[Scan]
initial_time=2016-01-18T21:26:27
final_time=2016-01-18T21:26:56
ip_count=19
run=1024
dataset=8
scan=601
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=1.37974E-8
ql2_vset=
ql2_vmon=-7.97892E-1
ql2_imon=1.99766E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=2.4817E-10
ql4_vset=
ql4_vmon=-9.14297E0
ql4_imon=-1.64104E-10
mult1=-1.00053E-8
mult2=-2.70464E-9
rf_tmon=-5.28749E-3
rf_agc=3.26186E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.63972E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6385E0
bslens_imon=2.38634E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19719E1
lens5a_imon=2.00218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05219E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53806E1
cs_ef1b_imon=3.15455E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04724E1
cs_ea1_imon=1.09265E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40921E0
lens1_imon=2.81894E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64742E1
os_ef1alow_imon=2.99434E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0378E1
cs_ea2_imon=1.34175E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=3.04264E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.27526E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11483E1
os_restr1_imon=4.28713E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1521E1
os_ea1_imon=2.40737E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63328E1
os_ef1bup_imon=3.09269E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25931E0
cs_ionrep_imon=9.36553E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91921E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=1.96114E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.28021E-8
tplens_vset=1.4E-1
tplens_vmon=1.64384E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26188E1
iondef3_imon=1.51767E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27059E1
iondef2_imon=1.56778E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.97971E-4
ql6_vset=1.0E-1
ql6_vmon=9.48429E-2
ql6_imon=4.03923E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=8.62291E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7453E1
cs_ef2b_imon=3.14273E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51706E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00536E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.1615E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05108E0
os_ef2alow_imon=-2.40429E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0534E-1
os_ef2bup_imon=-5.12542E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1117E1
os_restr2_imon=3.41171E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.29424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01966E1
cs_anode2_imon=2.0873E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73327E1
iondef1_imon=1.11716E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67868E1
iondef4_imon=1.10866E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.90079E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.56237E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1481E0
cs_ionaccel_imon=-7.70926E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47535E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.75387E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-7.70926E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39136E-4
mask2_vset=0.0E0
mask2_vmon=-1.86442E1
mask2_imon=-6.00639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9268E3
multa_neg_imon=7.1557E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.64019E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.58469E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.12108E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.43932E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07833E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64035E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31812E1
cs_fil1_imon=7.77974E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.5695E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66496E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19579E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12087E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.87988E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28903E-1
cs_fil2_imon=-2.29849E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.74439E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22298E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=2.97394E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.14231E-1
res40_imon=-2.35217E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16774E-1	-7.98631E-1	-9.13188E0	-9.14237E0	4.673E-3	9.49144E-2	2.73393E1	-3.26537E1	-3.26213E1	2.68617E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16917E-1	-7.98464E-1	-9.13193E0	-9.14254E0	4.86374E-3	9.49383E-2	2.73219E1	-3.26681E1	-3.26428E1	2.68737E1	1.19902E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16703E-1	-7.98678E-1	-9.1321E0	-9.14278E0	4.79221E-3	9.48668E-2	2.73163E1	-3.26762E1	-3.26266E1	2.68923E1	1.20084E-7	2.52139E-3	2.52139E-3	6.33538E-3	3.01209E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16798E-1	-7.98631E-1	-9.13169E0	-9.14261E0	4.93526E-3	9.46522E-2	2.73322E1	-3.26443E1	-3.26154E1	2.67885E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.17037E-1	-7.98655E-1	-9.13167E0	-9.14214E0	4.93526E-3	9.46999E-2	2.73171E1	-3.26609E1	-3.26272E1	2.67974E1	1.19927E-7	2.5131E-3	2.5131E-3	6.31548E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16989E-1	-7.98726E-1	-9.13177E0	-9.14209E0	4.81606E-3	9.49144E-2	2.73228E1	-3.26614E1	-3.26384E1	2.68773E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.1656E-1	-7.98559E-1	-9.13179E0	-9.14245E0	4.64916E-3	9.46999E-2	2.73099E1	-3.26561E1	-3.26344E1	2.67553E1	1.19809E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16917E-1	-7.98392E-1	-9.13177E0	-9.14226E0	4.45843E-3	9.4533E-2	2.72967E1	-3.26506E1	-3.26164E1	2.69391E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16655E-1	-7.98512E-1	-9.13153E0	-9.1424E0	4.57764E-3	9.47714E-2	2.73066E1	-3.26256E1	-3.2626E1	2.68316E1	1.19238E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.16631E-1	-7.98416E-1	-9.13169E0	-9.14237E0	4.62532E-3	9.48191E-2	2.73263E1	-3.26201E1	-3.25505E1	2.68304E1	1.19877E-7	2.52081E-3	2.52081E-3	6.32118E-3	3.01773E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.16703E-1	-7.98273E-1	-9.13162E0	-9.14268E0	4.64916E-3	9.47952E-2	2.73216E1	-3.26321E1	-3.26597E1	2.68256E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16751E-1	-7.9844E-1	-9.13157E0	-9.14257E0	4.62532E-3	9.47237E-2	2.73139E1	-3.26579E1	-3.26266E1	2.68142E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.16798E-1	-7.98345E-1	-9.1321E0	-9.1428E0	4.48227E-3	9.47714E-2	2.73201E1	-3.26747E1	-3.26122E1	2.68376E1	1.19965E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.1687E-1	-7.98249E-1	-9.13188E0	-9.1429E0	4.64916E-3	9.49621E-2	2.73105E1	-3.26422E1	-3.2626E1	2.68302E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.17037E-1	-7.98488E-1	-9.13167E0	-9.14278E0	4.3869E-3	9.51052E-2	2.73257E1	-3.26779E1	-3.25936E1	2.6834E1	1.19902E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01223E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.17442E-1	-7.98488E-1	-9.13148E0	-9.14295E0	4.24385E-3	9.51529E-2	2.73363E1	-3.26657E1	-3.2599E1	2.68472E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01609E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.17299E-1	-7.98273E-1	-9.13188E0	-9.14285E0	4.07696E-3	9.52721E-2	2.73181E1	-3.26596E1	-3.26142E1	2.68511E1	1.19757E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16774E-1	-7.98392E-1	-9.13146E0	-9.14283E0	4.24385E-3	9.51052E-2	2.7334E1	-3.26803E1	-3.25912E1	2.69259E1	1.19646E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.17013E-1	-7.98416E-1	-9.13179E0	-9.14283E0	4.48227E-3	9.49383E-2	2.73346E1	-3.26962E1	-3.26095E1	2.68502E1	1.198E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.9841E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16894E-1	-7.97892E-1	-9.13167E0	-9.14297E0	4.22001E-3	9.48429E-2	2.73327E1	-3.27059E1	-3.26188E1	2.67868E1	1.19902E-7	2.51525E-3	2.51525E-3	6.34518E-3	2.97394E-1
