[Scan]
initial_time=2016-01-18T21:01:05
final_time=2016-01-18T21:01:25
ip_count=19
run=1024
dataset=7
scan=545
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.75678E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-6.59764E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.36775E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.25468E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=1.5892E-8
mult1=-1.88385E-8
mult2=-3.58165E-9
rf_tmon=-1.81952E-3
rf_agc=3.66539E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.69463E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65137E0
bslens_imon=2.28228E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19664E1
lens5a_imon=1.99676E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04946E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.79349E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02235E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04339E1
cs_ea1_imon=2.55175E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9637E0
lens1_imon=1.46688E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03941E1
cs_ea2_imon=1.46932E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=2.91819E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.29733E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.27076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14516E1
os_ea1_imon=2.37802E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.0728E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22761E0
cs_ionrep_imon=1.19238E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9195E2
cs_nozzle_imon=1.93574E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.95639E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.99498E-8
tplens_vset=1.4E-1
tplens_vmon=1.64021E0
tplens_imon=-2.81457E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25818E1
iondef3_imon=1.51156E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27823E1
iondef2_imon=1.55858E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98034E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=8.88228E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25271E0
ionrepsh_imon=1.75214E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33915E1
lens5b_imon=2.17858E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48962E0
os_ea2_imon=-8.32403E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00395E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.15569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04975E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.41049E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.27724E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.24497E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74272E1
iondef1_imon=1.09395E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68232E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.04061E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.64932E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-1.73653E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56723E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.38947E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.34363E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.9396E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.15631E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39436E0
defgridb_imon=5.97361E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33319E1
os_fil1_imon=9.423E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07293E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64796E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=9.9502E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62834E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66198E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.7125E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.49657E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22355E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.97963E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.4E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.59893E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.03E3	0.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80027E1	-5.72205E-4	-8.80009E1	2.14577E-4	4.60148E-3	9.50098E-2	2.73328E1	-3.26661E1	-3.26189E1	2.68538E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.0041E-1
2.0E0	1.06506E5	1.15E2	3.16E2	1.6E2	-7.20871E-2	-8.80028E1	-5.24521E-4	-8.80008E1	5.48363E-4	4.69685E-3	9.51529E-2	2.73363E1	-3.26376E1	-3.26634E1	2.68334E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99941E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80027E1	-4.76837E-4	-8.80011E1	6.91414E-4	4.52995E-3	9.50336E-2	2.73202E1	-3.26689E1	-3.26098E1	2.68587E1	1.19872E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.0041E-1
4.0E0	2.3432E4	6.0E0	6.55E2	3.98E2	-7.30146E-2	-8.8003E1	-4.29153E-4	-8.80012E1	8.58307E-4	4.45843E-3	9.49383E-2	2.73381E1	-3.26579E1	-3.26284E1	2.68256E1	1.19841E-7	2.52236E-3	2.52236E-3	6.29684E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80027E1	-3.33786E-4	-8.80011E1	6.19888E-4	4.62532E-3	9.51529E-2	2.73246E1	-3.26514E1	-3.26396E1	2.6866E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80028E1	-4.29153E-4	-8.80009E1	3.8147E-4	4.673E-3	9.48429E-2	2.73273E1	-3.26579E1	-3.26008E1	2.68271E1	1.19697E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80028E1	-4.76837E-4	-8.80005E1	4.29153E-4	4.88758E-3	9.51052E-2	2.73273E1	-3.26518E1	-3.26188E1	2.68112E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80029E1	-2.6226E-4	-8.80004E1	3.8147E-4	4.55379E-3	9.5129E-2	2.73249E1	-3.26398E1	-3.26524E1	2.68541E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.00563E-1
1.2E1	1.0E2	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.8003E1	-6.91414E-4	-8.80005E1	1.66893E-4	4.64916E-3	9.47952E-2	2.72933E1	-3.26691E1	-3.26054E1	2.67982E1	1.19913E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00302E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80029E1	-7.15256E-4	-8.80007E1	4.76837E-4	4.33922E-3	9.49144E-2	2.72916E1	-3.26646E1	-3.26407E1	2.68319E1	1.19749E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00453E-1
1.4E1	3.381E3	6.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80026E1	-4.29153E-4	-8.80005E1	5.96046E-4	4.8399E-3	9.48906E-2	2.73147E1	-3.26567E1	-3.25966E1	2.68496E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.00144E-1
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80026E1	-5.96046E-4	-8.80004E1	7.86781E-4	4.52995E-3	9.51052E-2	2.73249E1	-3.26536E1	-3.26266E1	2.68496E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01085E-1
1.6E1	4.73E2	1.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80028E1	-7.62939E-4	-8.8001E1	4.52995E-4	4.41074E-3	9.4986E-2	2.73225E1	-3.26446E1	-3.26284E1	2.68076E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
1.7E1	9.47E2	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.80028E1	-6.19888E-4	-8.80008E1	1.19209E-4	4.24385E-3	9.51052E-2	2.73765E1	-3.26478E1	-3.26189E1	2.68725E1	1.19809E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.99E-1
1.8E1	3.949E3	4.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80026E1	-8.82149E-4	-8.80003E1	4.76837E-4	4.17233E-3	9.48429E-2	2.7355E1	-3.26434E1	-3.26218E1	2.68346E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.97647E-1
1.9E1	2.143E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80026E1	-7.15256E-4	-8.80006E1	4.05312E-4	4.36306E-3	9.51767E-2	2.73598E1	-3.26567E1	-3.26428E1	2.6828E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.99E-1
2.0E1	2.6103E4	1.5E1	8.08E2	5.58E2	-7.17007E-2	-8.80028E1	-7.62939E-4	-8.80007E1	2.86102E-4	4.22001E-3	9.50336E-2	2.72949E1	-3.26699E1	-3.26416E1	2.6834E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
2.1E1	5.5E1	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80029E1	-6.67572E-4	-8.80004E1	4.52995E-4	4.50611E-3	9.50575E-2	2.73231E1	-3.26452E1	-3.26146E1	2.68154E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3514E-3	3.01609E-1
2.2E1	1.836E3	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.8003E1	-8.10623E-4	-8.80005E1	4.52995E-4	4.50611E-3	9.52959E-2	2.73293E1	-3.26467E1	-3.26378E1	2.68325E1	1.198E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.98156E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.8003E1	-5.00679E-4	-8.80006E1	7.15256E-4	4.72069E-3	9.52721E-2	2.74272E1	-3.27823E1	-3.25818E1	2.68232E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.97963E-1
