[Scan]
initial_time=2016-01-18T21:06:52
final_time=2016-01-18T21:07:11
ip_count=19
run=1024
dataset=7
scan=558
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.76512E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.12848E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.41251E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.2459E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.59236E-8
mult1=-1.64952E-8
mult2=-2.68268E-9
rf_tmon=-5.34156E-3
rf_agc=3.2943E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=5.57363E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6786E0
bslens_imon=2.44769E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19636E1
lens5a_imon=2.01093E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53854E1
cs_ef1b_imon=2.78959E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02043E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04262E1
cs_ea1_imon=2.57087E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98877E0
lens1_imon=1.53099E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6503E1
os_ef1alow_imon=2.97359E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03572E1
cs_ea2_imon=1.48816E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84185E1
cs_ef1a_imon=2.92794E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.29026E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11289E1
os_restr1_imon=4.26052E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14875E1
os_ea1_imon=2.41018E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6355E1
os_ef1bup_imon=3.08257E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24679E0
cs_ionrep_imon=1.18519E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91948E2
cs_nozzle_imon=1.93533E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01986E1
cs_anode1_imon=2.94599E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.99109E-8
tplens_vset=1.4E-1
tplens_vmon=1.68804E0
tplens_imon=-2.8473E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25966E1
iondef3_imon=1.48746E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.55612E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.9825E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=8.95238E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29339E0
ionrepsh_imon=1.7561E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.16738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52699E0
os_ea2_imon=-6.77604E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00407E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71152E1
cs_ef2a_imon=3.15865E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05308E0
os_ef2alow_imon=-2.53825E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79339E-1
os_ef2bup_imon=-5.29469E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11253E1
os_restr2_imon=3.41731E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.28406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01874E1
cs_anode2_imon=2.25422E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72829E1
iondef1_imon=1.09954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.08158E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.00289E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.62877E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14135E0
cs_ionaccel_imon=-1.79518E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47382E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5614E1
einzel_imon=7.75153E-6
window_vset=0.0E0
window_vmon=2.41992E-1
window_imon=-9.70721E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-6.27493E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.45242E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=5.94109E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.00645E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27563E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.41046E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07046E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64519E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30871E1
cs_fil1_imon=9.94931E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63091E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6601E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.76243E-2
os_fil2_imon=-2.70299E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83801E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.70001E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35944E-1
cs_fil2_imon=-2.50838E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.88014E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22319E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31827E-3
inlet_lpb_pmon=3.00378E-1
chamber_ion_pmon=1.20036E-7
chamber_cvt_pmon=2.51755E-3
foreline_cvt_pmon=2.51755E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.53646E-1
res40_imon=-2.5984E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.048E3	2.0E0	1.47E2	4.1E1	-7.14689E-2	-8.8003E1	-6.19888E-4	-8.80007E1	3.09944E-4	4.48227E-3	9.48191E-2	2.73135E1	-3.26903E1	-3.2605E1	2.68595E1	1.20055E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.96381E-1
2.0E0	1.05477E5	9.5E1	3.16E2	1.6E2	-7.27053E-2	-8.80031E1	-4.52995E-4	-8.80004E1	-4.76837E-5	4.79221E-3	9.45568E-2	2.73405E1	-3.26759E1	-3.2605E1	2.68442E1	1.19705E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.97963E-1
3.0E0	2.7E1	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80033E1	-7.39098E-4	-8.80006E1	1.90735E-4	4.57764E-3	9.46522E-2	2.73045E1	-3.26366E1	-3.2636E1	2.68605E1	1.20036E-7	2.51052E-3	2.51052E-3	6.32644E-3	3.00249E-1
4.0E0	2.2667E4	1.1E1	6.55E2	3.98E2	-7.27053E-2	-8.80031E1	-9.29832E-4	-8.80007E1	7.15256E-5	4.673E-3	9.47237E-2	2.72979E1	-3.26536E1	-3.26116E1	2.68382E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80029E1	-6.91414E-4	-8.80007E1	6.4373E-4	4.48227E-3	9.5129E-2	2.7349E1	-3.26518E1	-3.25984E1	2.68514E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.8003E1	-7.86781E-4	-8.80005E1	4.05312E-4	4.52995E-3	9.50575E-2	2.73195E1	-3.26434E1	-3.26236E1	2.68677E1	1.19757E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80029E1	-3.57628E-4	-8.80007E1	5.24521E-4	4.43459E-3	9.48668E-2	2.73291E1	-3.26849E1	-3.2602E1	2.68436E1	1.19861E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80027E1	-5.96046E-4	-8.80006E1	5.48363E-4	4.43459E-3	9.50336E-2	2.7319E1	-3.26596E1	-3.2637E1	2.68296E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.8003E1	-7.15256E-4	-8.80005E1	9.29832E-4	4.33922E-3	9.50575E-2	2.73177E1	-3.26687E1	-3.26134E1	2.68478E1	1.19841E-7	2.51919E-3	2.51919E-3	6.35514E-3	2.99845E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.8003E1	-8.58307E-4	-8.80003E1	6.91414E-4	4.43459E-3	9.49621E-2	2.73081E1	-3.26861E1	-3.26843E1	2.68364E1	1.20158E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00966E-1
1.4E1	3.54E3	1.0E0	5.66E2	3.82E2	-7.25507E-2	-8.8003E1	-1.19209E-3	-8.80003E1	7.86781E-4	3.98159E-3	9.50336E-2	2.7324E1	-3.26514E1	-3.26419E1	2.6836E1	1.20244E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.99348E-1
1.5E1	1.01E2	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80033E1	-1.00136E-3	-8.80009E1	0.0E0	4.22001E-3	9.46999E-2	2.73314E1	-3.26793E1	-3.26076E1	2.6865E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
1.6E1	4.61E2	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80032E1	-1.21593E-3	-8.80005E1	-2.38419E-5	3.93391E-3	9.4986E-2	2.73339E1	-3.26524E1	-3.26014E1	2.68238E1	1.20191E-7	2.5147E-3	2.5147E-3	6.34099E-3	3.01209E-1
1.7E1	9.6E2	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80034E1	-1.0252E-3	-8.80005E1	4.29153E-4	4.29153E-3	9.4986E-2	2.73411E1	-3.26458E1	-3.26524E1	2.68448E1	1.20174E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9952E-1
1.8E1	3.833E3	5.0E0	7.27E2	5.0E2	-7.16233E-2	-8.80034E1	-1.00136E-3	-8.80005E1	3.33786E-4	4.26769E-3	9.47952E-2	2.73161E1	-3.26505E1	-3.2634E1	2.67878E1	1.20055E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.99175E-1
1.9E1	2.238E3	3.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80033E1	-8.82149E-4	-8.80006E1	5.24521E-4	4.55379E-3	9.48668E-2	2.72986E1	-3.27074E1	-3.26992E1	2.68118E1	1.19819E-7	2.51915E-3	2.51915E-3	6.29067E-3	2.99613E-1
2.0E1	2.6109E4	1.5E1	8.08E2	5.58E2	-7.27053E-2	-8.80033E1	-6.91414E-4	-8.80007E1	3.09944E-4	4.76837E-3	9.50575E-2	2.73556E1	-3.26633E1	-3.26272E1	2.68767E1	1.19653E-7	2.52757E-3	2.52757E-3	6.31288E-3	2.9952E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80031E1	-7.39098E-4	-8.80002E1	2.38419E-5	4.64916E-3	9.49144E-2	2.73476E1	-3.26744E1	-3.26284E1	2.68163E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01085E-1
2.2E1	1.853E3	1.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80028E1	-6.19888E-4	-8.80007E1	4.29153E-4	4.3869E-3	9.48191E-2	2.7321E1	-3.26885E1	-3.26219E1	2.68599E1	1.19749E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00966E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80027E1	-1.0252E-3	-8.80006E1	4.29153E-4	4.43459E-3	9.49383E-2	2.72829E1	-3.26795E1	-3.25966E1	2.68334E1	1.20036E-7	2.51755E-3	2.51755E-3	6.31827E-3	3.00378E-1
