[Scan]
initial_time=2016-01-18T21:23:27
final_time=2016-01-18T21:23:47
ip_count=19
run=1024
dataset=8
scan=595
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08752E-4
ql1_vset=
ql1_vmon=-8.17084E-1
ql1_imon=1.38095E-8
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=1.92019E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=2.56896E-10
ql4_vset=
ql4_vmon=-9.14247E0
ql4_imon=-1.36471E-10
mult1=-9.22991E-9
mult2=-2.77887E-9
rf_tmon=-4.56446E-3
rf_agc=3.31325E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.64909E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65206E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=1.99359E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54109E1
cs_ef1b_imon=3.1611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04546E1
cs_ea1_imon=1.09777E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40205E0
lens1_imon=2.745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.99279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.36074E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.05154E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.28281E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=4.28337E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15087E1
os_ea1_imon=2.40558E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24797E0
cs_ionrep_imon=9.37432E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93533E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02067E1
cs_anode1_imon=1.96422E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.28336E-8
tplens_vset=1.4E-1
tplens_vmon=1.66326E0
tplens_imon=-2.59954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2585E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26529E1
iondef2_imon=1.57559E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98257E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.04464E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31109E0
ionrepsh_imon=8.66997E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33811E1
lens5b_imon=2.18543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5264E0
os_ea2_imon=-6.91762E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.16939E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09901E0
os_ef2alow_imon=-2.37804E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16044E-1
os_ef2bup_imon=-5.06299E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11015E1
os_restr2_imon=3.41482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.27557E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.09793E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7351E1
iondef1_imon=1.12396E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66899E1
iondef4_imon=1.1072E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.92759E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.5651E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56543E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.34762E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39365E-4
mask2_vset=0.0E0
mask2_vmon=-1.86314E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=8.20631E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.81532E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.12679E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62407E0
defgridb_imon=6.14284E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33263E1
os_fil1_imon=9.42408E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07515E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.642E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31823E1
cs_fil1_imon=7.20289E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.12501E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66656E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.38292E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19939E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75696E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22297E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18757E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.17299E-1	-7.98607E-1	-9.13172E0	-9.1428E0	4.673E-3	9.49383E-2	2.73216E1	-3.26767E1	-3.26136E1	2.68742E1	1.20158E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.1749E-1	-7.98321E-1	-9.13219E0	-9.14285E0	4.48227E-3	9.49383E-2	2.73149E1	-3.2675E1	-3.25985E1	2.68136E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.17132E-1	-7.98273E-1	-9.132E0	-9.14268E0	4.72069E-3	9.51052E-2	2.73393E1	-3.2652E1	-3.2629E1	2.68154E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.17156E-1	-7.98321E-1	-9.13174E0	-9.14271E0	4.41074E-3	9.5129E-2	2.73478E1	-3.27167E1	-3.2602E1	2.684E1	1.20069E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00302E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.17084E-1	-7.98368E-1	-9.132E0	-9.14264E0	4.57764E-3	9.50098E-2	2.73075E1	-3.26434E1	-3.26476E1	2.67944E1	1.19757E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.17347E-1	-7.98178E-1	-9.13205E0	-9.14295E0	4.19617E-3	9.50098E-2	2.73358E1	-3.26319E1	-3.26526E1	2.68458E1	1.20226E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17084E-1	-7.98202E-1	-9.13188E0	-9.14273E0	4.55379E-3	9.4986E-2	2.73087E1	-3.26416E1	-3.26068E1	2.68364E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.1706E-1	-7.9844E-1	-9.1321E0	-9.1424E0	4.74453E-3	9.48429E-2	2.73322E1	-3.26478E1	-3.259E1	2.68599E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.17037E-1	-7.98488E-1	-9.13196E0	-9.14252E0	4.36306E-3	9.47475E-2	2.73358E1	-3.26449E1	-3.25959E1	2.6801E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.17323E-1	-7.98368E-1	-9.13186E0	-9.14226E0	4.57764E-3	9.48191E-2	2.7376E1	-3.27191E1	-3.25906E1	2.6829E1	1.20311E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9892E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.17156E-1	-7.98321E-1	-9.13188E0	-9.14221E0	4.76837E-3	9.49144E-2	2.72855E1	-3.26566E1	-3.2634E1	2.69398E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.17084E-1	-7.98345E-1	-9.13177E0	-9.1424E0	4.55379E-3	9.51052E-2	2.72859E1	-3.26771E1	-3.2599E1	2.67944E1	1.20137E-7	2.51804E-3	2.51804E-3	6.27399E-3	2.99348E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.17108E-1	-7.98297E-1	-9.13186E0	-9.1429E0	4.64916E-3	9.50098E-2	2.73562E1	-3.26807E1	-3.26993E1	2.68148E1	1.20226E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.01085E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.17299E-1	-7.98368E-1	-9.13198E0	-9.14276E0	4.57764E-3	9.50098E-2	2.73455E1	-3.26621E1	-3.26793E1	2.68238E1	1.20069E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.01347E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16965E-1	-7.98798E-1	-9.13217E0	-9.14237E0	4.64916E-3	9.52482E-2	2.73149E1	-3.26156E1	-3.267E1	2.67746E1	1.19925E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99879E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16941E-1	-7.9875E-1	-9.1321E0	-9.14261E0	4.81606E-3	9.47952E-2	2.73014E1	-3.26529E1	-3.26089E1	2.69248E1	1.1969E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.01862E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.17013E-1	-7.98607E-1	-9.13184E0	-9.14266E0	4.74453E-3	9.51052E-2	2.73033E1	-3.26633E1	-3.26128E1	2.67199E1	1.20137E-7	2.50914E-3	2.50914E-3	6.33538E-3	2.99348E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.17347E-1	-7.98273E-1	-9.13196E0	-9.14226E0	4.07696E-3	9.51529E-2	2.73128E1	-3.26372E1	-3.26042E1	2.6887E1	1.19985E-7	2.51755E-3	2.51755E-3	6.32644E-3	3.01674E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.17347E-1	-7.98178E-1	-9.13186E0	-9.14247E0	4.43459E-3	9.52244E-2	2.73216E1	-3.26543E1	-3.26195E1	2.68983E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.17084E-1	-7.98202E-1	-9.132E0	-9.14247E0	4.43459E-3	9.50336E-2	2.7351E1	-3.26529E1	-3.2585E1	2.66899E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0071E-1
