[Scan]
initial_time=2016-01-18T21:22:34
final_time=2016-01-18T21:22:54
ip_count=19
run=1024
dataset=8
scan=593
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.17251E-1
ql1_imon=1.377E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=1.9605E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=2.46263E-10
ql4_vset=
ql4_vmon=-9.14261E0
ql4_imon=-1.49393E-10
mult1=-9.51162E-9
mult2=-2.71262E-9
rf_tmon=-4.38024E-3
rf_agc=3.26486E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.6884E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68214E0
bslens_imon=2.26011E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19293E1
lens5a_imon=2.00704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.04838E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=3.16146E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04717E1
cs_ea1_imon=1.11334E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40559E0
lens1_imon=2.79456E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0382E1
cs_ea2_imon=1.36216E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.02991E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.27956E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.29418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15193E1
os_ea1_imon=2.39531E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63227E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22437E0
cs_ionrep_imon=9.39201E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=1.96746E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.28615E-8
tplens_vset=1.4E-1
tplens_vmon=1.6491E0
tplens_imon=-2.88269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26182E1
iondef3_imon=1.50975E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26951E1
iondef2_imon=1.5632E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.9807E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.0769E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28159E0
ionrepsh_imon=8.61688E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33599E1
lens5b_imon=2.16702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50399E0
os_ea2_imon=-9.18284E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.16578E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.24829E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2085E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.40364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23013E2
cs_ionfoca_imon=6.283E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.09324E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73369E1
iondef1_imon=1.09989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.90555E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.56795E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-8.64372E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47507E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56009E1
einzel_imon=7.85723E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.37455E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93762E3
defgrida_imon=6.40475E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.26837E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3967E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.4391E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08669E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64035E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31842E1
cs_fil1_imon=6.7584E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.98686E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66519E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.8949E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49061E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22188E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.02659E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.29569E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=221
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16607E-1	-7.98655E-1	-9.13212E0	-9.14249E0	4.24385E-3	9.50098E-2	2.73147E1	-3.26771E1	-3.26314E1	2.68502E1	1.198E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.99941E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.17108E-1	-7.98488E-1	-9.13231E0	-9.14252E0	4.31538E-3	9.50575E-2	2.73345E1	-3.2648E1	-3.26229E1	2.68292E1	1.20174E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01871E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16727E-1	-7.98082E-1	-9.13208E0	-9.14264E0	4.36306E-3	9.50098E-2	2.73312E1	-3.26631E1	-3.26295E1	2.68076E1	1.19925E-7	2.5225E-3	2.5225E-3	6.29624E-3	2.99348E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.1718E-1	-7.98297E-1	-9.13205E0	-9.14264E0	4.36306E-3	9.50575E-2	2.73193E1	-3.26467E1	-3.25859E1	2.6834E1	1.20466E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16965E-1	-7.98321E-1	-9.13179E0	-9.14268E0	4.41074E-3	9.4986E-2	2.73616E1	-3.26615E1	-3.25683E1	2.68536E1	1.19991E-7	2.51814E-3	2.51814E-3	6.33919E-3	3.006E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.17156E-1	-7.98702E-1	-9.13188E0	-9.14271E0	4.12464E-3	9.4986E-2	2.7347E1	-3.26431E1	-3.26408E1	2.68206E1	1.20226E-7	2.52538E-3	2.52538E-3	6.29645E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16894E-1	-7.98225E-1	-9.13174E0	-9.14261E0	4.14848E-3	9.4986E-2	2.72901E1	-3.26687E1	-3.26116E1	2.68262E1	1.20383E-7	2.52757E-3	2.52757E-3	6.33486E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.17013E-1	-7.98154E-1	-9.13179E0	-9.14242E0	4.673E-3	9.50575E-2	2.72933E1	-3.26585E1	-3.25906E1	2.68256E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9892E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16941E-1	-7.98273E-1	-9.1316E0	-9.14261E0	4.81606E-3	9.50098E-2	2.73021E1	-3.26536E1	-3.26134E1	2.6822E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.98222E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16917E-1	-7.98464E-1	-9.13186E0	-9.14252E0	4.8399E-3	9.50098E-2	2.72883E1	-3.26657E1	-3.26422E1	2.68684E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00197E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16727E-1	-7.98583E-1	-9.13172E0	-9.14223E0	4.69685E-3	9.52244E-2	2.73159E1	-3.26843E1	-3.26008E1	2.68202E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16607E-1	-7.98488E-1	-9.13227E0	-9.14226E0	4.55379E-3	9.50098E-2	2.73165E1	-3.26482E1	-3.2605E1	2.68344E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16679E-1	-7.98178E-1	-9.132E0	-9.14207E0	4.41074E-3	9.51529E-2	2.73339E1	-3.26422E1	-3.26134E1	2.68099E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.16917E-1	-7.98368E-1	-9.13217E0	-9.14252E0	4.79221E-3	9.47952E-2	2.72997E1	-3.26687E1	-3.2653E1	2.68731E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.17251E-1	-7.9844E-1	-9.13191E0	-9.14278E0	4.43459E-3	9.49144E-2	2.73634E1	-3.26849E1	-3.26272E1	2.68611E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.17561E-1	-7.98225E-1	-9.13179E0	-9.14259E0	4.79221E-3	9.50336E-2	2.73458E1	-3.26514E1	-3.26437E1	2.6852E1	1.19809E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
2.0E1	3.0E0	1.0E0	8.08E2	5.58E2	-2.09402E0	-8.17204E-1	-7.98416E-1	-9.13188E0	-9.14283E0	4.72069E-3	9.4986E-2	2.7355E1	-3.26747E1	-3.26254E1	2.68184E1	1.20106E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.97647E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.17299E-1	-7.98607E-1	-9.13188E0	-9.14268E0	4.57764E-3	9.50813E-2	2.72892E1	-3.26685E1	-3.26242E1	2.68262E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.17251E-1	-7.98631E-1	-9.13191E0	-9.14278E0	4.43459E-3	9.51052E-2	2.72895E1	-3.26687E1	-3.26272E1	2.68279E1	1.20158E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.17251E-1	-7.98416E-1	-9.132E0	-9.14261E0	4.52995E-3	9.50098E-2	2.73369E1	-3.26951E1	-3.26182E1	2.6804E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02659E-1
