[Scan]
initial_time=2016-01-18T21:23:54
final_time=2016-01-18T21:24:14
ip_count=19
run=1024
dataset=8
scan=596
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09333E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.1718E-1
ql1_imon=1.37551E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=1.96307E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=1.99783E-10
ql4_vset=
ql4_vmon=-9.14257E0
ql4_imon=-1.46663E-10
mult1=-9.40325E-9
mult2=-2.86033E-9
rf_tmon=-3.65925E-3
rf_agc=3.33396E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.64858E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67395E0
bslens_imon=2.36832E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19562E1
lens5a_imon=2.02309E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.04848E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54042E1
cs_ef1b_imon=3.16216E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04213E1
cs_ea1_imon=1.1013E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40681E0
lens1_imon=2.74684E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64989E1
os_ef1alow_imon=2.97242E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03474E1
cs_ea2_imon=1.36518E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84463E1
cs_ef1a_imon=3.04727E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.28015E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.27932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.38683E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63411E1
os_ef1bup_imon=3.08881E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27313E0
cs_ionrep_imon=9.66475E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93589E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01915E1
cs_anode1_imon=1.96342E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.29097E-8
tplens_vset=1.4E-1
tplens_vmon=1.65345E0
tplens_imon=-5.76927E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.51947E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26969E1
iondef2_imon=1.56129E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98133E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=4.04868E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=8.63012E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74601E1
cs_ef2b_imon=3.118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48282E0
os_ea2_imon=-5.58903E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00306E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71451E1
cs_ef2a_imon=3.17002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04146E0
os_ef2alow_imon=-2.51443E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01998E-1
os_ef2bup_imon=-5.22032E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11329E1
os_restr2_imon=3.42265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.28811E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01853E1
cs_anode2_imon=2.08991E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.07967E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68696E1
iondef4_imon=1.10038E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.82478E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.57824E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11018E0
cs_ionaccel_imon=-8.86411E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47301E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5691E1
einzel_imon=7.84503E-6
window_vset=0.0E0
window_vmon=2.60636E-1
window_imon=-7.55421E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39354E-4
mask2_vset=0.0E0
mask2_vmon=-1.86743E1
mask2_imon=-7.21738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=6.85649E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.05836E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49179E0
defgridb_imon=6.29051E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.42289E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08171E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63992E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31821E1
cs_fil1_imon=7.23662E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00311E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66694E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06681E-2
os_fil2_imon=-2.23834E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.96882E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30727E-1
cs_fil2_imon=-2.39428E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22265E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.22385E-1
res40_imon=-2.55186E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.17418E-1	-7.97892E-1	-9.13231E0	-9.1428E0	4.60148E-3	9.49144E-2	2.73021E1	-3.2672E1	-3.26166E1	2.68192E1	1.19965E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01609E-1
2.0E0	4.6E1	1.0E0	3.16E2	1.6E2	-2.09526E0	-8.17513E-1	-7.98082E-1	-9.13215E0	-9.14266E0	4.14848E-3	9.47714E-2	2.73333E1	-3.26787E1	-3.2607E1	2.67944E1	1.19749E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.17323E-1	-7.98059E-1	-9.13196E0	-9.14247E0	4.24385E-3	9.5129E-2	2.73558E1	-3.26478E1	-3.26478E1	2.68502E1	1.19713E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00144E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.17251E-1	-7.98178E-1	-9.13184E0	-9.14247E0	4.05312E-3	9.50098E-2	2.73484E1	-3.26903E1	-3.26266E1	2.68094E1	1.20209E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.17132E-1	-7.98392E-1	-9.13198E0	-9.14257E0	4.19617E-3	9.52959E-2	2.73311E1	-3.26703E1	-3.26012E1	2.6849E1	1.20278E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.17251E-1	-7.98273E-1	-9.13188E0	-9.14283E0	4.19617E-3	9.51529E-2	2.73334E1	-3.26425E1	-3.26425E1	2.68482E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.17347E-1	-7.98392E-1	-9.13162E0	-9.14237E0	4.07696E-3	9.50813E-2	2.7329E1	-3.26444E1	-3.26113E1	2.6813E1	1.20055E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.02511E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17251E-1	-7.98273E-1	-9.13203E0	-9.14237E0	4.12464E-3	9.53674E-2	2.73016E1	-3.26579E1	-3.26472E1	2.67992E1	1.19713E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.03349E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.17323E-1	-7.98345E-1	-9.13229E0	-9.14226E0	4.31538E-3	9.51052E-2	2.73285E1	-3.26296E1	-3.2626E1	2.68442E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.03286E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.17251E-1	-7.98345E-1	-9.13203E0	-9.14261E0	4.07696E-3	9.50336E-2	2.73712E1	-3.26843E1	-3.26434E1	2.68629E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00824E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.17132E-1	-7.98297E-1	-9.13215E0	-9.14214E0	4.48227E-3	9.51767E-2	2.73273E1	-3.26597E1	-3.26494E1	2.68538E1	1.20017E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.17323E-1	-7.98273E-1	-9.13224E0	-9.1424E0	4.64916E-3	9.49383E-2	2.73322E1	-3.26455E1	-3.26366E1	2.68484E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.17204E-1	-7.98464E-1	-9.13196E0	-9.14237E0	4.55379E-3	9.49383E-2	2.73412E1	-3.2648E1	-3.2607E1	2.68196E1	1.19953E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.01995E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.17418E-1	-7.9844E-1	-9.13188E0	-9.14211E0	4.3869E-3	9.52721E-2	2.73293E1	-3.26732E1	-3.26307E1	2.68227E1	1.19887E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.17013E-1	-7.98321E-1	-9.13169E0	-9.14197E0	4.36306E-3	9.52482E-2	2.73435E1	-3.26681E1	-3.25533E1	2.68593E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.17418E-1	-7.98488E-1	-9.13215E0	-9.14207E0	4.24385E-3	9.51052E-2	2.72996E1	-3.26401E1	-3.26107E1	2.6816E1	1.20174E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9874E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.17013E-1	-7.98678E-1	-9.13208E0	-9.14226E0	4.45843E-3	9.50098E-2	2.73346E1	-3.26366E1	-3.26791E1	2.68352E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.1737E-1	-7.9875E-1	-9.13181E0	-9.14214E0	4.41074E-3	9.52721E-2	2.73027E1	-3.26467E1	-3.26201E1	2.68777E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.1718E-1	-7.98678E-1	-9.13167E0	-9.14235E0	4.12464E-3	9.49144E-2	2.73033E1	-3.26679E1	-3.26319E1	2.681E1	1.20106E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09333E0	-8.1718E-1	-7.98512E-1	-9.1316E0	-9.14257E0	4.19617E-3	9.52244E-2	2.73159E1	-3.26969E1	-3.26116E1	2.68696E1	1.2026E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.0071E-1
