[Scan]
initial_time=2016-01-18T21:03:45
final_time=2016-01-18T21:04:05
ip_count=19
run=1024
dataset=7
scan=551
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.79191E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.86085E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.42165E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.19656E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.59351E-8
mult1=-1.9004E-8
mult2=-2.16667E-9
rf_tmon=-7.31151E-3
rf_agc=3.12386E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=5.63502E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68176E0
bslens_imon=2.38634E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19707E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=2.80394E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04489E1
cs_ea1_imon=2.57248E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98067E0
lens1_imon=1.45987E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.50217E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.91639E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.29374E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.27184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.37421E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63395E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20463E0
cs_ionrep_imon=1.16511E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93481E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=2.97369E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.98419E-8
tplens_vset=1.4E-1
tplens_vmon=1.71053E0
tplens_imon=-1.58753E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26714E1
iondef3_imon=1.49532E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26443E1
iondef2_imon=1.56454E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98259E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=9.25863E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=1.7574E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33916E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.10487E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49784E0
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.15641E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07635E-1
os_ef2bup_imon=-5.47024E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11334E1
os_restr2_imon=3.41482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.22875E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73163E1
iondef1_imon=1.10527E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6837E1
iondef4_imon=1.11585E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.05855E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.63879E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10672E0
cs_ionaccel_imon=-1.97079E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56651E1
einzel_imon=7.50764E-6
window_vset=0.0E0
window_vmon=2.31158E-1
window_imon=-7.13005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86206E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.25303E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.41668E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.55224E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2181E0
defgridb_imon=6.04177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33354E1
os_fil1_imon=9.43405E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07119E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64735E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=9.96305E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62546E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66338E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.62275E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.62853E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22442E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.00137E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.102E3	3.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80027E1	-6.91414E-4	-8.80009E1	7.39098E-4	4.52995E-3	9.46283E-2	2.73405E1	-3.26773E1	-3.26402E1	2.6803E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01609E-1
2.0E0	1.05246E5	1.06E2	3.16E2	1.6E2	-7.16233E-2	-8.80026E1	-7.62939E-4	-8.80003E1	5.48363E-4	4.76837E-3	9.46283E-2	2.73033E1	-3.26658E1	-3.26309E1	2.68806E1	1.19953E-7	2.51632E-3	2.51632E-3	6.28592E-3	3.00453E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80027E1	-7.15256E-4	-8.80001E1	4.29153E-4	4.79221E-3	9.46999E-2	2.73317E1	-3.26556E1	-3.26422E1	2.6847E1	1.19978E-7	2.51248E-3	2.51248E-3	6.30182E-3	3.0041E-1
4.0E0	2.3271E4	9.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80028E1	-7.62939E-4	-8.80004E1	5.00679E-4	4.64916E-3	9.47237E-2	2.72985E1	-3.26801E1	-3.26579E1	2.68563E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80025E1	-5.96046E-4	-8.80006E1	6.91414E-4	4.62532E-3	9.47237E-2	2.72937E1	-3.26458E1	-3.26524E1	2.6819E1	1.20209E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80027E1	-8.10623E-4	-8.80007E1	6.19888E-4	4.72069E-3	9.49144E-2	2.73087E1	-3.26633E1	-3.26368E1	2.68647E1	1.19809E-7	2.51771E-3	2.51771E-3	6.28006E-3	2.97963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80031E1	-1.0252E-3	-8.80008E1	4.52995E-4	4.62532E-3	9.49383E-2	2.72979E1	-3.26549E1	-3.25954E1	2.6837E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.12368E-2	-8.80031E1	-8.82149E-4	-8.80005E1	1.19209E-4	4.673E-3	9.49621E-2	2.73246E1	-3.26331E1	-3.25995E1	2.68377E1	1.19965E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00824E-1
1.2E1	1.21E2	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.8003E1	-8.10623E-4	-8.80008E1	2.38419E-4	4.81606E-3	9.49383E-2	2.73147E1	-3.26687E1	-3.25978E1	2.6834E1	1.20226E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.00563E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.09279E-2	-8.80028E1	-7.39098E-4	-8.80007E1	5.48363E-4	4.91142E-3	9.49383E-2	2.73411E1	-3.26645E1	-3.2629E1	2.68268E1	1.20106E-7	2.52599E-3	2.52599E-3	6.31278E-3	2.99175E-1
1.4E1	3.475E3	3.0E0	5.66E2	3.82E2	-7.06187E-2	-8.80027E1	-6.4373E-4	-8.80005E1	4.29153E-4	4.81606E-3	9.48668E-2	2.73279E1	-3.26933E1	-3.2641E1	2.68358E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
1.5E1	1.03E2	0.0E0	6.06E2	4.11E2	-7.13915E-2	-8.80025E1	-7.86781E-4	-8.80008E1	7.15256E-4	4.74453E-3	9.49621E-2	2.73228E1	-3.26632E1	-3.26213E1	2.68196E1	1.19861E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9952E-1
1.6E1	4.22E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80025E1	-8.10623E-4	-8.80004E1	5.00679E-4	4.74453E-3	9.47714E-2	2.73387E1	-3.26482E1	-3.26332E1	2.68629E1	1.19965E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.97963E-1
1.7E1	9.84E2	1.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80027E1	-5.96046E-4	-8.80002E1	1.66893E-4	4.64916E-3	9.49383E-2	2.7346E1	-3.26735E1	-3.26146E1	2.68478E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99686E-1
1.8E1	3.903E3	3.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80027E1	-7.39098E-4	-8.80006E1	1.90735E-4	4.69685E-3	9.48429E-2	2.73659E1	-3.26703E1	-3.26207E1	2.68298E1	1.20174E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00302E-1
1.9E1	2.109E3	1.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80027E1	-9.77516E-4	-8.80005E1	3.09944E-4	4.74453E-3	9.51052E-2	2.73482E1	-3.26644E1	-3.26018E1	2.6843E1	1.19861E-7	2.51771E-3	2.51771E-3	6.34588E-3	2.9952E-1
2.0E1	2.6194E4	1.0E1	8.08E2	5.58E2	-7.23189E-2	-8.80026E1	-7.86781E-4	-8.80005E1	8.10623E-4	4.48227E-3	9.49383E-2	2.73087E1	-3.26494E1	-3.26182E1	2.6849E1	1.19907E-7	2.51593E-3	2.51593E-3	6.31827E-3	3.01155E-1
2.1E1	5.6E1	1.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80029E1	-6.91414E-4	-8.80005E1	4.76837E-4	4.45843E-3	9.47237E-2	2.73577E1	-3.26866E1	-3.26548E1	2.68442E1					
2.2E1	1.803E3	4.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80028E1	-6.4373E-4	-8.80005E1	3.09944E-4	4.62532E-3	9.50098E-2	2.73493E1	-3.26596E1	-3.26201E1	2.68454E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80025E1	-7.86781E-4	-8.80004E1	4.52995E-4	4.26769E-3	9.50336E-2	2.73163E1	-3.26443E1	-3.26714E1	2.6837E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01995E-1
