[Scan]
initial_time=2016-01-18T21:09:42
final_time=2016-01-18T21:10:02
ip_count=19
run=1024
dataset=8
scan=564
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09193E0
qbias_imon=-1.08739E-4
ql1_vset=
ql1_vmon=-8.19778E-1
ql1_imon=1.42875E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=1.92195E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=2.12098E-9
ql4_vset=
ql4_vmon=-9.14237E0
ql4_imon=-2.75493E-10
mult1=-9.87765E-9
mult2=-2.73894E-9
rf_tmon=-5.77186E-3
rf_agc=3.28077E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.61273E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68476E0
bslens_imon=2.55938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=2.00254E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05241E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=3.16542E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04682E1
cs_ea1_imon=1.10166E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38758E0
lens1_imon=2.80452E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03816E1
cs_ea2_imon=1.35365E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=3.0555E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.28205E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.27328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.38611E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=9.27902E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=1.95989E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.27917E-8
tplens_vset=1.4E-1
tplens_vmon=1.6877E0
tplens_imon=-1.11888E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26231E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26467E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98281E-4
ql6_vset=1.0E-1
ql6_vmon=9.46283E-2
ql6_imon=4.02009E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29416E0
ionrepsh_imon=8.3958E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33459E1
lens5b_imon=2.15899E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.14776E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51466E0
os_ea2_imon=-8.22064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.093E0
os_ef2alow_imon=-2.37804E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18447E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1122E1
os_restr2_imon=3.42455E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.08135E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.09625E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68377E1
iondef4_imon=1.10864E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.97357E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.57872E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16138E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56021E1
einzel_imon=7.86804E-6
window_vset=0.0E0
window_vmon=2.72003E-1
window_imon=-7.09401E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.22419E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.96824E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=6.88172E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=5.94083E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.42606E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08212E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63916E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31793E1
cs_fil1_imon=6.6683E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01281E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66757E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1571E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.93144E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56869E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2228E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35514E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.20092E-7
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.39781E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09325E0	-8.20184E-1	-7.98702E-1	-9.13134E0	-9.14259E0	4.64916E-3	9.49144E-2	2.73222E1	-3.26596E1	-3.26101E1	2.68052E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00563E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.19993E-1	-7.98702E-1	-9.13136E0	-9.14259E0	4.76837E-3	9.51529E-2	2.73216E1	-3.26738E1	-3.26095E1	2.68743E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.19826E-1	-7.98917E-1	-9.13162E0	-9.14304E0	4.86374E-3	9.49621E-2	2.73341E1	-3.26926E1	-3.25999E1	2.68267E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.20112E-1	-7.98965E-1	-9.13172E0	-9.1428E0	4.50611E-3	9.47714E-2	2.73033E1	-3.26726E1	-3.26018E1	2.68418E1	1.20209E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.19874E-1	-7.98869E-1	-9.13153E0	-9.14276E0	4.81606E-3	9.51529E-2	2.7318E1	-3.26799E1	-3.26266E1	2.6771E1	1.20466E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.19993E-1	-7.9875E-1	-9.13129E0	-9.14249E0	4.57764E-3	9.48429E-2	2.73135E1	-3.26398E1	-3.26434E1	2.68647E1	1.20017E-7	2.52428E-3	2.52428E-3	6.33486E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.20065E-1	-7.98845E-1	-9.13126E0	-9.14245E0	4.74453E-3	9.50336E-2	2.73429E1	-3.26711E1	-3.26134E1	2.67929E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.20017E-1	-7.98798E-1	-9.13117E0	-9.1423E0	4.50611E-3	9.51529E-2	2.72895E1	-3.26308E1	-3.26278E1	2.68548E1	1.20244E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.00144E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.19969E-1	-7.98917E-1	-9.13107E0	-9.14273E0	4.69685E-3	9.51052E-2	2.73063E1	-3.26573E1	-3.262E1	2.68605E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09317E0	-8.20112E-1	-7.98941E-1	-9.13134E0	-9.14242E0	4.60148E-3	9.48906E-2	2.7379E1	-3.26657E1	-3.25803E1	2.68148E1	1.19913E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.99E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.19755E-1	-7.98821E-1	-9.13131E0	-9.14211E0	4.62532E-3	9.46999E-2	2.73303E1	-3.26603E1	-3.26176E1	2.68424E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09309E0	-8.1985E-1	-7.98893E-1	-9.13126E0	-9.14221E0	5.00679E-3	9.48429E-2	2.72907E1	-3.26573E1	-3.26014E1	2.6828E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.03449E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.19659E-1	-7.98726E-1	-9.13122E0	-9.14218E0	4.93526E-3	9.49621E-2	2.73075E1	-3.26512E1	-3.26056E1	2.68647E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02659E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.19778E-1	-7.99155E-1	-9.1316E0	-9.14261E0	4.88758E-3	9.47952E-2	2.72986E1	-3.26408E1	-3.26455E1	2.68869E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02133E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.19802E-1	-7.99274E-1	-9.13105E0	-9.14249E0	4.52995E-3	9.47475E-2	2.73198E1	-3.26364E1	-3.26731E1	2.68496E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02659E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.19802E-1	-7.99084E-1	-9.13062E0	-9.14245E0	4.72069E-3	9.47952E-2	2.73322E1	-3.26484E1	-3.26301E1	2.68214E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01347E-1
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.19731E-1	-7.98488E-1	-9.13117E0	-9.14249E0	4.91142E-3	9.4986E-2	2.73604E1	-3.26603E1	-3.2629E1	2.67746E1	1.20004E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09356E0	-8.20065E-1	-7.98607E-1	-9.13098E0	-9.14233E0	4.95911E-3	9.48191E-2	2.73151E1	-3.26573E1	-3.26178E1	2.6818E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09263E0	-8.19898E-1	-7.98678E-1	-9.13146E0	-9.14261E0	4.74453E-3	9.47475E-2	2.73299E1	-3.26779E1	-3.26242E1	2.68647E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09193E0	-8.19778E-1	-7.98869E-1	-9.1315E0	-9.14237E0	4.48227E-3	9.46283E-2	2.73069E1	-3.26467E1	-3.26231E1	2.68377E1	1.20092E-7	2.52131E-3	2.52131E-3	6.35514E-3	3.006E-1
