[Scan]
initial_time=2016-01-18T21:17:41
final_time=2016-01-18T21:18:01
ip_count=19
run=1024
dataset=8
scan=582
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08842E-4
ql1_vset=
ql1_vmon=-8.17561E-1
ql1_imon=1.38165E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.96602E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=4.04751E-10
ql4_vset=
ql4_vmon=-9.14257E0
ql4_imon=-1.13237E-10
mult1=-9.72835E-9
mult2=-2.76053E-9
rf_tmon=-4.96304E-3
rf_agc=3.35619E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.72431E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65688E0
bslens_imon=2.65325E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19658E1
lens5a_imon=2.01586E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=3.15173E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04749E1
cs_ea1_imon=1.10497E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39031E0
lens1_imon=2.62754E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.99856E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.038E1
cs_ea2_imon=1.35656E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.0227E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.27978E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.27833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.39087E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2423E0
cs_ionrep_imon=9.69801E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93887E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02073E1
cs_anode1_imon=1.96314E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.28653E-8
tplens_vset=1.4E-1
tplens_vmon=1.68551E0
tplens_imon=-2.52073E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26188E1
iondef3_imon=1.50275E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26488E1
iondef2_imon=1.57474E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02941E2
lens6_imon=2.98147E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.03172E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30046E0
ionrepsh_imon=8.49694E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33811E1
lens5b_imon=2.18409E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.14776E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51227E0
os_ea2_imon=-8.25057E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.096E0
os_ef2alow_imon=-2.3456E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11177E1
os_restr2_imon=3.40941E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.31067E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.08243E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7361E1
iondef1_imon=1.11084E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6852E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.92115E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.5917E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-8.10312E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56994E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.52181E-1
window_imon=-7.88688E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82678E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86296E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92707E3
multa_neg_imon=7.4979E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.80738E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.60809E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.6395E0
defgridb_imon=6.11319E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33262E1
os_fil1_imon=9.44685E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07443E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64168E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31798E1
cs_fil1_imon=6.80646E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.04692E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66765E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.33012E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14533E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.83671E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.90623E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22305E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.50898E-3
foreline_cvt_pmon=2.50898E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.86632E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=221
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.17537E-1	-7.98082E-1	-9.13174E0	-9.14278E0	4.64916E-3	9.52244E-2	2.73281E1	-3.26596E1	-3.25829E1	2.68334E1	1.20191E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.00942E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09333E0	-8.17323E-1	-7.98202E-1	-9.13186E0	-9.14261E0	4.48227E-3	9.50575E-2	2.73302E1	-3.26432E1	-3.2604E1	2.67752E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.17442E-1	-7.98178E-1	-9.13205E0	-9.14259E0	4.43459E-3	9.49144E-2	2.7308E1	-3.26797E1	-3.26319E1	2.68268E1	1.20031E-7	2.51248E-3	2.51248E-3	6.33538E-3	3.02277E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.17871E-1	-7.98321E-1	-9.13169E0	-9.1428E0	4.26769E-3	9.47475E-2	2.73093E1	-3.26518E1	-3.2632E1	2.68581E1	1.19749E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.17585E-1	-7.98273E-1	-9.13167E0	-9.14266E0	4.3869E-3	9.50336E-2	2.73303E1	-3.26639E1	-3.26543E1	2.68134E1	1.19861E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.17394E-1	-7.98392E-1	-9.1315E0	-9.1424E0	4.19617E-3	9.48191E-2	2.73153E1	-3.26464E1	-3.26446E1	2.68824E1	1.20122E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.17752E-1	-7.98607E-1	-9.13179E0	-9.14268E0	4.31538E-3	9.4986E-2	2.73669E1	-3.26597E1	-3.26211E1	2.6816E1	1.19965E-7	2.51552E-3	2.51552E-3	6.35692E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.17561E-1	-7.98678E-1	-9.13167E0	-9.14261E0	4.26769E-3	9.52244E-2	2.73502E1	-3.26308E1	-3.26434E1	2.68142E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.17847E-1	-7.9844E-1	-9.13169E0	-9.14295E0	4.07696E-3	9.48906E-2	2.73263E1	-3.26354E1	-3.26254E1	2.68629E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.17466E-1	-7.98225E-1	-9.13174E0	-9.1423E0	4.64916E-3	9.4986E-2	2.73364E1	-3.27027E1	-3.26296E1	2.68545E1	1.19902E-7	2.51096E-3	2.51096E-3	6.33977E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.17704E-1	-7.98464E-1	-9.13172E0	-9.14245E0	4.79221E-3	9.48668E-2	2.73099E1	-3.265E1	-3.26669E1	2.68058E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99175E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.17752E-1	-7.98273E-1	-9.13162E0	-9.14245E0	4.50611E-3	9.51767E-2	2.73424E1	-3.26398E1	-3.26194E1	2.6837E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.17752E-1	-7.98416E-1	-9.13174E0	-9.14242E0	4.72069E-3	9.46999E-2	2.73448E1	-3.27155E1	-3.26038E1	2.67878E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.17728E-1	-7.98273E-1	-9.13162E0	-9.14223E0	4.74453E-3	9.49144E-2	2.73628E1	-3.26837E1	-3.25978E1	2.67932E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.17299E-1	-7.98249E-1	-9.13186E0	-9.14257E0	4.52995E-3	9.4676E-2	2.73484E1	-3.26927E1	-3.25785E1	2.68454E1	1.19705E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.17251E-1	-7.98368E-1	-9.132E0	-9.14257E0	4.19617E-3	9.51529E-2	2.73207E1	-3.26915E1	-3.26062E1	2.68322E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.1718E-1	-7.98154E-1	-9.13162E0	-9.1428E0	4.31538E-3	9.4986E-2	2.73363E1	-3.26567E1	-3.26176E1	2.67295E1	1.20174E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.17323E-1	-7.9844E-1	-9.13153E0	-9.14264E0	4.14848E-3	9.48906E-2	2.73827E1	-3.26897E1	-3.26428E1	2.69553E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.17323E-1	-7.98178E-1	-9.13143E0	-9.14264E0	4.45843E-3	9.47714E-2	2.72997E1	-3.26092E1	-3.26422E1	2.67998E1	1.20142E-7	2.51919E-3	2.51919E-3	6.32858E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.17561E-1	-7.98321E-1	-9.13143E0	-9.14257E0	4.43459E-3	9.50813E-2	2.7361E1	-3.26488E1	-3.26188E1	2.6852E1	1.19913E-7	2.50898E-3	2.50898E-3	6.29098E-3	3.00302E-1
