[Scan]
initial_time=2016-01-18T20:58:25
final_time=2016-01-18T20:58:45
ip_count=19
run=1024
dataset=7
scan=539
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.7596E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.05123E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.36993E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.22802E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.59559E-8
mult1=-2.15858E-8
mult2=-3.50921E-9
rf_tmon=8.48191E-7
rf_agc=3.95659E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=5.28204E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.37913E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=2.0029E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05215E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53968E1
cs_ef1b_imon=2.81536E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04525E1
cs_ea1_imon=2.56311E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00951E0
lens1_imon=1.44906E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64637E1
os_ef1alow_imon=2.9575E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.47802E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=2.92031E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.29886E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11407E1
os_restr1_imon=4.25863E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.39764E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63832E1
os_ef1bup_imon=3.07392E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.18169E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9196E2
cs_nozzle_imon=1.93557E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01879E1
cs_anode1_imon=2.95333E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=4.00223E-8
tplens_vset=1.4E-1
tplens_vmon=1.64744E0
tplens_imon=-1.33518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26625E1
iondef3_imon=1.49532E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27396E1
iondef2_imon=1.56742E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98173E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=9.11212E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=1.77182E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74785E1
cs_ef2b_imon=3.13578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52547E0
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.1542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06151E0
os_ef2alow_imon=-2.50508E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05919E-1
os_ef2bup_imon=-5.42429E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11118E1
os_restr2_imon=3.4138E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.28378E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01757E1
cs_anode2_imon=2.23604E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73665E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.09337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=4.98345E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.64649E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12435E0
cs_ionaccel_imon=-1.86563E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.8894E-6
window_vset=0.0E0
window_vmon=2.28112E-1
window_imon=-7.88302E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86286E1
mask2_imon=-6.45817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.67481E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.23283E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.07278E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38051E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.41876E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0715E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64969E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30889E1
cs_fil1_imon=9.95649E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62997E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66293E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.54176E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86023E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.3978E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.40275E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.63988E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22465E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.23498E-1
res40_imon=-2.49465E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.013E3	0.0E0	1.47E2	4.1E1	-7.17007E-2	-8.80023E1	-1.0252E-3	-8.80007E1	3.8147E-4	4.52995E-3	9.48429E-2	2.7337E1	-3.26478E1	-3.26319E1	2.68418E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00966E-1
2.0E0	1.0566E5	9.6E1	3.16E2	1.6E2	-7.07733E-2	-8.80028E1	-7.39098E-4	-8.80007E1	4.76837E-4	3.98159E-3	9.46999E-2	2.73131E1	-3.26432E1	-3.26156E1	2.68569E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01223E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80024E1	-1.09673E-3	-8.80004E1	7.86781E-4	4.07696E-3	9.47237E-2	2.73423E1	-3.26573E1	-3.26242E1	2.68575E1	1.20084E-7	2.51915E-3	2.51915E-3	6.33538E-3	3.00942E-1
4.0E0	2.3158E4	1.1E1	6.55E2	3.98E2	-7.10051E-2	-8.80024E1	-1.0252E-3	-8.80004E1	5.96046E-4	4.14848E-3	9.5129E-2	2.73435E1	-3.26873E1	-3.26152E1	2.67806E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9978E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80024E1	-8.10623E-4	-8.80005E1	7.39098E-4	4.36306E-3	9.48191E-2	2.73387E1	-3.26699E1	-3.26182E1	2.68376E1	1.20363E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.11597E-2	-8.80025E1	-8.58307E-4	-8.80006E1	4.76837E-4	4.29153E-3	9.52005E-2	2.73057E1	-3.26585E1	-3.26272E1	2.68406E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10051E-2	-8.80025E1	-6.91414E-4	-8.80003E1	4.05312E-4	4.33922E-3	9.48429E-2	2.73411E1	-3.26561E1	-3.26189E1	2.68382E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.97445E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80025E1	-7.62939E-4	-8.80005E1	3.57628E-4	4.8399E-3	9.48191E-2	2.73296E1	-3.27007E1	-3.26309E1	2.68418E1	1.20383E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.97963E-1
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.13915E-2	-8.80027E1	-5.72205E-4	-8.80002E1	2.86102E-4	4.74453E-3	9.49144E-2	2.73285E1	-3.26434E1	-3.26074E1	2.68322E1	1.20137E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.02277E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.13143E-2	-8.80026E1	-4.76837E-4	-8.80005E1	1.19209E-4	4.36306E-3	9.52482E-2	2.73592E1	-3.26831E1	-3.2617E1	2.68166E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.4E1	3.445E3	4.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80026E1	-7.62939E-4	-8.80005E1	-4.76837E-5	4.673E-3	9.50575E-2	2.73228E1	-3.26602E1	-3.26343E1	2.68629E1	1.1983E-7	2.51214E-3	2.51214E-3	6.31012E-3	3.02194E-1
1.5E1	9.9E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80029E1	-6.67572E-4	-8.80006E1	5.00679E-4	4.60148E-3	9.51767E-2	2.73124E1	-3.26462E1	-3.26554E1	2.68454E1					
1.6E1	4.52E2	1.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80026E1	-9.53674E-5	-8.80005E1	5.00679E-4	4.22001E-3	9.5129E-2	2.73246E1	-3.26467E1	-3.25806E1	2.68319E1	1.20226E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.02922E-1
1.7E1	9.64E2	1.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80027E1	-1.90735E-4	-8.80006E1	4.05312E-4	4.45843E-3	9.53436E-2	2.73165E1	-3.26615E1	-3.2608E1	2.68028E1	1.19953E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.03804E-1
1.8E1	3.825E3	4.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80026E1	-3.33786E-4	-8.80008E1	6.4373E-4	4.98295E-3	9.53197E-2	2.73231E1	-3.2653E1	-3.25966E1	2.68519E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9952E-1
1.9E1	2.004E3	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80026E1	-6.19888E-4	-8.80005E1	2.86102E-4	4.64916E-3	9.52244E-2	2.73069E1	-3.26661E1	-3.26284E1	2.68262E1	1.19872E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00942E-1
2.0E1	2.621E4	1.2E1	8.08E2	5.58E2	-7.18554E-2	-8.80026E1	-5.72205E-4	-8.80005E1	2.86102E-4	4.79221E-3	9.51052E-2	2.73321E1	-3.26518E1	-3.25816E1	2.68232E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99175E-1
2.1E1	6.4E1	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80027E1	-6.91414E-4	-8.80005E1	3.33786E-4	4.74453E-3	9.53436E-2	2.73242E1	-3.26463E1	-3.25814E1	2.68377E1	1.19851E-7	2.51203E-3	2.51203E-3	6.29665E-3	2.9943E-1
2.2E1	1.857E3	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80026E1	-6.19888E-4	-8.80006E1	4.05312E-4	4.64916E-3	9.52005E-2	2.73004E1	-3.26431E1	-3.26585E1	2.68389E1	1.20192E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.02368E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80028E1	-7.15256E-4	-8.80005E1	1.66893E-4	4.50611E-3	9.4986E-2	2.73665E1	-3.27396E1	-3.26625E1	2.68076E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
