[Scan]
initial_time=2016-01-18T21:23:01
final_time=2016-01-18T21:23:20
ip_count=19
run=1024
dataset=8
scan=594
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=1.3773E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.9532E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=2.41911E-10
ql4_vset=
ql4_vmon=-9.14237E0
ql4_imon=-1.00994E-10
mult1=-1.03978E-8
mult2=-2.85456E-9
rf_tmon=-4.362E-3
rf_agc=3.43296E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.75177E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68096E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19518E1
lens5a_imon=1.98722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05238E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=3.17804E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02277E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04351E1
cs_ea1_imon=1.09423E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38259E0
lens1_imon=2.96445E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03826E1
cs_ea2_imon=1.35013E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=3.04072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.27795E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.28121E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15117E1
os_ea1_imon=2.39815E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22378E0
cs_ionrep_imon=9.43449E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=1.97359E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.28534E-8
tplens_vset=1.4E-1
tplens_vmon=1.65795E0
tplens_imon=-3.20124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25853E1
iondef3_imon=1.50834E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.55541E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.9819E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.04605E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29221E0
ionrepsh_imon=8.493E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33445E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51932E0
os_ea2_imon=-5.57264E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06064E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.16794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0936E0
os_ef2alow_imon=-2.36002E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11129E1
os_restr2_imon=3.40364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.27061E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73287E1
iondef1_imon=1.11582E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6768E1
iondef4_imon=1.12161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.9325E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.57559E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15837E0
cs_ionaccel_imon=-9.43659E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47504E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.55785E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39351E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.87715E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.20655E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.22236E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22248E0
defgridb_imon=6.2207E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33257E1
os_fil1_imon=9.42438E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07359E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64077E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=7.10679E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.68362E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66553E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12966E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.92528E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.58671E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.12751E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-8.17132E-1	-7.98583E-1	-9.13186E0	-9.14266E0	4.673E-3	9.50575E-2	2.73284E1	-3.26585E1	-3.26647E1	2.68104E1	1.198E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99686E-1
2.0E0	2.0E1	0.0E0	3.16E2	1.6E2	-2.09325E0	-8.1718E-1	-7.98488E-1	-9.132E0	-9.1429E0	4.45843E-3	9.49621E-2	2.73121E1	-3.26536E1	-3.26585E1	2.68666E1	1.20375E-7	2.52301E-3	2.52301E-3	6.3074E-3	3.01485E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.16941E-1	-7.98702E-1	-9.13153E0	-9.14276E0	4.43459E-3	9.51052E-2	2.73336E1	-3.26664E1	-3.26485E1	2.68359E1	1.19991E-7	2.51891E-3	2.51891E-3	6.29754E-3	3.0279E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.17084E-1	-7.98631E-1	-9.13138E0	-9.14285E0	4.31538E-3	9.53436E-2	2.73153E1	-3.2623E1	-3.26663E1	2.68286E1	1.20322E-7	2.51829E-3	2.51829E-3	6.3074E-3	3.01753E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09279E0	-8.17251E-1	-7.98416E-1	-9.13172E0	-9.14321E0	4.41074E-3	9.5582E-2	2.73187E1	-3.26543E1	-3.26378E1	2.68569E1	1.19757E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09302E0	-8.17108E-1	-7.9844E-1	-9.13186E0	-9.14314E0	4.673E-3	9.52244E-2	2.73333E1	-3.26729E1	-3.26086E1	2.68148E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09294E0	-8.17275E-1	-7.98607E-1	-9.13198E0	-9.14335E0	4.57764E-3	9.5129E-2	2.73159E1	-3.26488E1	-3.26218E1	2.68418E1	1.19653E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0934E0	-8.17299E-1	-7.98273E-1	-9.13162E0	-9.14271E0	4.673E-3	9.48906E-2	2.7321E1	-3.2639E1	-3.26166E1	2.67541E1	1.20069E-7	2.52209E-3	2.52209E-3	6.3514E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09356E0	-8.17108E-1	-7.98225E-1	-9.13191E0	-9.14271E0	4.74453E-3	9.50098E-2	2.73147E1	-3.26524E1	-3.26308E1	2.69391E1	1.19851E-7	2.51739E-3	2.51739E-3	6.34518E-3	3.02769E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.17251E-1	-7.98273E-1	-9.13162E0	-9.14268E0	4.88758E-3	9.49144E-2	2.73682E1	-3.26933E1	-3.25809E1	2.67956E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09333E0	-8.17776E-1	-7.98178E-1	-9.13153E0	-9.14264E0	4.93526E-3	9.52244E-2	2.73069E1	-3.26744E1	-3.26508E1	2.68532E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.17227E-1	-7.98631E-1	-9.13146E0	-9.14252E0	4.64916E-3	9.49383E-2	2.73105E1	-3.26789E1	-3.26579E1	2.68304E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.17418E-1	-7.98464E-1	-9.13148E0	-9.14278E0	4.60148E-3	9.50813E-2	2.72991E1	-3.27137E1	-3.26074E1	2.67729E1	1.19965E-7	2.51116E-3	2.51116E-3	6.3514E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.17227E-1	-7.98655E-1	-9.13165E0	-9.14268E0	4.52995E-3	9.5129E-2	2.73033E1	-3.2662E1	-3.25983E1	2.69103E1	1.20435E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17299E-1	-7.98702E-1	-9.13148E0	-9.14276E0	5.05447E-3	9.52005E-2	2.73189E1	-3.26428E1	-3.2602E1	2.68268E1	1.20209E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.97394E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.17156E-1	-7.98583E-1	-9.13169E0	-9.14223E0	5.03063E-3	9.50813E-2	2.73129E1	-3.26404E1	-3.26573E1	2.68058E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.17227E-1	-7.98392E-1	-9.1316E0	-9.1424E0	4.86374E-3	9.53674E-2	2.7321E1	-3.26785E1	-3.2603E1	2.68238E1	1.19705E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17084E-1	-7.98273E-1	-9.13122E0	-9.14235E0	4.48227E-3	9.50336E-2	2.73135E1	-3.26428E1	-3.26543E1	2.69488E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16941E-1	-7.98392E-1	-9.13146E0	-9.14233E0	4.50611E-3	9.52005E-2	2.73267E1	-3.26645E1	-3.2584E1	2.68163E1	1.2033E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16989E-1	-7.98249E-1	-9.13157E0	-9.14237E0	4.88758E-3	9.51052E-2	2.73287E1	-3.26744E1	-3.25853E1	2.6768E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01871E-1
