[Scan]
initial_time=2016-01-18T21:05:59
final_time=2016-01-18T21:06:18
ip_count=19
run=1024
dataset=7
scan=556
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.8188E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-7.3179E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.38967E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.1896E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.59422E-8
mult1=-1.90631E-8
mult2=-2.74873E-9
rf_tmon=-5.37663E-3
rf_agc=3.26189E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.62334E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.55578E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19664E1
lens5a_imon=1.99965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.04952E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54145E1
cs_ef1b_imon=2.80611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04552E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04898E1
cs_ea1_imon=2.54761E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96505E0
lens1_imon=1.75187E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0342E1
cs_ea2_imon=1.47838E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.92972E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.29513E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.27364E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15234E1
os_ea1_imon=2.38647E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.06847E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22626E0
cs_ionrep_imon=1.18349E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91949E2
cs_nozzle_imon=1.93352E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=2.96252E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.99389E-8
tplens_vset=1.4E-1
tplens_vmon=1.67268E0
tplens_imon=-9.02587E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26178E1
iondef3_imon=1.50109E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26343E1
iondef2_imon=1.55805E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98083E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=9.08864E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34643E0
ionrepsh_imon=1.74731E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43295E0
os_ea2_imon=-8.32879E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.15677E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9382E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.40833E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.28126E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.2374E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73092E1
iondef1_imon=1.08832E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68487E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.00883E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.62389E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02148E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56802E1
einzel_imon=8.00859E-6
window_vset=0.0E0
window_vmon=2.50379E-1
window_imon=-7.95896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82666E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86116E1
mask2_imon=-7.995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=6.94301E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=7.10162E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50174E3
multb_neg_imon=7.68923E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44367E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.41573E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64747E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.9535E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62654E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6576E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83466E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.43905E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22277E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.71305E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.062E3	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80033E1	-5.48363E-4	-8.80007E1	1.43051E-4	4.57764E-3	9.51052E-2	2.73173E1	-3.26671E1	-3.26052E1	2.6825E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
2.0E0	1.06135E5	9.5E1	3.16E2	1.6E2	-7.23189E-2	-8.8003E1	-6.91414E-4	-8.80006E1	5.00679E-4	4.8399E-3	9.51052E-2	2.73571E1	-3.2634E1	-3.26511E1	2.68584E1	1.1979E-7	2.51603E-3	2.51603E-3	6.3074E-3	2.99845E-1
3.0E0	1.0E1	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80031E1	-6.19888E-4	-8.80005E1	9.29832E-4	4.48227E-3	9.5129E-2	2.72945E1	-3.26691E1	-3.26307E1	2.68153E1	1.19766E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.01475E-1
4.0E0	2.3023E4	1.4E1	6.55E2	3.98E2	-7.20871E-2	-8.80028E1	-7.15256E-4	-8.80005E1	7.62939E-4	4.41074E-3	9.48906E-2	2.73676E1	-3.26951E1	-3.26068E1	2.68394E1	1.19697E-7	2.50989E-3	2.50989E-3	6.3074E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80032E1	-1.90735E-4	-8.80004E1	3.8147E-4	4.45843E-3	9.4986E-2	2.73122E1	-3.26685E1	-3.26083E1	2.6852E1	1.19757E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00302E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80033E1	-6.4373E-4	-8.80007E1	1.66893E-4	4.50611E-3	9.48191E-2	2.73135E1	-3.26512E1	-3.26368E1	2.68563E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10825E-2	-8.80031E1	-3.8147E-4	-8.80003E1	4.76837E-5	4.72069E-3	9.5129E-2	2.73333E1	-3.26765E1	-3.26086E1	2.68232E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.8003E1	-5.48363E-4	-8.80004E1	1.43051E-4	4.48227E-3	9.48906E-2	2.73153E1	-3.26645E1	-3.26296E1	2.68316E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.2E1	9.8E1	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80031E1	-5.72205E-4	-8.80005E1	6.91414E-4	4.64916E-3	9.47475E-2	2.73306E1	-3.26405E1	-3.2615E1	2.68602E1	1.20403E-7	2.52362E-3	2.52362E-3	6.3074E-3	3.00144E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.80032E1	-6.91414E-4	-8.80008E1	4.05312E-4	4.55379E-3	9.48191E-2	2.7365E1	-3.26946E1	-3.25474E1	2.68675E1	1.19979E-7	2.51472E-3	2.51472E-3	6.29703E-3	3.01237E-1
1.4E1	3.35E3	2.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80032E1	-6.91414E-4	-8.80007E1	2.86102E-4	4.673E-3	9.49144E-2	2.73075E1	-3.27059E1	-3.26044E1	2.6831E1	1.201E-7	2.51725E-3	2.51725E-3	6.3074E-3	3.00251E-1
1.5E1	1.09E2	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80029E1	-5.96046E-4	-8.80004E1	4.52995E-4	5.14984E-3	9.48906E-2	2.73315E1	-3.26711E1	-3.26008E1	2.68268E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00302E-1
1.6E1	4.71E2	1.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80029E1	-6.19888E-4	-8.80007E1	5.00679E-4	4.81606E-3	9.48429E-2	2.73E1	-3.26596E1	-3.26829E1	2.68435E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01871E-1
1.7E1	9.47E2	1.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80028E1	-1.04904E-3	-8.80009E1	6.19888E-4	4.69685E-3	9.48429E-2	2.73189E1	-3.26609E1	-3.26242E1	2.68202E1	1.19782E-7	2.51783E-3	2.51783E-3	6.3282E-3	3.02977E-1
1.8E1	3.949E3	4.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80028E1	-5.96046E-4	-8.80005E1	5.72205E-4	4.24385E-3	9.49144E-2	2.73057E1	-3.26701E1	-3.26285E1	2.68232E1	1.19766E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.00942E-1
1.9E1	2.162E3	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80029E1	-6.19888E-4	-8.80003E1	1.43051E-4	4.72069E-3	9.50813E-2	2.73812E1	-3.27694E1	-3.26573E1	2.68358E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00563E-1
2.0E1	2.6412E4	1.8E1	8.08E2	5.58E2	-7.36328E-2	-8.80028E1	-5.96046E-4	-8.80002E1	6.91414E-4	4.64916E-3	9.50098E-2	2.73069E1	-3.26819E1	-3.26266E1	2.68226E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80027E1	-7.86781E-4	-8.80004E1	7.62939E-4	4.81606E-3	9.51529E-2	2.73334E1	-3.26744E1	-3.26443E1	2.68569E1	1.20174E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.00302E-1
2.2E1	1.907E3	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80029E1	-6.67572E-4	-8.80003E1	7.62939E-4	4.673E-3	9.49383E-2	2.72945E1	-3.26708E1	-3.26443E1	2.68376E1	1.20055E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.9892E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.8003E1	-8.82149E-4	-8.80003E1	6.67572E-4	4.62532E-3	9.48906E-2	2.73092E1	-3.26343E1	-3.26178E1	2.68487E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99175E-1
