[Scan]
initial_time=2016-01-18T20:59:45
final_time=2016-01-18T21:00:05
ip_count=19
run=1024
dataset=7
scan=542
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.80282E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.00212E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.39881E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.17646E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.59022E-8
mult1=-1.53633E-8
mult2=-1.89023E-9
rf_tmon=-9.63747E-3
rf_agc=2.76137E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=5.54347E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.18932E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=2.00669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=2.79097E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04581E1
cs_ea1_imon=2.56733E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00234E0
lens1_imon=1.35756E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03637E1
cs_ea2_imon=1.48852E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.92071E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.29731E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.27725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=2.38257E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22614E0
cs_ionrep_imon=1.19793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91952E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=2.95423E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.99303E-8
tplens_vset=1.4E-1
tplens_vmon=1.65854E0
tplens_imon=-3.37821E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25677E1
iondef3_imon=1.48746E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25785E1
iondef2_imon=1.54656E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98141E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=9.01032E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28336E0
ionrepsh_imon=1.77025E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.11821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48157E0
os_ea2_imon=-7.16537E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.15425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.44501E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11298E1
os_restr2_imon=3.41229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.28088E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.23704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.10449E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6847E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.00709E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8114E-1
olens1_imon=7.65272E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-8.39144E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.62939E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.93212E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=6.87549E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33173E0
defgridb_imon=5.99772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.42618E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0611E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64556E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=9.95525E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62396E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65966E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82575E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77892E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.65825E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22364E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.49391E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.034E3	3.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80028E1	-1.07288E-3	-8.80003E1	4.76837E-4	4.79221E-3	9.52721E-2	2.73748E1	-3.26999E1	-3.2611E1	2.68202E1	1.2026E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
2.0E0	1.05918E5	1.02E2	3.16E2	1.6E2	-7.22418E-2	-8.80029E1	-1.26362E-3	-8.80002E1	5.72205E-4	4.45843E-3	9.52005E-2	2.73105E1	-3.26591E1	-3.26897E1	2.68563E1	1.19965E-7	2.52977E-3	2.52977E-3	6.31837E-3	3.00041E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80028E1	-1.04904E-3	-8.80002E1	2.14577E-4	4.52995E-3	9.51052E-2	2.73075E1	-3.26597E1	-3.26314E1	2.68538E1	1.20069E-7	2.51116E-3	2.51116E-3	6.35692E-3	2.99E-1
4.0E0	2.342E4	8.0E0	6.55E2	3.98E2	-7.11597E-2	-8.80027E1	-9.29832E-4	-8.80003E1	5.72205E-4	4.72069E-3	9.54151E-2	2.73423E1	-3.26632E1	-3.26478E1	2.68285E1	1.19705E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80027E1	-1.09673E-3	-8.80004E1	5.48363E-4	4.55379E-3	9.50575E-2	2.73381E1	-3.27015E1	-3.26277E1	2.6829E1	1.20106E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80027E1	-8.82149E-4	-8.80005E1	2.38419E-4	4.50611E-3	9.51052E-2	2.73291E1	-3.26747E1	-3.26104E1	2.68244E1	1.20424E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.99014E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80027E1	-9.77516E-4	-8.80005E1	5.24521E-4	4.26769E-3	9.52482E-2	2.73057E1	-3.2632E1	-3.26326E1	2.68532E1	1.19895E-7	2.51758E-3	2.51758E-3	6.31321E-3	2.99811E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80028E1	-8.10623E-4	-8.80006E1	-1.66893E-4	4.33922E-3	9.52244E-2	2.73411E1	-3.26561E1	-3.26478E1	2.68154E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00824E-1
1.2E1	1.07E2	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80028E1	-9.77516E-4	-8.80006E1	1.43051E-4	4.74453E-3	9.52482E-2	2.73009E1	-3.26452E1	-3.26344E1	2.68178E1	1.19861E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00041E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80028E1	-9.77516E-4	-8.80003E1	2.86102E-4	4.76837E-3	9.50336E-2	2.73505E1	-3.26608E1	-3.26425E1	2.68106E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
1.4E1	3.36E3	1.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80029E1	-6.19888E-4	-8.80004E1	2.14577E-4	4.76837E-3	9.50813E-2	2.73303E1	-3.26428E1	-3.26536E1	2.68395E1	1.19902E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.02769E-1
1.5E1	9.4E1	0.0E0	6.06E2	4.11E2	-7.12368E-2	-8.80029E1	-8.82149E-4	-8.80006E1	5.48363E-4	4.31538E-3	9.49144E-2	2.73255E1	-3.26657E1	-3.2599E1	2.68184E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.02922E-1
1.6E1	4.53E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80029E1	-8.82149E-4	-8.80007E1	2.86102E-4	4.76837E-3	9.46999E-2	2.73003E1	-3.26392E1	-3.26284E1	2.68166E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02659E-1
1.7E1	9.12E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.8003E1	-7.62939E-4	-8.80006E1	4.29153E-4	4.60148E-3	9.49383E-2	2.73165E1	-3.26609E1	-3.26164E1	2.68052E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.03185E-1
1.8E1	3.802E3	3.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80029E1	-1.12057E-3	-8.80006E1	3.33786E-4	4.29153E-3	9.49383E-2	2.73493E1	-3.26472E1	-3.26036E1	2.6855E1	1.20017E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.02659E-1
1.9E1	2.133E3	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.80028E1	-8.82149E-4	-8.80009E1	3.33786E-4	4.69685E-3	9.50098E-2	2.73057E1	-3.26434E1	-3.26494E1	2.68226E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01738E-1
2.0E1	2.626E4	1.4E1	8.08E2	5.58E2	-7.37103E-2	-8.80031E1	-7.86781E-4	-8.80006E1	3.8147E-4	4.45843E-3	9.50336E-2	2.73165E1	-3.26446E1	-3.26831E1	2.681E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01347E-1
2.1E1	5.2E1	1.0E0	8.49E2	5.88E2	-7.16233E-2	-8.8003E1	-7.39098E-4	-8.80007E1	4.29153E-4	4.62532E-3	9.50336E-2	2.73303E1	-3.26771E1	-3.26188E1	2.68779E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01347E-1
2.2E1	1.849E3	2.0E0	8.89E2	6.17E2	-7.201E-2	-8.80034E1	-7.86781E-4	-8.80007E1	4.76837E-5	4.76837E-3	9.53436E-2	2.73328E1	-3.26431E1	-3.2629E1	2.6837E1	1.2033E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.01871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80028E1	-9.53674E-4	-8.80007E1	4.05312E-4	4.31538E-3	9.51529E-2	2.73045E1	-3.25785E1	-3.25677E1	2.6847E1	1.198E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.01223E-1
