[Scan]
initial_time=2016-01-18T21:19:28
final_time=2016-01-18T21:19:47
ip_count=19
run=1024
dataset=8
scan=586
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.17299E-1
ql1_imon=1.3807E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.99709E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=2.63107E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-1.48368E-10
mult1=-9.28657E-9
mult2=-2.6723E-9
rf_tmon=-6.58593E-3
rf_agc=3.1799E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.65021E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69217E0
bslens_imon=2.36983E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19571E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04874E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=3.15837E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02521E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=1.08927E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3761E0
lens1_imon=2.81933E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6484E1
os_ef1alow_imon=2.97418E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03437E1
cs_ea2_imon=1.33845E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84267E1
cs_ef1a_imon=3.05272E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.27969E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11401E1
os_restr1_imon=4.27914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14828E1
os_ea1_imon=2.41018E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63745E1
os_ef1bup_imon=3.08261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25151E0
cs_ionrep_imon=9.53005E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91958E2
cs_nozzle_imon=1.93583E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=1.97018E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.29076E-8
tplens_vset=1.4E-1
tplens_vmon=1.64674E0
tplens_imon=-4.05069E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.50232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26767E1
iondef2_imon=1.55046E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98162E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=4.06481E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26272E0
ionrepsh_imon=8.86818E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34017E1
lens5b_imon=2.16561E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74455E1
cs_ef2b_imon=3.13196E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48806E0
os_ea2_imon=-7.97944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00793E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71165E1
cs_ef2a_imon=3.16879E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04645E0
os_ef2alow_imon=-2.38692E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.25053E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11228E1
os_restr2_imon=3.41415E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.31025E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01757E1
cs_anode2_imon=2.08278E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73611E1
iondef1_imon=1.09989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69115E1
iondef4_imon=1.1031E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.87754E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.57782E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47539E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55919E1
einzel_imon=7.76082E-6
window_vset=0.0E0
window_vmon=2.83136E-1
window_imon=-6.84045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39227E-4
mask2_vset=0.0E0
mask2_vmon=-1.86535E1
mask2_imon=-6.38866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.34624E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.73746E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.16219E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.34104E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33244E1
os_fil1_imon=9.42038E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07949E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64064E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31829E1
cs_fil1_imon=6.95726E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.58687E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66708E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.53597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.99868E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-2.28691E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39107E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22263E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.69835E-1
res40_imon=-2.36259E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.17609E-1	-7.98154E-1	-9.13153E0	-9.1428E0	4.673E-3	9.52244E-2	2.73305E1	-3.26738E1	-3.2616E1	2.68364E1	1.20055E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00197E-1
2.0E0	3.5E1	2.0E0	3.16E2	1.6E2	-2.09402E0	-8.17537E-1	-7.98488E-1	-9.13141E0	-9.14266E0	4.91142E-3	9.53197E-2	2.72995E1	-3.26298E1	-3.25836E1	2.68671E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.17442E-1	-7.98535E-1	-9.1315E0	-9.1428E0	5.03063E-3	9.49621E-2	2.73161E1	-3.26839E1	-3.26243E1	2.6801E1	1.20244E-7	2.5225E-3	2.5225E-3	6.31299E-3	2.98026E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09364E0	-8.17537E-1	-7.98631E-1	-9.13162E0	-9.14276E0	4.76837E-3	9.4986E-2	2.73075E1	-3.26554E1	-3.26266E1	2.6804E1	1.2026E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.17776E-1	-7.98535E-1	-9.13153E0	-9.14252E0	4.60148E-3	9.48429E-2	2.73134E1	-3.26608E1	-3.26337E1	2.68939E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.17609E-1	-7.98607E-1	-9.13138E0	-9.14261E0	4.57764E-3	9.50575E-2	2.73087E1	-3.26693E1	-3.25984E1	2.69103E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.17513E-1	-7.98702E-1	-9.13157E0	-9.14268E0	4.52995E-3	9.51767E-2	2.73285E1	-3.26338E1	-3.26464E1	2.67205E1	1.20017E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.18038E-1	-7.98631E-1	-9.13155E0	-9.14249E0	4.91142E-3	9.48191E-2	2.73159E1	-3.26783E1	-3.2626E1	2.69343E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.178E-1	-7.98607E-1	-9.13143E0	-9.14252E0	4.88758E-3	9.48191E-2	2.73175E1	-3.26378E1	-3.26301E1	2.6831E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.1799E-1	-7.98821E-1	-9.13136E0	-9.14249E0	4.8399E-3	9.52482E-2	2.73141E1	-3.26951E1	-3.2632E1	2.6876E1	1.20055E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.98156E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.17871E-1	-7.98535E-1	-9.13155E0	-9.14261E0	4.64916E-3	9.47952E-2	2.73334E1	-3.26484E1	-3.26461E1	2.68028E1	1.20055E-7	2.51847E-3	2.51847E-3	6.35059E-3	3.00197E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.17752E-1	-7.98416E-1	-9.1316E0	-9.14264E0	4.69685E-3	9.50336E-2	2.73249E1	-3.26506E1	-3.26206E1	2.6798E1	1.20383E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.17585E-1	-7.98559E-1	-9.13165E0	-9.14245E0	4.673E-3	9.48191E-2	2.73093E1	-3.26639E1	-3.26278E1	2.68352E1	1.20435E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.17537E-1	-7.98368E-1	-9.1316E0	-9.14257E0	4.673E-3	9.4676E-2	2.73411E1	-3.26795E1	-3.26452E1	2.68388E1	1.19861E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.1749E-1	-7.98559E-1	-9.13172E0	-9.14283E0	4.50611E-3	9.50336E-2	2.73399E1	-3.26422E1	-3.25972E1	2.66556E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09317E0	-8.17394E-1	-7.9875E-1	-9.13141E0	-9.14245E0	4.52995E-3	9.4676E-2	2.73213E1	-3.26122E1	-3.2638E1	2.66767E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.01085E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.17394E-1	-7.98678E-1	-9.13155E0	-9.14266E0	4.86374E-3	9.49621E-2	2.73435E1	-3.26795E1	-3.26062E1	2.6986E1	1.19913E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.17513E-1	-7.98488E-1	-9.13146E0	-9.14278E0	4.29153E-3	9.4986E-2	2.73204E1	-3.26708E1	-3.2603E1	2.69037E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.17347E-1	-7.98678E-1	-9.13153E0	-9.14288E0	4.60148E-3	9.46999E-2	2.7346E1	-3.26807E1	-3.26212E1	2.67149E1	1.20055E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-8.17299E-1	-7.98655E-1	-9.13148E0	-9.14283E0	4.36306E-3	9.52721E-2	2.73611E1	-3.26767E1	-3.2626E1	2.69115E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1
