[Scan]
initial_time=2016-01-18T21:05:32
final_time=2016-01-18T21:05:52
ip_count=19
run=1024
dataset=7
scan=555
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.77718E-6
ql1_vset=
ql1_vmon=-8.80032E1
ql1_imon=-6.60455E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.4043E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.06419E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.59963E-8
mult1=-1.72898E-8
mult2=-2.75853E-9
rf_tmon=-4.92099E-3
rf_agc=3.2919E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=5.56266E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.28901E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=2.78592E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=2.56852E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98428E0
lens1_imon=1.52837E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.48234E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.92936E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.29846E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.28625E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15065E1
os_ea1_imon=2.39259E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.06703E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.18493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.936E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=2.95135E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.99095E-8
tplens_vset=1.4E-1
tplens_vmon=1.67448E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.4928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26993E1
iondef2_imon=1.56021E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98083E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=9.03988E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29055E0
ionrepsh_imon=1.76713E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47681E0
os_ea2_imon=-8.90558E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03534E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14843E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.40905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.28306E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.11896E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68448E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.01819E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.62558E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.64099E-6
window_vset=0.0E0
window_vmon=2.696E-1
window_imon=-7.85084E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82662E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-8.64372E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92595E3
multa_neg_imon=7.1557E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93811E3
defgrida_imon=7.03673E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.96321E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.29411E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3333E1
os_fil1_imon=9.43273E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06975E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64826E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.95921E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63189E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66145E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82176E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74288E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.41843E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55067E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22459E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9714E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.95932E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.001E3	1.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80028E1	-6.67572E-4	-8.80004E1	-7.15256E-5	4.673E-3	9.51052E-2	2.73529E1	-3.26561E1	-3.26396E1	2.68146E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
2.0E0	1.06474E5	1.04E2	3.16E2	1.6E2	-7.19325E-2	-8.80032E1	-3.09944E-4	-8.80006E1	3.09944E-4	4.88758E-3	9.51529E-2	2.73235E1	-3.26572E1	-3.26432E1	2.68051E1	1.19749E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80029E1	-4.29153E-4	-8.80004E1	1.66893E-4	4.81606E-3	9.50575E-2	2.72845E1	-3.26467E1	-3.26313E1	2.68731E1	1.19937E-7	2.51952E-3	2.51952E-3	6.31879E-3	3.01609E-1
4.0E0	2.3385E4	2.5E1	6.55E2	3.98E2	-7.23189E-2	-8.80029E1	-4.52995E-4	-8.80007E1	2.38419E-5	4.86374E-3	9.50575E-2	2.73375E1	-3.26349E1	-3.26006E1	2.68094E1	1.1974E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.8003E1	-7.15256E-5	-8.80008E1	2.6226E-4	4.57764E-3	9.50575E-2	2.73057E1	-3.26532E1	-3.26417E1	2.68412E1	1.20004E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80031E1	-2.6226E-4	-8.80006E1	4.52995E-4	4.93526E-3	9.48906E-2	2.72949E1	-3.26464E1	-3.2608E1	2.67944E1	1.19749E-7	2.52276E-3	2.52276E-3	6.28592E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80031E1	-5.72205E-4	-8.80003E1	2.86102E-4	4.48227E-3	9.51529E-2	2.73088E1	-3.26285E1	-3.26144E1	2.68556E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13143E-2	-8.80033E1	-4.76837E-4	-8.80002E1	4.29153E-4	4.673E-3	9.51529E-2	2.73015E1	-3.26699E1	-3.26326E1	2.68166E1	1.20191E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.00942E-1
1.2E1	8.3E1	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.8003E1	-2.86102E-4	-8.80006E1	5.24521E-4	4.50611E-3	9.50575E-2	2.73364E1	-3.2675E1	-3.26549E1	2.681E1	1.20122E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00563E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80032E1	-1.66893E-4	-8.80008E1	5.00679E-4	4.48227E-3	9.50336E-2	2.73387E1	-3.26795E1	-3.26284E1	2.68376E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9874E-1
1.4E1	3.385E3	3.0E0	5.66E2	3.82E2	-7.20871E-2	-8.8003E1	-3.09944E-4	-8.80006E1	5.96046E-4	4.48227E-3	9.54151E-2	2.73255E1	-3.26326E1	-3.26759E1	2.68629E1	1.20004E-7	2.52599E-3	2.52599E-3	6.30202E-3	2.98156E-1
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.06958E-2	-8.80029E1	-4.05312E-4	-8.8001E1	4.05312E-4	4.86374E-3	9.52482E-2	2.73189E1	-3.26609E1	-3.26242E1	2.6816E1	1.19965E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.97445E-1
1.6E1	4.51E2	1.0E0	6.47E2	4.41E2	-7.02322E-2	-8.80032E1	-4.29153E-4	-8.80007E1	1.43051E-4	4.62532E-3	9.49383E-2	2.73546E1	-3.26449E1	-3.26408E1	2.68325E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.99E-1
1.7E1	9.43E2	1.0E0	6.87E2	4.7E2	-7.09279E-2	-8.80032E1	-5.00679E-4	-8.80007E1	3.09944E-4	4.52995E-3	9.52482E-2	2.73508E1	-3.26416E1	-3.26416E1	2.6828E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0071E-1
1.8E1	4.016E3	1.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80028E1	-5.00679E-4	-8.80007E1	2.38419E-4	4.55379E-3	9.51767E-2	2.73075E1	-3.26356E1	-3.26362E1	2.68118E1	1.19809E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00302E-1
1.9E1	2.116E3	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80033E1	-5.00679E-4	-8.80007E1	7.15256E-5	4.64916E-3	9.49383E-2	2.74E1	-3.27846E1	-3.26554E1	2.68238E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00824E-1
2.0E1	2.6159E4	1.3E1	8.08E2	5.58E2	-7.18554E-2	-8.80031E1	-4.76837E-5	-8.8001E1	4.52995E-4	4.57764E-3	9.49383E-2	2.72973E1	-3.26368E1	-3.26158E1	2.68262E1	1.19766E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.0041E-1
2.1E1	5.9E1	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80031E1	-1.43051E-4	-8.8001E1	4.05312E-4	4.52995E-3	9.52244E-2	2.73248E1	-3.26671E1	-3.2637E1	2.68316E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9943E-1
2.2E1	1.886E3	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.8003E1	-5.48363E-4	-8.80007E1	6.4373E-4	4.60148E-3	9.52244E-2	2.73165E1	-3.26248E1	-3.26753E1	2.68302E1	1.19851E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.97647E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80032E1	-4.52995E-4	-8.80008E1	4.52995E-4	4.3869E-3	9.52482E-2	2.73135E1	-3.26993E1	-3.2635E1	2.68448E1	1.19902E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.9714E-1
