[Scan]
initial_time=2016-01-18T21:21:14
final_time=2016-01-18T21:21:34
ip_count=19
run=1024
dataset=8
scan=590
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=1.37846E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=1.98751E-9
ql3_vset=
ql3_vmon=-9.13193E0
ql3_imon=2.93684E-10
ql4_vset=
ql4_vmon=-9.14273E0
ql4_imon=-1.16646E-10
mult1=-9.69609E-9
mult2=-2.81344E-9
rf_tmon=-4.36857E-3
rf_agc=3.37508E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.71831E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67801E0
bslens_imon=2.48309E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19706E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53995E1
cs_ef1b_imon=3.16326E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02418E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04723E1
cs_ea1_imon=1.10131E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38908E0
lens1_imon=2.70607E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03826E1
cs_ea2_imon=1.3434E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=3.03676E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.27869E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11628E1
os_restr1_imon=4.27833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1507E1
os_ea1_imon=2.41761E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=9.35308E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93703E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=1.95737E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.28034E-8
tplens_vset=1.4E-1
tplens_vmon=1.68627E0
tplens_imon=-2.35178E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2607E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26689E1
iondef2_imon=1.55824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98148E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=4.02578E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29929E0
ionrepsh_imon=8.50008E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33445E1
lens5b_imon=2.17127E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49632E0
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.0081E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.46453E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28058E-1
os_ef2bup_imon=-5.08101E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11334E1
os_restr2_imon=3.42274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.09108E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72996E1
iondef1_imon=1.09847E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68671E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.0094E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.5621E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-8.60768E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02125E2
cs_ionfocb_imon=1.47486E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55534E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.48577E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82676E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.86008E1
mask2_imon=-5.00371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.5763E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.6065E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.12679E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45576E0
defgridb_imon=6.05789E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.41069E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07575E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64302E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31835E1
cs_fil1_imon=6.89055E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.64158E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66683E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.24363E-2
os_fil2_imon=-2.23349E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.2114E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.77594E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.11336E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.60473E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22336E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20383E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.92639E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.1749E-1	-7.98416E-1	-9.13167E0	-9.14268E0	4.62532E-3	9.55105E-2	2.73228E1	-3.26608E1	-3.26284E1	2.67966E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.00453E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.17227E-1	-7.98321E-1	-9.13162E0	-9.14273E0	4.48227E-3	9.53197E-2	2.73498E1	-3.26591E1	-3.26456E1	2.69523E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.17275E-1	-7.98202E-1	-9.13196E0	-9.14302E0	4.55379E-3	9.53674E-2	2.72986E1	-3.26331E1	-3.2649E1	2.67503E1	1.20297E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.99613E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.17466E-1	-7.98059E-1	-9.13169E0	-9.14285E0	4.52995E-3	9.55105E-2	2.73187E1	-3.26779E1	-3.26496E1	2.67247E1	1.19749E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.17251E-1	-7.98535E-1	-9.13157E0	-9.14261E0	4.52995E-3	9.53674E-2	2.73424E1	-3.26885E1	-3.26476E1	2.68563E1	1.19595E-7	2.50775E-3	2.50775E-3	6.31278E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.17084E-1	-7.98583E-1	-9.1315E0	-9.14259E0	4.81606E-3	9.5582E-2	2.73213E1	-3.26873E1	-3.2632E1	2.68447E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.17132E-1	-7.98678E-1	-9.13153E0	-9.14257E0	4.74453E-3	9.52482E-2	2.73189E1	-3.26783E1	-3.26086E1	2.68268E1	1.19601E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.17347E-1	-7.98774E-1	-9.13162E0	-9.14233E0	4.48227E-3	9.50575E-2	2.73255E1	-3.26296E1	-3.26422E1	2.67836E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98222E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.17037E-1	-7.98345E-1	-9.13155E0	-9.14257E0	4.62532E-3	9.51529E-2	2.7344E1	-3.26614E1	-3.2603E1	2.68827E1	1.19913E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.17251E-1	-7.98583E-1	-9.13153E0	-9.14292E0	4.64916E-3	9.5129E-2	2.73544E1	-3.26506E1	-3.2587E1	2.68563E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9952E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.17156E-1	-7.98845E-1	-9.13162E0	-9.14247E0	4.62532E-3	9.5129E-2	2.73333E1	-3.26909E1	-3.26164E1	2.68172E1	1.19749E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.17561E-1	-7.98488E-1	-9.13191E0	-9.14288E0	4.57764E-3	9.52482E-2	2.73122E1	-3.26832E1	-3.26366E1	2.6777E1	1.19887E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.9991E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.17418E-1	-7.98512E-1	-9.13198E0	-9.14271E0	4.50611E-3	9.51052E-2	2.7278E1	-3.26844E1	-3.26136E1	2.6836E1					
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.17394E-1	-7.98512E-1	-9.13191E0	-9.14228E0	4.86374E-3	9.53436E-2	2.72971E1	-3.26566E1	-3.26107E1	2.67914E1	1.19953E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.17132E-1	-7.98488E-1	-9.13186E0	-9.14292E0	4.76837E-3	9.52721E-2	2.73039E1	-3.26492E1	-3.26098E1	2.68991E1	1.19601E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16965E-1	-7.98321E-1	-9.1321E0	-9.14271E0	4.81606E-3	9.52721E-2	2.73628E1	-3.26747E1	-3.2611E1	2.67408E1	1.19891E-7	2.51709E-3	2.51709E-3	6.29157E-3	2.98842E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.17323E-1	-7.98249E-1	-9.13169E0	-9.14247E0	4.74453E-3	9.51767E-2	2.73063E1	-3.26621E1	-3.26104E1	2.70225E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.17394E-1	-7.98178E-1	-9.13179E0	-9.14288E0	4.45843E-3	9.51529E-2	2.73335E1	-3.26556E1	-3.26063E1	2.68215E1	1.19876E-7	2.52008E-3	2.52008E-3	6.32626E-3	2.99686E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.17418E-1	-7.98202E-1	-9.13174E0	-9.14245E0	4.48227E-3	9.4986E-2	2.73228E1	-3.26301E1	-3.26183E1	2.68731E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16894E-1	-7.98678E-1	-9.13193E0	-9.14273E0	4.60148E-3	9.52721E-2	2.72996E1	-3.26689E1	-3.2607E1	2.68671E1	1.20383E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00563E-1
