[Scan]
initial_time=2016-01-18T21:28:58
final_time=2016-01-18T21:29:25
ip_count=19
run=1024
dataset=8
scan=605
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.16917E-1
ql1_imon=1.37272E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=1.96002E-9
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=1.80006E-10
ql4_vset=
ql4_vmon=-9.14259E0
ql4_imon=-1.27089E-10
mult1=-1.05351E-8
mult2=-2.74456E-9
rf_tmon=-4.91498E-3
rf_agc=3.29971E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.70298E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66554E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=2.01119E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53889E1
cs_ef1b_imon=3.16034E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0476E1
cs_ea1_imon=1.10202E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38277E0
lens1_imon=2.73602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64868E1
os_ef1alow_imon=2.97821E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.36338E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84373E1
cs_ef1a_imon=3.04393E-5
olens2_vset=9.7E-1
olens2_vmon=9.69553E-1
olens2_imon=1.27365E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1165E1
os_restr1_imon=4.27918E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.40305E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63534E1
os_ef1bup_imon=3.07625E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22446E0
cs_ionrep_imon=9.32588E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.93708E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01852E1
cs_anode1_imon=1.96878E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.28473E-8
tplens_vset=1.4E-1
tplens_vmon=1.6895E0
tplens_imon=-1.40728E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26825E1
iondef3_imon=1.49784E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26422E1
iondef2_imon=1.58797E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98054E-4
ql6_vset=1.0E-1
ql6_vmon=9.46999E-2
ql6_imon=4.03584E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3236E0
ionrepsh_imon=8.40301E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33261E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74569E1
cs_ef2b_imon=3.14234E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51406E0
os_ea2_imon=-7.3915E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00731E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71221E1
cs_ef2a_imon=3.1596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08057E0
os_ef2alow_imon=-2.33295E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13744E-1
os_ef2bup_imon=-5.18607E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11068E1
os_restr2_imon=3.4137E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.31442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01846E1
cs_anode2_imon=2.08959E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73285E1
iondef1_imon=1.0995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67307E1
iondef4_imon=1.1066E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.88982E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.55153E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13993E0
cs_ionaccel_imon=-7.39321E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47535E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56509E1
einzel_imon=7.84206E-6
window_vset=0.0E0
window_vmon=2.71935E-1
window_imon=-7.13617E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39224E-4
mask2_vset=0.0E0
mask2_vmon=-1.86485E1
mask2_imon=-5.66738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.5919E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.54864E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55194E0
defgridb_imon=6.23283E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33283E1
os_fil1_imon=9.41716E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08131E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63985E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=7.5132E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.89385E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66337E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.29897E-2
os_fil2_imon=-2.38275E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09093E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.79739E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32488E-1
cs_fil2_imon=-2.41947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38713E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22157E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.82654E-1
res40_imon=-2.49452E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16798E-1	-7.98273E-1	-9.13193E0	-9.14235E0	4.41074E-3	9.50813E-2	2.73451E1	-3.26839E1	-3.2626E1	2.68389E1	1.19809E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01871E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.16822E-1	-7.98464E-1	-9.13193E0	-9.14242E0	4.673E-3	9.52244E-2	2.73002E1	-3.26517E1	-3.26144E1	2.68363E1	1.19991E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16894E-1	-7.98488E-1	-9.13191E0	-9.14276E0	4.64916E-3	9.48429E-2	2.73252E1	-3.2688E1	-3.26579E1	2.68163E1	1.20137E-7	2.52362E-3	2.52362E-3	6.3074E-3	2.98026E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.17013E-1	-7.98059E-1	-9.13191E0	-9.14228E0	4.673E-3	9.52244E-2	2.73075E1	-3.26603E1	-3.26038E1	2.68569E1	1.20209E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16965E-1	-7.98392E-1	-9.132E0	-9.14285E0	4.52995E-3	9.48668E-2	2.73187E1	-3.26891E1	-3.26472E1	2.67854E1	1.19757E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16941E-1	-7.98583E-1	-9.13172E0	-9.14271E0	4.31538E-3	9.48429E-2	2.72991E1	-3.26729E1	-3.25984E1	2.68148E1	1.19601E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16965E-1	-7.98583E-1	-9.13157E0	-9.14237E0	4.36306E-3	9.49383E-2	2.7334E1	-3.2629E1	-3.26396E1	2.68487E1	1.198E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16894E-1	-7.98154E-1	-9.13181E0	-9.1423E0	4.48227E-3	9.4986E-2	2.73339E1	-3.26314E1	-3.2638E1	2.68424E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02253E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.17227E-1	-7.98059E-1	-9.13196E0	-9.14226E0	4.50611E-3	9.48906E-2	2.7321E1	-3.26331E1	-3.26236E1	2.69223E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.17132E-1	-7.98535E-1	-9.13174E0	-9.14254E0	4.673E-3	9.47714E-2	2.72806E1	-3.26425E1	-3.26731E1	2.67583E1	1.19653E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.01085E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.17299E-1	-7.98178E-1	-9.13157E0	-9.14245E0	4.62532E-3	9.50336E-2	2.73128E1	-3.26579E1	-3.25588E1	2.68629E1	1.20226E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.17251E-1	-7.9813E-1	-9.13179E0	-9.14237E0	4.62532E-3	9.49383E-2	2.7332E1	-3.26554E1	-3.26119E1	2.68286E1	1.19493E-7	2.51739E-3	2.51739E-3	6.28592E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.17275E-1	-7.98631E-1	-9.13184E0	-9.14273E0	4.79221E-3	9.51529E-2	2.7358E1	-3.26482E1	-3.26807E1	2.68322E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.0041E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.1737E-1	-7.98631E-1	-9.13181E0	-9.14273E0	4.45843E-3	9.50813E-2	2.73151E1	-3.26343E1	-3.26166E1	2.68232E1	1.19653E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.1706E-1	-7.98678E-1	-9.13167E0	-9.14252E0	4.33922E-3	9.5129E-2	2.73605E1	-3.26531E1	-3.25871E1	2.68447E1	1.20106E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16989E-1	-7.9844E-1	-9.13188E0	-9.14276E0	4.64916E-3	9.48429E-2	2.73219E1	-3.26771E1	-3.26458E1	2.68611E1	1.20106E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16894E-1	-7.98273E-1	-9.13167E0	-9.14273E0	4.8399E-3	9.49383E-2	2.73207E1	-3.26278E1	-3.2617E1	2.6813E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16917E-1	-7.98059E-1	-9.13196E0	-9.14283E0	4.74453E-3	9.50098E-2	2.73178E1	-3.26225E1	-3.26092E1	2.67163E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16822E-1	-7.98345E-1	-9.13167E0	-9.14228E0	4.673E-3	9.47714E-2	2.73297E1	-3.26657E1	-3.26086E1	2.68812E1	1.20192E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16917E-1	-7.98178E-1	-9.13169E0	-9.14259E0	4.33922E-3	9.46999E-2	2.73285E1	-3.26422E1	-3.26825E1	2.67307E1	1.20069E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
