[Scan]
initial_time=2016-01-18T21:12:22
final_time=2016-01-18T21:12:41
ip_count=19
run=1024
dataset=8
scan=570
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09309E0
qbias_imon=-1.08698E-4
ql1_vset=
ql1_vmon=-8.18038E-1
ql1_imon=1.39434E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.96217E-9
ql3_vset=
ql3_vmon=-9.13193E0
ql3_imon=8.44073E-10
ql4_vset=
ql4_vmon=-9.14242E0
ql4_imon=-1.59943E-10
mult1=-1.02914E-8
mult2=-2.84084E-9
rf_tmon=-4.65695E-3
rf_agc=3.37751E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.65908E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62669E0
bslens_imon=2.34505E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19659E1
lens5a_imon=2.01943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04937E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=3.17047E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04734E1
cs_ea1_imon=1.10449E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36253E0
lens1_imon=2.90428E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03796E1
cs_ea2_imon=1.34482E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=3.0519E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.28863E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.28265E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1504E1
os_ea1_imon=2.40062E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22496E0
cs_ionrep_imon=9.45218E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91974E2
cs_nozzle_imon=1.93565E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=1.96278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.29292E-8
tplens_vset=1.4E-1
tplens_vmon=1.65736E0
tplens_imon=-3.44899E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26136E1
iondef3_imon=1.52568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26378E1
iondef2_imon=1.5678E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98112E-4
ql6_vset=1.0E-1
ql6_vmon=9.46522E-2
ql6_imon=4.02011E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27746E0
ionrepsh_imon=8.35143E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.18401E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49219E0
os_ea2_imon=-8.40417E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00701E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.17191E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10682E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16044E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11195E1
os_restr2_imon=3.41698E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.29008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.08603E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.12856E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68635E1
iondef4_imon=1.11116E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.90204E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.6107E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55756E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.41369E-1
window_imon=-6.58946E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.8659E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.44888E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.57111E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.59753E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=6.21009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.41928E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0793E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64304E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31823E1
cs_fil1_imon=6.9386E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.95993E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67029E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.36564E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14533E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.79239E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.10135E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22388E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31651E-3
inlet_lpb_pmon=3.00848E-1
chamber_ion_pmon=1.1998E-7
chamber_cvt_pmon=2.5202E-3
foreline_cvt_pmon=2.5202E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0314E-1
res40_imon=-2.37443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09348E0	-8.18801E-1	-7.98535E-1	-9.13143E0	-9.14259E0	4.60148E-3	9.47475E-2	2.73476E1	-3.26579E1	-3.26272E1	2.68047E1	1.20209E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.97647E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09333E0	-8.18467E-1	-7.98869E-1	-9.13157E0	-9.14276E0	4.673E-3	9.47952E-2	2.73326E1	-3.26828E1	-3.26216E1	2.68662E1	1.19953E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09325E0	-8.1799E-1	-7.98845E-1	-9.13165E0	-9.14223E0	4.88758E-3	9.47714E-2	2.7326E1	-3.26677E1	-3.26023E1	2.68273E1	1.19829E-7	2.51384E-3	2.51384E-3	6.33021E-3	2.9944E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-8.18157E-1	-7.9906E-1	-9.13141E0	-9.14264E0	4.62532E-3	9.48906E-2	2.73458E1	-3.26803E1	-3.26248E1	2.68028E1	1.19891E-7	2.52342E-3	2.52342E-3	6.32858E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09294E0	-8.18253E-1	-7.98559E-1	-9.13169E0	-9.14285E0	4.673E-3	9.46999E-2	2.72997E1	-3.26374E1	-3.26122E1	2.68672E1	1.19749E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09255E0	-8.18467E-1	-7.98869E-1	-9.13198E0	-9.14237E0	4.60148E-3	9.50575E-2	2.72751E1	-3.26308E1	-3.26248E1	2.68174E1	1.19705E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09271E0	-8.18419E-1	-7.98917E-1	-9.13212E0	-9.14249E0	4.673E-3	9.50575E-2	2.73458E1	-3.26514E1	-3.26189E1	2.70115E1	1.20122E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09317E0	-8.18276E-1	-7.99179E-1	-9.13177E0	-9.14264E0	4.62532E-3	9.50575E-2	2.73015E1	-3.26597E1	-3.26314E1	2.69133E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09294E0	-8.18133E-1	-7.99036E-1	-9.13188E0	-9.14259E0	4.43459E-3	9.47475E-2	2.73165E1	-3.26711E1	-3.26224E1	2.67944E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.18205E-1	-7.98941E-1	-9.1315E0	-9.1424E0	4.60148E-3	9.48429E-2	2.73592E1	-3.26681E1	-3.25876E1	2.68526E1	1.19601E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.97963E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09286E0	-8.18014E-1	-7.98678E-1	-9.1316E0	-9.14299E0	4.43459E-3	9.49621E-2	2.73363E1	-3.26663E1	-3.26488E1	2.6792E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09325E0	-8.18157E-1	-7.98535E-1	-9.13162E0	-9.14278E0	4.24385E-3	9.49383E-2	2.73309E1	-3.26843E1	-3.26032E1	2.68659E1	1.20174E-7	2.52209E-3	2.52209E-3	6.34588E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09309E0	-8.183E-1	-7.98702E-1	-9.13177E0	-9.14266E0	4.41074E-3	9.46999E-2	2.73286E1	-3.26501E1	-3.26109E1	2.67159E1	1.20268E-7	2.52289E-3	2.52289E-3	6.2942E-3	3.006E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.18181E-1	-7.99036E-1	-9.13203E0	-9.14242E0	4.45843E-3	9.49383E-2	2.73278E1	-3.26799E1	-3.25773E1	2.70657E1					
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.18419E-1	-7.98774E-1	-9.13198E0	-9.14218E0	4.55379E-3	9.48906E-2	2.73381E1	-3.26591E1	-3.25779E1	2.68617E1	1.19963E-7	2.51911E-3	2.51911E-3	6.31925E-3	3.01892E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09333E0	-8.18276E-1	-7.98631E-1	-9.13184E0	-9.14228E0	4.45843E-3	9.49383E-2	2.73087E1	-3.26849E1	-3.26158E1	2.68298E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0924E0	-8.18276E-1	-7.98535E-1	-9.13167E0	-9.14218E0	4.48227E-3	9.50098E-2	2.73033E1	-3.26868E1	-3.2652E1	2.68178E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-8.17966E-1	-7.98798E-1	-9.13165E0	-9.14216E0	4.3869E-3	9.50813E-2	2.73303E1	-3.26807E1	-3.26194E1	2.68496E1	1.20106E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.99686E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.178E-1	-7.98893E-1	-9.13172E0	-9.14261E0	4.3869E-3	9.47475E-2	2.73132E1	-3.26777E1	-3.26331E1	2.68077E1	1.20174E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09309E0	-8.18038E-1	-7.98655E-1	-9.13193E0	-9.14242E0	4.24385E-3	9.46522E-2	2.73021E1	-3.26378E1	-3.26136E1	2.68635E1	1.1998E-7	2.5202E-3	2.5202E-3	6.31651E-3	3.00848E-1
