[Scan]
initial_time=2016-01-18T21:24:48
final_time=2016-01-18T21:25:07
ip_count=19
run=1024
dataset=8
scan=598
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=1.37923E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.94715E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=1.8698E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=-1.06943E-10
mult1=-9.78308E-9
mult2=-2.94471E-9
rf_tmon=-3.79569E-3
rf_agc=3.30319E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.72504E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63917E0
bslens_imon=2.43215E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20108E1
lens5a_imon=1.98224E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05062E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5371E1
cs_ef1b_imon=3.16215E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02274E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=1.11502E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33121E0
lens1_imon=2.75659E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64952E1
os_ef1alow_imon=2.98155E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03849E1
cs_ea2_imon=1.3448E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84277E1
cs_ef1a_imon=3.05044E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.28038E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11681E1
os_restr1_imon=4.27145E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14943E1
os_ea1_imon=2.40517E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63486E1
os_ef1bup_imon=3.08625E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23556E0
cs_ionrep_imon=9.15772E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91937E2
cs_nozzle_imon=1.93588E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02016E1
cs_anode1_imon=1.97422E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.29006E-8
tplens_vset=1.4E-1
tplens_vmon=1.63507E0
tplens_imon=-2.6266E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25989E1
iondef3_imon=1.50016E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.56734E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.9801E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=4.0287E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2979E0
ionrepsh_imon=8.77602E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33334E1
lens5b_imon=2.15935E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.13724E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55237E0
os_ea2_imon=-6.13825E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00936E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71387E1
cs_ef2a_imon=3.16799E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04288E0
os_ef2alow_imon=-2.45545E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04992E-1
os_ef2bup_imon=-5.21508E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11234E1
os_restr2_imon=3.42176E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.26607E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.09099E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.13067E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.10975E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.92443E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.57819E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14571E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.4751E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56515E1
einzel_imon=7.81628E-6
window_vset=0.0E0
window_vmon=2.50307E-1
window_imon=-7.19492E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86701E1
mask2_imon=-3.84756E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92688E3
multa_neg_imon=7.1347E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.79117E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.55458E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55106E0
defgridb_imon=6.27588E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3321E1
os_fil1_imon=9.39533E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07913E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64289E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=7.92176E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.42678E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66614E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.17758E-2
os_fil2_imon=-2.49009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09631E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75758E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3091E-1
cs_fil2_imon=-2.40576E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21406E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22287E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9971E-1
chamber_ion_pmon=1.19775E-7
chamber_cvt_pmon=2.51838E-3
foreline_cvt_pmon=2.51838E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.01002E-1
res40_imon=-2.40485E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.1718E-1	-7.98607E-1	-9.13191E0	-9.14254E0	4.62532E-3	9.48668E-2	2.73271E1	-3.26428E1	-3.26133E1	2.67254E1	1.19682E-7	2.51675E-3	2.51675E-3	6.33112E-3	3.02743E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.1718E-1	-7.98464E-1	-9.13172E0	-9.1423E0	4.17233E-3	9.47237E-2	2.73276E1	-3.26747E1	-3.26285E1	2.68824E1	1.1988E-7	2.52093E-3	2.52093E-3	6.323E-3	3.0223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.17013E-1	-7.98607E-1	-9.13186E0	-9.1424E0	4.3869E-3	9.47475E-2	2.73393E1	-3.26724E1	-3.2615E1	2.68151E1	1.19766E-7	2.52473E-3	2.52473E-3	6.29067E-3	3.03618E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16846E-1	-7.98321E-1	-9.13198E0	-9.14226E0	4.64916E-3	9.50336E-2	2.73445E1	-3.26753E1	-3.26196E1	2.6792E1	1.20092E-7	2.51287E-3	2.51287E-3	6.32858E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.1687E-1	-7.98321E-1	-9.13208E0	-9.14245E0	4.45843E-3	9.47475E-2	2.7318E1	-3.26419E1	-3.26389E1	2.67992E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16989E-1	-7.98345E-1	-9.13167E0	-9.14211E0	4.33922E-3	9.46283E-2	2.73021E1	-3.26313E1	-3.26201E1	2.69469E1	1.19757E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.17227E-1	-7.98512E-1	-9.13179E0	-9.14233E0	4.3869E-3	9.47714E-2	2.73069E1	-3.26626E1	-3.26284E1	2.67816E1	1.19861E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.17132E-1	-7.98607E-1	-9.13174E0	-9.14278E0	4.64916E-3	9.50098E-2	2.73333E1	-3.26609E1	-3.262E1	2.68142E1	1.20142E-7	2.51709E-3	2.51709E-3	6.33388E-3	2.99594E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16679E-1	-7.98535E-1	-9.13174E0	-9.14245E0	4.22001E-3	9.50813E-2	2.73216E1	-3.26567E1	-3.26284E1	2.68737E1	1.20084E-7	2.51136E-3	2.51136E-3	6.31299E-3	3.01742E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.16894E-1	-7.98392E-1	-9.13167E0	-9.14259E0	4.24385E-3	9.50336E-2	2.73117E1	-3.26621E1	-3.26482E1	2.68314E1	1.20158E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01995E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16965E-1	-7.98726E-1	-9.13165E0	-9.14271E0	4.24385E-3	9.48906E-2	2.73399E1	-3.26891E1	-3.26254E1	2.6822E1	1.198E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.02253E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.17084E-1	-7.98631E-1	-9.13184E0	-9.14261E0	4.41074E-3	9.51052E-2	2.73281E1	-3.26602E1	-3.26437E1	2.68484E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.17132E-1	-7.98941E-1	-9.13188E0	-9.14209E0	4.57764E-3	9.5129E-2	2.73198E1	-3.26627E1	-3.26064E1	2.68274E1	1.19965E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.17204E-1	-7.98678E-1	-9.13196E0	-9.14199E0	4.64916E-3	9.48906E-2	2.73417E1	-3.26609E1	-3.26272E1	2.68388E1	1.20435E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17108E-1	-7.98559E-1	-9.13177E0	-9.14268E0	4.52995E-3	9.50813E-2	2.73129E1	-3.26585E1	-3.26122E1	2.68454E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.16894E-1	-7.98512E-1	-9.13174E0	-9.14254E0	4.43459E-3	9.49383E-2	2.73281E1	-3.2675E1	-3.26325E1	2.68538E1	1.19913E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.00041E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.17013E-1	-7.98678E-1	-9.13157E0	-9.14245E0	4.26769E-3	9.49621E-2	2.73327E1	-3.26416E1	-3.26116E1	2.6834E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.16989E-1	-7.98535E-1	-9.13193E0	-9.14247E0	4.26769E-3	9.46522E-2	2.7304E1	-3.26392E1	-3.26222E1	2.68228E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16703E-1	-7.98464E-1	-9.13167E0	-9.14221E0	4.33922E-3	9.49383E-2	2.73388E1	-3.26343E1	-3.26381E1	2.68127E1	1.20016E-7	2.51142E-3	2.51142E-3	6.31761E-3	2.99179E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.1687E-1	-7.98583E-1	-9.13167E0	-9.14223E0	4.36306E-3	9.52244E-2	2.73045E1	-3.26638E1	-3.25989E1	2.67992E1	1.19775E-7	2.51838E-3	2.51838E-3	6.3074E-3	2.9971E-1
