[Scan]
initial_time=2016-01-18T20:57:59
final_time=2016-01-18T20:58:18
ip_count=19
run=1024
dataset=7
scan=538
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.82522E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.05123E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.39569E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.23753E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.59421E-8
mult1=-2.47375E-8
mult2=-2.83497E-9
rf_tmon=-2.68084E-4
rf_agc=3.76449E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=5.85663E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.53415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19334E1
lens5a_imon=2.00182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04786E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53898E1
cs_ef1b_imon=2.82533E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04483E1
cs_ea1_imon=2.54328E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02994E0
lens1_imon=1.45266E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64621E1
os_ef1alow_imon=2.9552E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.50686E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84413E1
cs_ef1a_imon=2.92189E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.29796E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11965E1
os_restr1_imon=4.255E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15041E1
os_ea1_imon=2.37709E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63286E1
os_ef1bup_imon=3.08582E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20043E0
cs_ionrep_imon=1.19287E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02102E1
cs_anode1_imon=2.96418E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=4.00505E-8
tplens_vset=1.4E-1
tplens_vmon=1.6889E0
tplens_imon=-1.55148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27039E1
iondef3_imon=1.4928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26685E1
iondef2_imon=1.56562E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.9796E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=8.97908E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25991E0
ionrepsh_imon=1.7556E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33592E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7447E1
cs_ef2b_imon=3.12811E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49363E0
os_ea2_imon=-8.76138E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.005E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71289E1
cs_ef2a_imon=3.15168E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06267E0
os_ef2alow_imon=-2.63045E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72058E-1
os_ef2bup_imon=-5.32137E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11485E1
os_restr2_imon=3.42676E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.28847E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.2385E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72296E1
iondef1_imon=1.09842E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68617E1
iondef4_imon=1.09851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.03964E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.64642E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12827E0
cs_ionaccel_imon=-1.56756E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56324E1
einzel_imon=7.67287E-6
window_vset=0.0E0
window_vmon=2.28824E-1
window_imon=-8.48986E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39151E-4
mask2_vset=0.0E0
mask2_vmon=-1.86257E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.39362E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.58611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.36839E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34743E0
defgridb_imon=5.97688E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.40992E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07211E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64643E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30865E1
cs_fil1_imon=9.95465E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63208E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66144E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73148E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80364E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.51897E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35164E-1
cs_fil2_imon=-2.23834E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.18691E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22204E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.52325E-1
res40_imon=-2.68285E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.067E3	2.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80026E1	-9.53674E-4	-8.80005E1	5.72205E-4	4.93526E-3	9.48906E-2	2.73147E1	-3.26152E1	-3.26482E1	2.68221E1	1.20297E-7	2.51359E-3	2.51359E-3	6.3074E-3	3.00676E-1
2.0E0	1.05228E5	9.2E1	3.16E2	1.6E2	-7.20871E-2	-8.80029E1	-8.34465E-4	-8.80004E1	4.52995E-4	4.673E-3	9.49383E-2	2.73149E1	-3.26591E1	-3.26309E1	2.68026E1	1.20004E-7	2.50882E-3	2.50882E-3	6.32356E-3	2.99175E-1
3.0E0	2.7E1	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.8003E1	-7.62939E-4	-8.80007E1	3.8147E-4	4.91142E-3	9.47952E-2	2.73335E1	-3.26642E1	-3.26208E1	2.68806E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.97499E-1
4.0E0	2.3218E4	1.5E1	6.55E2	3.98E2	-7.27828E-2	-8.8003E1	-7.15256E-4	-8.80008E1	5.48363E-4	4.673E-3	9.4986E-2	2.7349E1	-3.26885E1	-3.26044E1	2.6855E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80029E1	-9.29832E-4	-8.80006E1	6.67572E-4	4.55379E-3	9.47475E-2	2.72901E1	-3.26134E1	-3.26008E1	2.684E1	1.20226E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80026E1	-6.67572E-4	-8.80006E1	5.00679E-4	4.72069E-3	9.4676E-2	2.73339E1	-3.26723E1	-3.26242E1	2.68238E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80027E1	-5.96046E-4	-8.80006E1	3.09944E-4	4.45843E-3	9.46999E-2	2.73253E1	-3.26254E1	-3.26156E1	2.68773E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80027E1	-7.62939E-4	-8.80007E1	6.4373E-4	4.74453E-3	9.48191E-2	2.72921E1	-3.26089E1	-3.2652E1	2.68412E1	1.20226E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.98481E-1
1.2E1	1.03E2	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80028E1	-4.29153E-4	-8.80004E1	4.05312E-4	4.48227E-3	9.48191E-2	2.72949E1	-3.26663E1	-3.2614E1	2.68466E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99175E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.13143E-2	-8.80027E1	-5.24521E-4	-8.80009E1	6.4373E-4	4.76837E-3	9.50575E-2	2.73189E1	-3.26618E1	-3.26456E1	2.68087E1	1.19916E-7	2.51974E-3	2.51974E-3	6.31474E-3	2.99802E-1
1.4E1	3.463E3	4.0E0	5.66E2	3.82E2	-7.13143E-2	-8.80024E1	-8.10623E-4	-8.80006E1	5.96046E-4	4.48227E-3	9.51529E-2	2.73457E1	-3.26915E1	-3.26191E1	2.6845E1					
1.5E1	8.6E1	0.0E0	6.06E2	4.11E2	-7.12368E-2	-8.80024E1	-7.39098E-4	-8.80006E1	5.48363E-4	4.76837E-3	9.4986E-2	2.73678E1	-3.26419E1	-3.25755E1	2.67758E1	1.20403E-7	2.51581E-3	2.51581E-3	6.34099E-3	3.00676E-1
1.6E1	4.71E2	0.0E0	6.47E2	4.41E2	-7.14689E-2	-8.80027E1	-5.72205E-4	-8.80006E1	5.24521E-4	4.55379E-3	9.52959E-2	2.73237E1	-3.26585E1	-3.26392E1	2.68238E1	1.20101E-7	2.52647E-3	2.52647E-3	6.32057E-3	3.00197E-1
1.7E1	9.52E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80027E1	-7.62939E-4	-8.80007E1	4.76837E-4	4.24385E-3	9.52005E-2	2.73171E1	-3.26362E1	-3.26741E1	2.68803E1	1.20031E-7	2.51025E-3	2.51025E-3	6.31858E-3	3.00144E-1
1.8E1	3.85E3	2.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80029E1	-8.58307E-4	-8.80007E1	4.52995E-4	4.45843E-3	9.52005E-2	2.7349E1	-3.26615E1	-3.26218E1	2.6836E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00041E-1
1.9E1	2.037E3	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80024E1	-6.19888E-4	-8.80007E1	6.67572E-4	4.55379E-3	9.52721E-2	2.73136E1	-3.26533E1	-3.26323E1	2.68534E1	1.19851E-7	2.51417E-3	2.51417E-3	6.2752E-3	3.00966E-1
2.0E1	2.6178E4	1.2E1	8.08E2	5.58E2	-7.27828E-2	-8.80025E1	-3.8147E-4	-8.80009E1	3.33786E-4	4.31538E-3	9.51529E-2	2.73146E1	-3.26356E1	-3.26445E1	2.67895E1	1.1988E-7	2.51472E-3	2.51472E-3	6.3074E-3	3.00247E-1
2.1E1	5.9E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80027E1	-4.05312E-4	-8.80008E1	4.05312E-4	4.22001E-3	9.52005E-2	2.73517E1	-3.26567E1	-3.26567E1	2.68454E1	1.20337E-7	2.51642E-3	2.51642E-3	6.35984E-3	3.01748E-1
2.2E1	1.876E3	1.0E0	8.89E2	6.17E2	-7.201E-2	-8.80024E1	-6.91414E-4	-8.80009E1	7.15256E-5	4.3869E-3	9.4986E-2	2.73145E1	-3.27275E1	-3.26065E1	2.67856E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80027E1	-5.96046E-4	-8.80006E1	1.90735E-4	4.31538E-3	9.48191E-2	2.72296E1	-3.26685E1	-3.27039E1	2.68617E1	1.20055E-7	2.51632E-3	2.51632E-3	6.34518E-3	2.99686E-1
