[Scan]
initial_time=2016-01-18T21:09:15
final_time=2016-01-18T21:09:35
ip_count=19
run=1024
dataset=8
scan=563
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-8.20303E-1
ql1_imon=1.44515E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.98432E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=2.70743E-9
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=-3.11542E-10
mult1=-9.6561E-9
mult2=-2.68069E-9
rf_tmon=-5.28148E-3
rf_agc=3.20658E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.60437E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.38634E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19574E1
lens5a_imon=2.01335E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=3.17011E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02258E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04598E1
cs_ea1_imon=1.11464E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38758E0
lens1_imon=2.68916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.35004E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.03856E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.28017E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.27652E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.39295E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=9.46647E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=1.95665E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.27926E-8
tplens_vset=1.4E-1
tplens_vmon=1.66847E0
tplens_imon=-9.38636E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.55624E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.9814E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.00208E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=8.48953E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.15611E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47561E0
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.0067E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71492E1
cs_ef2a_imon=3.16578E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12424E0
os_ef2alow_imon=-2.37804E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.41482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.28775E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.08784E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73514E1
iondef1_imon=1.09697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68394E1
iondef4_imon=1.11008E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.88173E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.5744E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-8.78788E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47558E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55997E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.46174E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8267E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.71807E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.79881E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.26024E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16697E0
defgridb_imon=5.94083E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.43213E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07197E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64192E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31791E1
cs_fil1_imon=7.90567E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.119E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66844E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20869E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.7252E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22315E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.56599E-1
res40_imon=-2.36002E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.20279E-1	-7.98941E-1	-9.13126E0	-9.14283E0	4.8399E-3	9.52244E-2	2.73375E1	-3.26602E1	-3.26236E1	2.6843E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9978E-1
2.0E0	3.4E1	1.0E0	3.16E2	1.6E2	-2.09402E0	-8.20374E-1	-7.98631E-1	-9.13134E0	-9.14285E0	4.48227E-3	9.52005E-2	2.72913E1	-3.26512E1	-3.26639E1	2.6846E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.20088E-1	-7.98607E-1	-9.13119E0	-9.14257E0	4.64916E-3	9.51052E-2	2.73458E1	-3.26797E1	-3.26284E1	2.68184E1	1.19872E-7	2.51359E-3	2.51359E-3	6.32978E-3	2.98026E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-8.19874E-1	-7.99084E-1	-9.13119E0	-9.14268E0	4.69685E-3	9.52244E-2	2.73139E1	-3.26431E1	-3.26537E1	2.68221E1	1.20142E-7	2.51603E-3	2.51603E-3	6.31798E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.20065E-1	-7.98869E-1	-9.131E0	-9.14309E0	4.52995E-3	9.4986E-2	2.73375E1	-3.26614E1	-3.26183E1	2.68593E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.20136E-1	-7.99012E-1	-9.131E0	-9.14288E0	4.8399E-3	9.50813E-2	2.73129E1	-3.26705E1	-3.26122E1	2.68292E1	1.20226E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.19969E-1	-7.98774E-1	-9.13112E0	-9.14304E0	4.673E-3	9.50336E-2	2.73237E1	-3.26591E1	-3.25924E1	2.68707E1	1.20055E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.19826E-1	-7.98845E-1	-9.13124E0	-9.14292E0	4.60148E-3	9.52244E-2	2.73045E1	-3.26573E1	-3.26386E1	2.68436E1	1.19925E-7	2.51915E-3	2.51915E-3	6.34661E-3	2.99879E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.20231E-1	-7.99084E-1	-9.13115E0	-9.14271E0	4.43459E-3	9.52005E-2	2.73334E1	-3.26573E1	-3.26071E1	2.68238E1	1.20363E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.20017E-1	-7.98869E-1	-9.13143E0	-9.14252E0	4.55379E-3	9.49383E-2	2.73315E1	-3.26627E1	-3.25599E1	2.68124E1	1.19749E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.03027E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.20065E-1	-7.98941E-1	-9.13124E0	-9.14261E0	4.43459E-3	9.49383E-2	2.73102E1	-3.26323E1	-3.26488E1	2.68389E1	1.19809E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02922E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.20041E-1	-7.98774E-1	-9.13131E0	-9.14254E0	4.50611E-3	9.48429E-2	2.73273E1	-3.26488E1	-3.26302E1	2.68298E1	1.20078E-7	2.51886E-3	2.51886E-3	6.3282E-3	2.99506E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.19731E-1	-7.98678E-1	-9.13138E0	-9.14242E0	4.48227E-3	9.51052E-2	2.73267E1	-3.26903E1	-3.26086E1	2.68238E1	1.20084E-7	2.50914E-3	2.50914E-3	6.34099E-3	2.98554E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.20065E-1	-7.98845E-1	-9.1315E0	-9.1429E0	4.36306E-3	9.51529E-2	2.73526E1	-3.26699E1	-3.26122E1	2.67824E1	1.19749E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.98665E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.19898E-1	-7.98607E-1	-9.13126E0	-9.14247E0	4.52995E-3	9.4986E-2	2.73765E1	-3.26738E1	-3.25735E1	2.68221E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.20088E-1	-7.98631E-1	-9.13138E0	-9.14254E0	4.69685E-3	9.50813E-2	2.72624E1	-3.25936E1	-3.26915E1	2.68593E1	1.19705E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.20017E-1	-7.98774E-1	-9.13119E0	-9.14259E0	4.79221E-3	9.52482E-2	2.73326E1	-3.26395E1	-3.26272E1	2.68413E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.19898E-1	-7.98702E-1	-9.13122E0	-9.14283E0	4.45843E-3	9.53436E-2	2.73311E1	-3.26791E1	-3.26024E1	2.68094E1	1.2033E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.20041E-1	-7.98512E-1	-9.13093E0	-9.14245E0	4.673E-3	9.50575E-2	2.73198E1	-3.26585E1	-3.26166E1	2.68118E1	1.198E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.20303E-1	-7.98726E-1	-9.13115E0	-9.14223E0	4.76837E-3	9.48906E-2	2.73514E1	-3.26783E1	-3.26392E1	2.68394E1	1.19913E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00041E-1
