[Scan]
initial_time=2016-01-18T21:10:09
final_time=2016-01-18T21:10:28
ip_count=19
run=1024
dataset=8
scan=565
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.19635E-1
ql1_imon=1.41582E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=1.9488E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=1.70625E-9
ql4_vset=
ql4_vmon=-9.14264E0
ql4_imon=-2.09951E-10
mult1=-9.40478E-9
mult2=-2.74677E-9
rf_tmon=-5.38843E-3
rf_agc=3.37751E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.68314E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.27459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19448E1
lens5a_imon=2.00182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=3.15821E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02388E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0476E1
cs_ea1_imon=1.09193E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38277E0
lens1_imon=2.70358E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.34824E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=3.05406E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.27917E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.28121E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14891E1
os_ea1_imon=2.40521E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24489E0
cs_ionrep_imon=9.46647E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93665E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=1.95485E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.2908E-8
tplens_vset=1.4E-1
tplens_vmon=1.6901E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26172E1
iondef3_imon=1.49821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26296E1
iondef2_imon=1.56958E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98212E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=4.00616E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26051E0
ionrepsh_imon=8.38138E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.18531E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.13839E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48762E0
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.16939E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.38885E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07635E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=3.41229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.08964E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73564E1
iondef1_imon=1.10887E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68538E1
iondef4_imon=1.11332E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.95001E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81331E-1
olens1_imon=7.58698E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-7.85084E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56958E1
einzel_imon=7.85362E-6
window_vset=0.0E0
window_vmon=2.35963E-1
window_imon=-7.23817E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.40444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=7.25303E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.26024E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59405E0
defgridb_imon=5.88315E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33249E1
os_fil1_imon=9.42763E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08182E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6401E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3184E1
cs_fil1_imon=6.62626E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01221E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66656E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.28607E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.94046E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.86902E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22313E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.89325E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.19564E-1	-7.98631E-1	-9.13107E0	-9.14252E0	4.79221E-3	9.46045E-2	2.73724E1	-3.26987E1	-3.25948E1	2.68016E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.99E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.19659E-1	-7.98726E-1	-9.13141E0	-9.14283E0	4.50611E-3	9.46045E-2	2.7349E1	-3.26627E1	-3.26062E1	2.68593E1	1.20017E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.98481E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.19397E-1	-7.98869E-1	-9.1315E0	-9.14252E0	4.64916E-3	9.48191E-2	2.73264E1	-3.26378E1	-3.26534E1	2.68174E1	1.20244E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.98554E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.19778E-1	-7.98774E-1	-9.13148E0	-9.14266E0	4.69685E-3	9.46999E-2	2.73313E1	-3.26485E1	-3.26135E1	2.68275E1	1.20146E-7	2.51723E-3	2.51723E-3	6.34261E-3	3.00532E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.19373E-1	-7.98798E-1	-9.13136E0	-9.14276E0	4.69685E-3	9.49144E-2	2.73237E1	-3.26506E1	-3.26434E1	2.68202E1	1.201E-7	2.51838E-3	2.51838E-3	6.29603E-3	3.01337E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.19635E-1	-7.98798E-1	-9.13165E0	-9.14266E0	4.86374E-3	9.4986E-2	2.73493E1	-3.27039E1	-3.2626E1	2.68671E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.1954E-1	-7.98917E-1	-9.13138E0	-9.14273E0	4.81606E-3	9.47475E-2	2.7346E1	-3.26843E1	-3.26086E1	2.68184E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.19421E-1	-7.9906E-1	-9.13138E0	-9.14266E0	4.72069E-3	9.4676E-2	2.72979E1	-3.26488E1	-3.2611E1	2.6846E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.19397E-1	-7.99417E-1	-9.13126E0	-9.14276E0	4.64916E-3	9.49383E-2	2.72955E1	-3.26687E1	-3.25882E1	2.68635E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.19445E-1	-7.9906E-1	-9.13115E0	-9.14285E0	4.55379E-3	9.50813E-2	2.73243E1	-3.26687E1	-3.26296E1	2.68082E1	1.20226E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.19445E-1	-7.99322E-1	-9.13093E0	-9.14292E0	4.31538E-3	9.49144E-2	2.73128E1	-3.2662E1	-3.26148E1	2.68673E1	1.19902E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.02253E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.19397E-1	-7.9937E-1	-9.13095E0	-9.14278E0	4.3869E-3	9.4986E-2	2.73009E1	-3.26488E1	-3.26603E1	2.68274E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.19254E-1	-7.99274E-1	-9.13129E0	-9.14292E0	4.36306E-3	9.48906E-2	2.7337E1	-3.27086E1	-3.26431E1	2.68436E1	1.198E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.19325E-1	-7.99346E-1	-9.1316E0	-9.14249E0	4.36306E-3	9.49144E-2	2.73435E1	-3.26585E1	-3.2641E1	2.67908E1	1.20004E-7	2.52492E-3	2.52492E-3	6.29665E-3	3.00453E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.19397E-1	-7.99274E-1	-9.13157E0	-9.1424E0	4.48227E-3	9.5129E-2	2.7329E1	-3.26966E1	-3.26197E1	2.68272E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.19421E-1	-7.99131E-1	-9.13146E0	-9.14276E0	4.43459E-3	9.50813E-2	2.73038E1	-3.2654E1	-3.26349E1	2.68199E1	1.20042E-7	2.51498E-3	2.51498E-3	6.33388E-3	3.00097E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.19492E-1	-7.98893E-1	-9.13141E0	-9.14273E0	4.74453E-3	9.53436E-2	2.73263E1	-3.26803E1	-3.26549E1	2.67705E1	1.19785E-7	2.51874E-3	2.51874E-3	6.33065E-3	2.99535E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.19683E-1	-7.98655E-1	-9.13131E0	-9.14245E0	4.74453E-3	9.50575E-2	2.72999E1	-3.26306E1	-3.26463E1	2.68487E1	1.19953E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00966E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.19683E-1	-7.98821E-1	-9.13165E0	-9.14259E0	4.24385E-3	9.48429E-2	2.73255E1	-3.26422E1	-3.26062E1	2.68298E1	1.19979E-7	2.51783E-3	2.51783E-3	6.323E-3	3.0E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.19635E-1	-7.98702E-1	-9.13153E0	-9.14264E0	4.673E-3	9.5129E-2	2.73564E1	-3.26296E1	-3.26172E1	2.68538E1	1.19861E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01085E-1
