[Scan]
initial_time=2016-01-18T21:20:21
final_time=2016-01-18T21:20:40
ip_count=19
run=1024
dataset=8
scan=588
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09302E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.17275E-1
ql1_imon=1.38067E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.95094E-9
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=3.06392E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=-1.10483E-10
mult1=-8.77714E-9
mult2=-2.73258E-9
rf_tmon=-4.89695E-3
rf_agc=3.38323E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.71103E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.75916E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19476E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.04976E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=3.1683E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02333E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04339E1
cs_ea1_imon=1.10945E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38967E0
lens1_imon=2.84057E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03785E1
cs_ea2_imon=1.35862E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84178E1
cs_ef1a_imon=3.04685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.28254E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.27761E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14928E1
os_ea1_imon=2.39319E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28631E0
cs_ionrep_imon=9.59376E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93703E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=1.96818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.28762E-8
tplens_vset=1.4E-1
tplens_vmon=1.68273E0
tplens_imon=-3.34281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25972E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98229E-4
ql6_vset=1.0E-1
ql6_vmon=9.46045E-2
ql6_imon=4.03252E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3105E0
ionrepsh_imon=8.51778E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3351E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48157E0
os_ea2_imon=-5.60803E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.16686E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0942E0
os_ef2alow_imon=-2.38164E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.17832E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.42094E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.29893E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.09036E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.10697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69103E1
iondef4_imon=1.10864E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.91717E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.56025E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15297E0
cs_ionaccel_imon=-9.18431E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02039E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56772E1
einzel_imon=7.8356E-6
window_vset=0.0E0
window_vmon=2.35963E-1
window_imon=-7.27421E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86626E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.50905E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9367E3
defgrida_imon=6.76223E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.4595E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55911E0
defgridb_imon=6.0048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.42991E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06765E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64133E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31814E1
cs_fil1_imon=7.91167E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.23313E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66726E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75822E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.16742E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47859E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22249E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31321E-3
inlet_lpb_pmon=2.99535E-1
chamber_ion_pmon=1.1984E-7
chamber_cvt_pmon=2.51065E-3
foreline_cvt_pmon=2.51065E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.78513E-1
res40_imon=-2.42489E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.17537E-1	-7.98249E-1	-9.13179E0	-9.14247E0	4.72069E-3	9.52959E-2	2.73323E1	-3.26249E1	-3.26469E1	2.68435E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99686E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.17347E-1	-7.9813E-1	-9.13188E0	-9.14276E0	4.74453E-3	9.52959E-2	2.73269E1	-3.26641E1	-3.25773E1	2.66629E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-8.17347E-1	-7.98416E-1	-9.13184E0	-9.14283E0	4.74453E-3	9.56774E-2	2.73057E1	-3.26434E1	-3.26266E1	2.68725E1	1.19883E-7	2.51611E-3	2.51611E-3	6.29603E-3	2.9971E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.17323E-1	-7.98273E-1	-9.13167E0	-9.14278E0	4.79221E-3	9.51052E-2	2.73198E1	-3.26585E1	-3.26201E1	2.69007E1	1.20078E-7	2.51679E-3	2.51679E-3	6.3074E-3	3.00247E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17132E-1	-7.98488E-1	-9.13174E0	-9.14288E0	4.50611E-3	9.49621E-2	2.73277E1	-3.26425E1	-3.2656E1	2.68418E1	1.19809E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.17585E-1	-7.98678E-1	-9.13186E0	-9.14259E0	4.57764E-3	9.48668E-2	2.72997E1	-3.26458E1	-3.2629E1	2.6855E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17299E-1	-7.98488E-1	-9.13169E0	-9.14278E0	4.72069E-3	9.47475E-2	2.7334E1	-3.26437E1	-3.25865E1	2.67061E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.17323E-1	-7.98845E-1	-9.13148E0	-9.14228E0	4.62532E-3	9.47237E-2	2.73051E1	-3.26302E1	-3.26248E1	2.66773E1	1.20122E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.1737E-1	-7.98798E-1	-9.13153E0	-9.14307E0	4.8399E-3	9.46999E-2	2.73033E1	-3.26524E1	-3.26332E1	2.68184E1	1.19861E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.17227E-1	-7.98583E-1	-9.1316E0	-9.14259E0	4.29153E-3	9.51052E-2	2.73484E1	-3.26573E1	-3.2599E1	2.69194E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99941E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.17156E-1	-7.98583E-1	-9.13157E0	-9.14311E0	4.3869E-3	9.49144E-2	2.73063E1	-3.26443E1	-3.26537E1	2.67187E1	1.20069E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.1718E-1	-7.98869E-1	-9.13174E0	-9.14218E0	4.62532E-3	9.49383E-2	2.73021E1	-3.26723E1	-3.26074E1	2.68743E1	1.19653E-7	2.52428E-3	2.52428E-3	6.33486E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.17275E-1	-7.98941E-1	-9.13203E0	-9.14259E0	4.62532E-3	9.50098E-2	2.73279E1	-3.26819E1	-3.26374E1	2.67794E1	1.20226E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.01085E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.17442E-1	-7.98535E-1	-9.13208E0	-9.14249E0	4.55379E-3	9.48906E-2	2.73021E1	-3.26873E1	-3.26212E1	2.67151E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09371E0	-8.17275E-1	-7.98416E-1	-9.13186E0	-9.14221E0	4.673E-3	9.52005E-2	2.73175E1	-3.26767E1	-3.26307E1	2.6953E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0934E0	-8.1737E-1	-7.98607E-1	-9.13162E0	-9.14266E0	4.55379E-3	9.48191E-2	2.73273E1	-3.26561E1	-3.2626E1	2.6828E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.9926E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.17204E-1	-7.98512E-1	-9.13208E0	-9.14271E0	5.126E-3	9.48906E-2	2.73135E1	-3.26591E1	-3.26032E1	2.68713E1	1.20017E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-8.17299E-1	-7.98273E-1	-9.13217E0	-9.14237E0	4.86374E-3	9.50098E-2	2.7328E1	-3.2631E1	-3.26176E1	2.67808E1	1.19595E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.98665E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.17442E-1	-7.9844E-1	-9.13184E0	-9.14242E0	4.64916E-3	9.49383E-2	2.73223E1	-3.26292E1	-3.264E1	2.69256E1	1.20016E-7	2.51549E-3	2.51549E-3	6.31251E-3	2.98454E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09302E0	-8.17275E-1	-7.98559E-1	-9.13181E0	-9.14223E0	4.62532E-3	9.46045E-2	2.73267E1	-3.26591E1	-3.25972E1	2.69103E1	1.1984E-7	2.51065E-3	2.51065E-3	6.31321E-3	2.99535E-1
