[Scan]
initial_time=2016-01-18T21:32:41
final_time=2016-01-18T21:33:08
ip_count=19
run=1024
dataset=8
scan=611
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.17108E-1
ql1_imon=1.36765E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=2.00865E-9
ql3_vset=
ql3_vmon=-9.13188E0
ql3_imon=1.94168E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-1.24919E-10
mult1=-1.05278E-8
mult2=-2.74677E-9
rf_tmon=-2.88725E-3
rf_agc=3.53856E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.68633E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64644E0
bslens_imon=2.29413E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19473E1
lens5a_imon=2.01489E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1252E2
lens4a_imon=2.05011E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54056E1
cs_ef1b_imon=3.16656E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02384E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04527E1
cs_ea1_imon=1.10132E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43802E0
lens1_imon=2.88497E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64743E1
os_ef1alow_imon=2.99041E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03645E1
cs_ea2_imon=1.35165E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84422E1
cs_ef1a_imon=3.03939E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.27359E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11375E1
os_restr1_imon=4.28056E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15157E1
os_ea1_imon=2.3991E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63412E1
os_ef1bup_imon=3.08268E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19347E0
cs_ionrep_imon=9.33632E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91937E2
cs_nozzle_imon=1.93536E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01871E1
cs_anode1_imon=1.96298E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.27977E-8
tplens_vset=1.4E-1
tplens_vmon=1.67502E0
tplens_imon=-2.91187E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26083E1
iondef3_imon=1.51285E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.57399E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98196E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.03844E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25665E0
ionrepsh_imon=8.40396E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33498E1
lens5b_imon=2.17677E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7477E1
cs_ef2b_imon=3.13167E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48946E0
os_ea2_imon=-7.38581E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71442E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06574E0
os_ef2alow_imon=-2.36834E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09354E-1
os_ef2bup_imon=-5.2842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11336E1
os_restr2_imon=3.41587E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.31021E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01877E1
cs_anode2_imon=2.08646E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73334E1
iondef1_imon=1.09585E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.09862E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.91442E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.53063E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13238E0
cs_ionaccel_imon=-7.94654E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56511E1
einzel_imon=7.82206E-6
window_vset=0.0E0
window_vmon=2.82318E-1
window_imon=-7.40967E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.39151E-4
mask2_vset=0.0E0
mask2_vmon=-1.86294E1
mask2_imon=-5.46353E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.46819E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.74075E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.33841E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36468E0
defgridb_imon=6.27628E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.42901E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07832E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64028E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31854E1
cs_fil1_imon=7.71283E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.73168E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66515E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.13877E-2
os_fil2_imon=-2.44289E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13725E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.90016E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31219E-1
cs_fil2_imon=-2.30309E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55564E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22267E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31009E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.42908E-1
res40_imon=-2.46565E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=267
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16965E-1	-7.9813E-1	-9.13181E0	-9.14266E0	4.31538E-3	9.48191E-2	2.73219E1	-3.26485E1	-3.26354E1	2.68706E1	1.19634E-7	2.51575E-3	2.51575E-3	6.3126E-3	3.01237E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16941E-1	-7.9813E-1	-9.13196E0	-9.14254E0	4.69685E-3	9.47237E-2	2.73326E1	-3.26682E1	-3.26205E1	2.6797E1	1.19872E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00144E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16655E-1	-7.98035E-1	-9.13174E0	-9.14261E0	4.79221E-3	9.48429E-2	2.73096E1	-3.26585E1	-3.26064E1	2.68082E1	1.19872E-7	2.5225E-3	2.5225E-3	6.29624E-3	2.98819E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16774E-1	-7.98464E-1	-9.132E0	-9.14264E0	4.72069E-3	9.48906E-2	2.73438E1	-3.26803E1	-3.26666E1	2.68618E1	1.19585E-7	2.51783E-3	2.51783E-3	6.323E-3	2.99014E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.16679E-1	-7.98225E-1	-9.13181E0	-9.14311E0	4.36306E-3	9.47475E-2	2.73103E1	-3.26741E1	-3.26167E1	2.68679E1	1.20208E-7	2.52293E-3	2.52293E-3	6.33592E-3	2.9971E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16536E-1	-7.9844E-1	-9.13169E0	-9.1428E0	4.62532E-3	9.4986E-2	2.73118E1	-3.26768E1	-3.26248E1	2.68184E1	1.20127E-7	2.5199E-3	2.5199E-3	6.323E-3	3.0E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09665E0	-8.16774E-1	-7.98631E-1	-9.13169E0	-9.14264E0	4.52995E-3	9.50098E-2	2.72877E1	-3.26783E1	-3.2623E1	2.68448E1	1.19925E-7	2.52362E-3	2.52362E-3	6.32978E-3	3.0201E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16798E-1	-7.98392E-1	-9.13181E0	-9.14237E0	4.86374E-3	9.50336E-2	2.72997E1	-3.26549E1	-3.26374E1	2.67872E1	1.19925E-7	2.52362E-3	2.52362E-3	6.30182E-3	3.02813E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16631E-1	-7.98202E-1	-9.13203E0	-9.14266E0	4.86374E-3	9.47952E-2	2.73153E1	-3.26272E1	-3.26176E1	2.68761E1	1.19953E-7	2.52599E-3	2.52599E-3	6.31817E-3	3.03286E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16965E-1	-7.98416E-1	-9.13177E0	-9.14259E0	4.64916E-3	9.49383E-2	2.73145E1	-3.26602E1	-3.26467E1	2.67553E1	1.20084E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.01209E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.17013E-1	-7.98416E-1	-9.13177E0	-9.14271E0	4.57764E-3	9.51052E-2	2.73117E1	-3.26705E1	-3.26044E1	2.6831E1	1.20209E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16822E-1	-7.9844E-1	-9.13181E0	-9.14261E0	4.29153E-3	9.52005E-2	2.73252E1	-3.26496E1	-3.26018E1	2.68496E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16774E-1	-7.98225E-1	-9.13177E0	-9.14264E0	4.43459E-3	9.51052E-2	2.73213E1	-3.26597E1	-3.25996E1	2.68226E1	1.20122E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00302E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16894E-1	-7.98368E-1	-9.13203E0	-9.1423E0	4.72069E-3	9.48429E-2	2.73279E1	-3.26867E1	-3.26464E1	2.67931E1	1.19653E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16607E-1	-7.98178E-1	-9.13219E0	-9.14259E0	4.57764E-3	9.48429E-2	2.73031E1	-3.26737E1	-3.26402E1	2.69139E1	1.19757E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02396E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16727E-1	-7.97963E-1	-9.13184E0	-9.14237E0	4.76837E-3	9.48429E-2	2.73674E1	-3.27019E1	-3.25962E1	2.68192E1	1.19772E-7	2.51867E-3	2.51867E-3	6.31666E-3	3.01609E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16727E-1	-7.98488E-1	-9.13188E0	-9.14237E0	4.69685E-3	9.48429E-2	2.73544E1	-3.26536E1	-3.26308E1	2.67984E1	1.19514E-7	2.52147E-3	2.52147E-3	6.31332E-3	2.97394E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16822E-1	-7.97963E-1	-9.13143E0	-9.14249E0	4.72069E-3	9.47952E-2	2.72886E1	-3.26378E1	-3.26089E1	2.68346E1	1.19653E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.99E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16751E-1	-7.97939E-1	-9.13172E0	-9.14264E0	4.43459E-3	9.48191E-2	2.73364E1	-3.2659E1	-3.26166E1	2.68742E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.17108E-1	-7.98106E-1	-9.13188E0	-9.14283E0	4.36306E-3	9.50098E-2	2.73334E1	-3.26555E1	-3.26083E1	2.6831E1	1.198E-7	2.51739E-3	2.51739E-3	6.31009E-3	3.00453E-1
