[Scan]
initial_time=2016-01-18T21:22:08
final_time=2016-01-18T21:22:27
ip_count=19
run=1024
dataset=8
scan=592
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.16941E-1
ql1_imon=1.38043E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=1.98541E-9
ql3_vset=
ql3_vmon=-9.13177E0
ql3_imon=2.77579E-10
ql4_vset=
ql4_vmon=-9.14254E0
ql4_imon=-1.08433E-10
mult1=-1.00313E-8
mult2=-2.87612E-9
rf_tmon=-4.89291E-3
rf_agc=3.29552E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.71826E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.59281E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19594E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54019E1
cs_ef1b_imon=3.16002E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04817E1
cs_ea1_imon=1.08998E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41444E0
lens1_imon=2.77332E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03289E1
cs_ea2_imon=1.35827E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=3.05766E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.27794E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11628E1
os_restr1_imon=4.27616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14851E1
os_ea1_imon=2.39107E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21906E0
cs_ionrep_imon=9.58314E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=1.97827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.28583E-8
tplens_vset=1.4E-1
tplens_vmon=1.6845E0
tplens_imon=-3.34281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26142E1
iondef3_imon=1.5232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.57346E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98236E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.04637E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25446E0
ionrepsh_imon=8.44699E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.16596E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5205E0
os_ea2_imon=-8.93508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71011E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10021E0
os_ef2alow_imon=-2.41047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.14949E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11135E1
os_restr2_imon=3.41446E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.09576E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73275E1
iondef1_imon=1.1006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69982E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.94926E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.57775E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-8.31936E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02033E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56916E1
einzel_imon=7.86804E-6
window_vset=0.0E0
window_vmon=2.62392E-1
window_imon=-7.23817E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86638E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.5586E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.4543E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.40995E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.06497E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33234E1
os_fil1_imon=9.42114E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07954E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64112E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3184E1
cs_fil1_imon=7.92369E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01101E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66506E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.24363E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.90376E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22274E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29067E-3
inlet_lpb_pmon=3.0041E-1
chamber_ion_pmon=1.19819E-7
chamber_cvt_pmon=2.5225E-3
foreline_cvt_pmon=2.5225E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.34975E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-8.16941E-1	-7.98464E-1	-9.13165E0	-9.14299E0	4.31538E-3	9.50575E-2	2.73305E1	-3.26449E1	-3.2636E1	2.67665E1	1.198E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.02253E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09286E0	-8.17037E-1	-7.98368E-1	-9.13165E0	-9.14299E0	4.24385E-3	9.50098E-2	2.73711E1	-3.26353E1	-3.2615E1	2.69177E1	1.19749E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09317E0	-8.17156E-1	-7.98583E-1	-9.13167E0	-9.14247E0	4.45843E-3	9.4986E-2	2.73288E1	-3.26298E1	-3.26229E1	2.67589E1	1.20028E-7	2.51472E-3	2.51472E-3	6.3074E-3	3.00741E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09294E0	-8.17251E-1	-7.9813E-1	-9.13181E0	-9.14216E0	4.55379E-3	9.51052E-2	2.72859E1	-3.26386E1	-3.26651E1	2.68809E1	1.20154E-7	2.52066E-3	2.52066E-3	6.29603E-3	2.99981E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16965E-1	-7.98321E-1	-9.13157E0	-9.14254E0	4.3869E-3	9.51052E-2	2.73207E1	-3.26482E1	-3.26446E1	2.68208E1	1.20226E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.17204E-1	-7.98345E-1	-9.13181E0	-9.14254E0	4.673E-3	9.52244E-2	2.73273E1	-3.26741E1	-3.26266E1	2.67962E1	1.20226E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.97963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.17227E-1	-7.98178E-1	-9.13184E0	-9.1428E0	4.76837E-3	9.50336E-2	2.73207E1	-3.26338E1	-3.2638E1	2.68629E1	1.20122E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.17204E-1	-7.98368E-1	-9.13179E0	-9.14249E0	4.57764E-3	9.52005E-2	2.73057E1	-3.2685E1	-3.25942E1	2.68737E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.98481E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.17108E-1	-7.98392E-1	-9.13193E0	-9.14261E0	4.29153E-3	9.51052E-2	2.73357E1	-3.26958E1	-3.26174E1	2.68172E1	1.20017E-7	2.52428E-3	2.52428E-3	6.34037E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16941E-1	-7.98821E-1	-9.13196E0	-9.14226E0	4.31538E-3	9.52721E-2	2.72967E1	-3.2644E1	-3.2647E1	2.68767E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02133E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16655E-1	-7.98869E-1	-9.13167E0	-9.14261E0	4.673E-3	9.50098E-2	2.73381E1	-3.26756E1	-3.26496E1	2.6831E1	1.19965E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16488E-1	-7.98583E-1	-9.13148E0	-9.14235E0	4.55379E-3	9.49383E-2	2.73186E1	-3.26627E1	-3.26229E1	2.67217E1	1.20278E-7	2.5068E-3	2.5068E-3	6.31837E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16703E-1	-7.98416E-1	-9.13179E0	-9.14257E0	4.74453E-3	9.5129E-2	2.73357E1	-3.26597E1	-3.26158E1	2.68857E1	1.19757E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16989E-1	-7.98631E-1	-9.13157E0	-9.14237E0	4.81606E-3	9.50098E-2	2.73261E1	-3.26633E1	-3.26044E1	2.67848E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.1706E-1	-7.98774E-1	-9.13184E0	-9.14268E0	4.79221E-3	9.50575E-2	2.73263E1	-3.26667E1	-3.26384E1	2.67978E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.1737E-1	-7.9875E-1	-9.1316E0	-9.14264E0	4.60148E-3	9.48191E-2	2.73297E1	-3.26518E1	-3.26182E1	2.68307E1	1.198E-7	2.51096E-3	2.51096E-3	6.29665E-3	2.99175E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17299E-1	-7.98655E-1	-9.13179E0	-9.14226E0	4.91142E-3	9.48191E-2	2.73411E1	-3.26693E1	-3.26164E1	2.6865E1	1.20174E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.1737E-1	-7.98607E-1	-9.13155E0	-9.14242E0	4.64916E-3	9.48906E-2	2.73292E1	-3.26652E1	-3.2645E1	2.68644E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3514E-3	3.00302E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16989E-1	-7.98392E-1	-9.13155E0	-9.14268E0	4.673E-3	9.49383E-2	2.73238E1	-3.26535E1	-3.25942E1	2.67645E1	1.19782E-7	2.51679E-3	2.51679E-3	6.3282E-3	2.99506E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16941E-1	-7.98607E-1	-9.13177E0	-9.14254E0	4.57764E-3	9.49144E-2	2.73275E1	-3.26655E1	-3.26142E1	2.69982E1	1.19819E-7	2.5225E-3	2.5225E-3	6.29067E-3	3.0041E-1
