	2.73309E1	-3.26819E1	-3.26068E1	2.68508E1	1.19705E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.9952E-1
1.9E1	2.046E3	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80024E1	-8.34465E-4	-8.80007E1	2.86102E-4	4.79221E-3	9.5439E-2	2.73273E1	-3.26603E1	-3.26645E1	2.68346E1	1.20122E-7	2.51334E-3	2.51334E-3	6.34588E-3	3.02133E-1
2.0E1	2.6254E4	9.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80027E1	-6.91414E-4	-8.80005E1	2.14577E-4	4.86374E-3	9.51529E-2	2.73009E1	-3.26699E1	-3.26098E1	2.68322E1	1.20311E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.0071E-1
2.1E1	4.5E1	1.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80028E1	-7.15256E-4	-8.80004E1	1.90735E-4	4.69685E-3	9.52482E-2	2.73069E1	-3.26685E1	-3.26054E1	2.68172E1	1.2035E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.01209E-1
2.2E1	1.895E3	1.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80027E1	-8.82149E-4	-8.80007E1	4.29153E-4	4.41074E-3	9.48906E-2	2.73163E1	-3.26378E1	-3.26278E1	2.6836E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80028E1	-8.82149E-4	-8.8001E1	3.57628E-4	4.74453E-3	9.52721E-2	2.74367E1	-3.27281E1	-3.25401E1	2.68442E1	1.20055E-7	2.52115E-3	2.52115E-3	6.32626E-3	3.0148E-1
