[Scan]
initial_time=2016-01-18T21:15:28
final_time=2016-01-18T21:15:48
ip_count=19
run=1024
dataset=8
scan=577
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.17561E-1
ql1_imon=1.38761E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.9173E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=4.70507E-10
ql4_vset=
ql4_vmon=-9.14254E0
ql4_imon=-1.34182E-10
mult1=-9.80059E-9
mult2=-2.73458E-9
rf_tmon=-4.37423E-3
rf_agc=3.43309E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.68977E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69077E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19658E1
lens5a_imon=2.02741E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.04765E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=3.1629E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02244E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04591E1
cs_ea1_imon=1.09589E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41942E0
lens1_imon=2.60264E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.37347E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=3.0555E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.28558E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.27977E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.39295E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.10091E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25811E0
cs_ionrep_imon=9.67916E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=1.94079E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.30114E-8
tplens_vset=1.4E-1
tplens_vmon=1.67628E0
tplens_imon=-2.52482E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26609E1
iondef3_imon=1.51479E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2644E1
iondef2_imon=1.55949E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=4.04102E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.1626E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.14488E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48882E0
os_ea2_imon=-5.51693E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00684E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.40327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25655E-1
os_ef2bup_imon=-4.9801E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11394E1
os_restr2_imon=3.4231E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.31118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.10117E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.10923E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68514E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.98035E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.59793E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-8.67976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56754E1
einzel_imon=8.1059E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-7.20213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86638E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.67481E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.67263E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.11965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26021E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33263E1
os_fil1_imon=9.41837E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07948E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64435E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31815E1
cs_fil1_imon=7.10078E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.43134E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67064E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.24738E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22341E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.64271E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.02927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.7549E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22348E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.90526E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=194
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.17728E-1	-7.98607E-1	-9.13174E0	-9.14273E0	4.57764E-3	9.46999E-2	2.73433E1	-3.2655E1	-3.26405E1	2.68453E1	1.19544E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00197E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.17895E-1	-7.98559E-1	-9.13184E0	-9.14268E0	4.52995E-3	9.4533E-2	2.7312E1	-3.26553E1	-3.25979E1	2.68419E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.18133E-1	-7.98535E-1	-9.13196E0	-9.14264E0	4.45843E-3	9.45568E-2	2.73103E1	-3.26602E1	-3.2597E1	2.68383E1	1.20084E-7	2.51136E-3	2.51136E-3	6.30182E-3	2.99348E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.17776E-1	-7.98583E-1	-9.13208E0	-9.14295E0	4.79221E-3	9.46045E-2	2.73175E1	-3.26649E1	-3.26183E1	2.6819E1	1.19941E-7	2.52236E-3	2.52236E-3	6.29157E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.17704E-1	-7.98392E-1	-9.13203E0	-9.14299E0	4.76837E-3	9.47237E-2	2.73165E1	-3.26705E1	-3.26326E1	2.68484E1	1.19749E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.17657E-1	-7.98655E-1	-9.1316E0	-9.14276E0	4.64916E-3	9.51529E-2	2.73517E1	-3.26903E1	-3.2603E1	2.68094E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.17513E-1	-7.98845E-1	-9.13205E0	-9.14242E0	4.50611E-3	9.49144E-2	2.73021E1	-3.26837E1	-3.26062E1	2.6828E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.17752E-1	-7.98821E-1	-9.13181E0	-9.1423E0	4.43459E-3	9.47952E-2	2.73442E1	-3.26879E1	-3.25972E1	2.68947E1	1.19965E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.02922E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.17466E-1	-7.98702E-1	-9.13174E0	-9.14233E0	4.3869E-3	9.51529E-2	2.73321E1	-3.26693E1	-3.26008E1	2.67211E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.17394E-1	-7.98678E-1	-9.13174E0	-9.14237E0	4.62532E-3	9.53197E-2	2.72925E1	-3.26368E1	-3.26747E1	2.68731E1	1.19809E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.1749E-1	-7.98583E-1	-9.13167E0	-9.14252E0	4.55379E-3	9.49383E-2	2.73794E1	-3.2636E1	-3.26119E1	2.68508E1	1.19965E-7	2.52099E-3	2.52099E-3	6.28006E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.17657E-1	-7.98464E-1	-9.13198E0	-9.14261E0	4.48227E-3	9.50336E-2	2.73586E1	-3.26735E1	-3.26062E1	2.68076E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.17728E-1	-7.98631E-1	-9.13198E0	-9.14235E0	4.62532E-3	9.47952E-2	2.73189E1	-3.26765E1	-3.26104E1	2.6849E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.03545E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17513E-1	-7.98607E-1	-9.13193E0	-9.14295E0	4.64916E-3	9.48429E-2	2.73129E1	-3.26807E1	-3.26609E1	2.6822E1	1.20084E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.01742E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.1768E-1	-7.98464E-1	-9.13215E0	-9.14254E0	4.55379E-3	9.48191E-2	2.73466E1	-3.265E1	-3.26116E1	2.68466E1	1.19749E-7	2.52707E-3	2.52707E-3	6.33977E-3	3.01223E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.17657E-1	-7.98941E-1	-9.1321E0	-9.14228E0	4.72069E-3	9.47237E-2	2.7361E1	-3.26452E1	-3.26386E1	2.6828E1	1.19653E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.99E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.17418E-1	-7.98512E-1	-9.13193E0	-9.1424E0	4.62532E-3	9.48191E-2	2.72991E1	-3.26687E1	-3.2629E1	2.68406E1	1.19913E-7	2.52209E-3	2.52209E-3	6.29098E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.17537E-1	-7.98678E-1	-9.13174E0	-9.14247E0	4.8399E-3	9.46283E-2	2.73299E1	-3.26885E1	-3.26036E1	2.6807E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.1768E-1	-7.98512E-1	-9.13215E0	-9.14276E0	4.24385E-3	9.48668E-2	2.73564E1	-3.26478E1	-3.26107E1	2.68749E1	1.19861E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.17561E-1	-7.9875E-1	-9.132E0	-9.14254E0	4.52995E-3	9.48191E-2	2.73039E1	-3.2644E1	-3.26609E1	2.68514E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00453E-1
