[Scan]
initial_time=2016-01-18T21:32:04
final_time=2016-01-18T21:32:31
ip_count=19
run=1024
dataset=8
scan=610
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.37395E-8
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=1.98169E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=1.97899E-10
ql4_vset=
ql4_vmon=-9.14271E0
ql4_imon=-1.36721E-10
mult1=-8.9201E-9
mult2=-2.80949E-9
rf_tmon=-4.25582E-3
rf_agc=3.3433E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.68924E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64085E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19978E1
lens5a_imon=2.00492E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.04817E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54132E1
cs_ef1b_imon=3.16714E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.02266E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04705E1
cs_ea1_imon=1.10768E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39911E0
lens1_imon=2.65298E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64735E1
os_ef1alow_imon=2.97359E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03602E1
cs_ea2_imon=1.34906E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84397E1
cs_ef1a_imon=3.04754E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.27361E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11342E1
os_restr1_imon=4.26936E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15158E1
os_ea1_imon=2.41053E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63603E1
os_ef1bup_imon=3.08222E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22142E0
cs_ionrep_imon=9.33538E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01886E1
cs_anode1_imon=1.96867E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.27193E-8
tplens_vset=1.4E-1
tplens_vmon=1.65028E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26166E1
iondef3_imon=1.51117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26384E1
iondef2_imon=1.5678E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98165E-4
ql6_vset=1.0E-1
ql6_vmon=9.47475E-2
ql6_imon=4.01747E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28749E0
ionrepsh_imon=8.52132E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.16702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74719E1
cs_ef2b_imon=3.13423E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50104E0
os_ea2_imon=-6.81143E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00729E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71134E1
cs_ef2a_imon=3.16325E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07314E0
os_ef2alow_imon=-2.5064E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.27697E-1
os_ef2bup_imon=-5.14962E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11348E1
os_restr2_imon=3.41518E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.29468E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01727E1
cs_anode2_imon=2.08685E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73352E1
iondef1_imon=1.10378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6846E1
iondef4_imon=1.0968E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.95678E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.53173E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14312E0
cs_ionaccel_imon=-7.018E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47339E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56594E1
einzel_imon=7.85415E-6
window_vset=0.0E0
window_vmon=2.54376E-1
window_imon=-8.18569E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39233E-4
mask2_vset=0.0E0
mask2_vmon=-1.86598E1
mask2_imon=-5.28417E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.45596E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.75869E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.19404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=6.37644E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.43953E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07435E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63985E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31828E1
cs_fil1_imon=6.72695E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.83488E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6647E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.117E-2
os_fil2_imon=-2.54966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0857E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.8582E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31622E-1
cs_fil2_imon=-2.25479E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.58442E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22124E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72773E-1
res40_imon=-2.40025E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.16703E-1	-7.98297E-1	-9.13172E0	-9.14266E0	4.26769E-3	9.4986E-2	2.73263E1	-3.26644E1	-3.26573E1	2.68929E1	1.19646E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00197E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16655E-1	-7.98392E-1	-9.13179E0	-9.14257E0	4.55379E-3	9.50575E-2	2.73171E1	-3.26663E1	-3.26248E1	2.68569E1	1.19851E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16536E-1	-7.9844E-1	-9.132E0	-9.14249E0	4.12464E-3	9.51529E-2	2.73039E1	-3.26514E1	-3.26225E1	2.68007E1	1.19757E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01871E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16798E-1	-7.98368E-1	-9.13212E0	-9.1424E0	4.45843E-3	9.48191E-2	2.73326E1	-3.26432E1	-3.26627E1	2.6834E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16536E-1	-7.98321E-1	-9.13186E0	-9.14247E0	4.62532E-3	9.49144E-2	2.73311E1	-3.26579E1	-3.2629E1	2.68635E1	1.20122E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16679E-1	-7.98154E-1	-9.13148E0	-9.14292E0	4.62532E-3	9.49621E-2	2.73466E1	-3.26543E1	-3.2602E1	2.68256E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.03976E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16727E-1	-7.98225E-1	-9.1315E0	-9.14316E0	4.74453E-3	9.51767E-2	2.73257E1	-3.26555E1	-3.26561E1	2.68202E1	1.19851E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16846E-1	-7.98368E-1	-9.13165E0	-9.14304E0	4.55379E-3	9.50575E-2	2.73159E1	-3.26218E1	-3.2611E1	2.68654E1	1.19809E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16655E-1	-7.98655E-1	-9.13155E0	-9.14266E0	4.45843E-3	9.49144E-2	2.73003E1	-3.26488E1	-3.2596E1	2.68224E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16536E-1	-7.98368E-1	-9.13169E0	-9.14264E0	4.43459E-3	9.51767E-2	2.7299E1	-3.26517E1	-3.26493E1	2.67589E1	1.20069E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16679E-1	-7.98082E-1	-9.13167E0	-9.14295E0	4.33922E-3	9.5129E-2	2.73163E1	-3.26803E1	-3.2639E1	2.69217E1	1.19978E-7	2.52473E-3	2.52473E-3	6.31858E-3	3.0041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16703E-1	-7.9813E-1	-9.13155E0	-9.14252E0	4.62532E-3	9.50336E-2	2.73189E1	-3.26681E1	-3.26512E1	2.68482E1	1.19697E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.9841E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16798E-1	-7.98273E-1	-9.1316E0	-9.14278E0	4.62532E-3	9.51052E-2	2.73345E1	-3.26633E1	-3.26254E1	2.68791E1	1.19902E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.17227E-1	-7.98368E-1	-9.13181E0	-9.14283E0	4.3869E-3	9.50336E-2	2.73086E1	-3.26272E1	-3.2626E1	2.67704E1	1.19766E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.00144E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.17275E-1	-7.98512E-1	-9.13181E0	-9.14288E0	4.33922E-3	9.51052E-2	2.72883E1	-3.26699E1	-3.26236E1	2.69091E1	1.198E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.17204E-1	-7.98488E-1	-9.13165E0	-9.14276E0	4.48227E-3	9.49144E-2	2.73153E1	-3.26512E1	-3.26549E1	2.67049E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9952E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16727E-1	-7.98321E-1	-9.13169E0	-9.14264E0	4.36306E-3	9.47237E-2	2.73346E1	-3.26608E1	-3.26119E1	2.68923E1	1.19601E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16727E-1	-7.98297E-1	-9.13138E0	-9.14268E0	4.36306E-3	9.49383E-2	2.73135E1	-3.26597E1	-3.26158E1	2.68661E1	1.19851E-7	2.50989E-3	2.50989E-3	6.30202E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16846E-1	-7.98416E-1	-9.13181E0	-9.14266E0	4.24385E-3	9.50098E-2	2.73381E1	-3.26496E1	-3.26307E1	2.68034E1	1.19697E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16679E-1	-7.98368E-1	-9.13165E0	-9.14271E0	4.19617E-3	9.47475E-2	2.73352E1	-3.26384E1	-3.26166E1	2.6846E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9874E-1
