[Scan]
initial_time=2016-01-18T21:27:06
final_time=2016-01-18T21:27:34
ip_count=19
run=1024
dataset=8
scan=602
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08733E-4
ql1_vset=
ql1_vmon=-8.17013E-1
ql1_imon=1.37515E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=2.05292E-9
ql3_vset=
ql3_vmon=-9.13186E0
ql3_imon=2.36177E-10
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=-1.07479E-10
mult1=-9.61998E-9
mult2=-2.7226E-9
rf_tmon=-5.74412E-3
rf_agc=3.19577E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.74245E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.08713E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19827E1
lens5a_imon=2.01768E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12445E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=3.14416E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04507E1
cs_ea1_imon=1.10563E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42964E0
lens1_imon=2.54857E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=3.0E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.34283E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.03892E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.2738E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.27833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15041E1
os_ea1_imon=2.38214E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63125E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20043E0
cs_ionrep_imon=9.61428E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93781E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=1.94872E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.27602E-8
tplens_vset=1.4E-1
tplens_vmon=1.64984E0
tplens_imon=-4.14704E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26008E1
iondef3_imon=1.50686E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.55156E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.9822E-4
ql6_vset=1.0E-1
ql6_vmon=9.47475E-2
ql6_imon=3.99194E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2527E0
ionrepsh_imon=8.54721E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49483E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71546E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.51483E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11436E1
os_restr2_imon=3.42274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.28558E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73285E1
iondef1_imon=1.11356E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68151E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.02255E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.57045E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.98432E-1
window_imon=-6.22906E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.8611E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92587E3
multa_neg_imon=8.73827E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.8673E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.33234E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=5.86512E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.4051E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07762E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64207E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31873E1
cs_fil1_imon=6.69233E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40131E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66617E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20869E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18737E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.78836E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.10135E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.45457E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22336E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.06744E-1
res40_imon=-2.30956E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.17037E-1	-7.98798E-1	-9.13169E0	-9.14295E0	4.29153E-3	9.49144E-2	2.73257E1	-3.2649E1	-3.26331E1	2.68286E1	1.19809E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00302E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.17084E-1	-7.98512E-1	-9.1321E0	-9.1423E0	4.26769E-3	9.4676E-2	2.7329E1	-3.26585E1	-3.26266E1	2.68713E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.17013E-1	-7.98607E-1	-9.13146E0	-9.14273E0	4.48227E-3	9.5129E-2	2.73311E1	-3.26756E1	-3.26054E1	2.67686E1	1.20017E-7	2.52318E-3	2.52318E-3	6.36244E-3	3.01085E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16941E-1	-7.9844E-1	-9.13165E0	-9.14252E0	4.55379E-3	9.52244E-2	2.72973E1	-3.26603E1	-3.2653E1	2.69067E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02396E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09286E0	-8.16989E-1	-7.98416E-1	-9.13205E0	-9.14259E0	4.50611E-3	9.52005E-2	2.73175E1	-3.26455E1	-3.26095E1	2.68094E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16703E-1	-7.98202E-1	-9.13155E0	-9.14228E0	4.64916E-3	9.50813E-2	2.72947E1	-3.26642E1	-3.26173E1	2.68151E1	1.19991E-7	2.51919E-3	2.51919E-3	6.3074E-3	2.99845E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16894E-1	-7.98321E-1	-9.13153E0	-9.14268E0	4.74453E-3	9.51052E-2	2.73107E1	-3.26173E1	-3.25998E1	2.69155E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.17084E-1	-7.98607E-1	-9.13162E0	-9.14245E0	4.57764E-3	9.50098E-2	2.73003E1	-3.26741E1	-3.26506E1	2.68178E1	1.19721E-7	2.51725E-3	2.51725E-3	6.3131E-3	2.9971E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.16798E-1	-7.98082E-1	-9.13169E0	-9.14283E0	4.62532E-3	9.52482E-2	2.73112E1	-3.26787E1	-3.25813E1	2.68556E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09325E0	-8.16798E-1	-7.98106E-1	-9.13177E0	-9.14261E0	4.8399E-3	9.48429E-2	2.72961E1	-3.26524E1	-3.265E1	2.67739E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09348E0	-8.16774E-1	-7.98368E-1	-9.13188E0	-9.14288E0	4.64916E-3	9.50575E-2	2.73313E1	-3.26795E1	-3.26015E1	2.67819E1	1.19554E-7	2.52473E-3	2.52473E-3	6.29624E-3	3.01209E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.16512E-1	-7.98154E-1	-9.13188E0	-9.14254E0	4.55379E-3	9.51529E-2	2.73228E1	-3.26389E1	-3.26223E1	2.69331E1	1.19634E-7	2.51575E-3	2.51575E-3	6.3282E-3	3.01981E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-8.16894E-1	-7.9844E-1	-9.13186E0	-9.14233E0	4.50611E-3	9.52959E-2	2.73321E1	-3.26038E1	-3.26218E1	2.68256E1	1.19705E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09333E0	-8.16798E-1	-7.98631E-1	-9.13186E0	-9.14245E0	4.50611E-3	9.51052E-2	2.73297E1	-3.26567E1	-3.2635E1	2.68755E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09279E0	-8.16536E-1	-7.98225E-1	-9.13153E0	-9.14242E0	4.52995E-3	9.50575E-2	2.73234E1	-3.27045E1	-3.26048E1	2.68082E1	1.19913E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.16917E-1	-7.98821E-1	-9.13167E0	-9.14249E0	4.22001E-3	9.52244E-2	2.73602E1	-3.26585E1	-3.26511E1	2.68508E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9926E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.17204E-1	-7.98678E-1	-9.13146E0	-9.14214E0	4.72069E-3	9.53436E-2	2.72945E1	-3.26744E1	-3.26213E1	2.68166E1	1.19861E-7	2.51662E-3	2.51662E-3	6.34588E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09356E0	-8.16798E-1	-7.98559E-1	-9.13177E0	-9.14283E0	4.45843E-3	9.50098E-2	2.7288E1	-3.26408E1	-3.26242E1	2.67839E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17204E-1	-7.98583E-1	-9.13186E0	-9.14204E0	4.07696E-3	9.49144E-2	2.73303E1	-3.26729E1	-3.26212E1	2.6837E1	1.20004E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.17013E-1	-7.98607E-1	-9.13186E0	-9.14233E0	4.55379E-3	9.47475E-2	2.73285E1	-3.26669E1	-3.26008E1	2.68151E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00966E-1
